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Year 2017 (28 papers, including 7 invited)

  1. Zhengli Han and Hiroshi Toshiyoshi, "Structure Reconfigurable Metamaterial Plate with MEMS Technique for THz Wave Beam Shaping," in Proc. 11th International Congress on Engineered Material Platforms for Novel Wave Phenomena (Metamaterials 2017), Aug. 28th – Sept. 2nd, 2017, Marseille, France. (accepted, oral)
  2. Kazuhide Ichikawa, Zhengli Han, and Hiroshi Toshiyoshi, "Tunable Terahertz Bandpass Filter using MEMS Reconfigurable Metamaterial," in Proc. IEEE Int. Conf. on Optical MEMS and Nanophotonics (OMN2017), Aug. 13-17, 2017, Santa Fe, New Mexico, USA, pp. XXX-XXX. (accepted, poster)
  3. M.-S. Khan, K. Isamoto, C. Keum, N. Lafitte, K. Totsuka, C. Chong, N. Nishiyama, and H. Toshiyoshi, "A MEMS tunable VCSEL for Scalable SS-OCT," International Commission for Optics (ICO-24), Aug. 21-25, 2017, Keio Plaza Hotel, Tokyo.
  4. Hiroshi Toshiyoshi, "MEMS Vibrational Energy Harvesters using High Density Solid-Ion Electret," in Proc. 2017 IEEE International Conference on Mechatronics and Automation (ICMA 2017), August 6-9, 2017, Takamatsu, Japan, pp. ___-___. (invited)
  5. Hiroshi Toshiyoshi, "A Liquid-driven MEMS Vibrational Energy Harvester," in Proc. 7th Int. Multidisciplinary Conference on Optofluidics (Optofluidics 2017), July 25-28, 2017, Grand Copthorne Waterfront Hotel, Singapore. (invited)
  6. Hiroshi Toshiyoshi, "A MEMS Electret Energy Harvester for Wireless IoT Applications," The 15th International Nanotech Symposium & Nano-Convergence Expo. (NANO KOREA 2017, TS03 Nanofabrication & Measurement), July 12-14, 2017, Kintex, Ilsan, Korea. (invited)
  7. Hiroshi Toshiyoshi, Kazuhide Ichikawa, and Zhengli Han, "MEMS Metamaterial Tunable Filters for THz Optics," in Proc. 2017 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2017), July 3-5, 2017, Hotel Hyundai, Gyeongju, Korea. (invited)
  8. Kota Ito, "Hysteretic Metal-Insulator Transition of VO2 and Near-Field Radiative Heat Transfer Play Key Role in Radiative Thermal Information Processing," in Proc. 3rd International Workshop on Nano-Micro Thermal Radiation (NanoRad 2017), June 26-28, 2017, KAIST, Daejeon, Korea.
  9. Kota Ito, "Thermal Emission Control by Subwavelength Structures: Tiled MIM Resonators for Parasitic Suppression and Graphene Plasmon toward Active Beaming," in Proc. 3rd International Workshop on Nano-Micro Thermal Radiation (NanoRad 2017), June 26-28, 2017, KAIST, Daejeon, Korea.
  10. Hiroaki Honma, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A Three-ports Structure for Electrostatic Energy-Harvester to Lower Constraint Force and to Enhance Fast Storage," in Proc. 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), June 18-22, 2017, Kaohsiung Exhibition Center, Kaohsiung, Taiwan. (accepted, poster (late news))
  11. Faruk A. Shaik, Grant Cathcart, Satoshi Ihida, Hiroshi Toshiyoshi, and Agnes Tixier-Mita, "Extracellular Neural Stimulation and Recording with a Thin-Film-Transistor Array Device," in Proc. 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), June 18-22, 2017, Kaohsiung Exhibition Center, Kaohsiung, Taiwan. (accepted, oral)
  12. Grant Cathcart, Faruk A. Shaik, Satoshi Ihida, Hiroshi Toshiyoshi, and Agnes Tixier-Mita, "Simultaneous Optical and Electrical Monitoring of Cells on a Transparent Thin Film Transistor Array," in Proc. 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), June 18-22, 2017, Kaohsiung Exhibition Center, Kaohsiung, Taiwan. (accepted, poster)
  13. Shunsuke Yamada and Hiroshi Toshiyoshi, "Pressure Sensitive Ionic Gel-FET of Extremely High Sensitivity over 2,200 kPa-1 under 2 V," in Proc. 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), June 18-22, 2017, Kaohsiung Exhibition Center, Kaohsiung, Taiwan. (accepted, oral)
  14. Yongfang Li, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "Transfer-condition Optimization of an Electrochemical-based Nanoimprint Lithography for 1:1 Transfer of Thin-film Edge Electrode," in Proc. 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), June 18-22, 2017, Kaohsiung Exhibition Center, Kaohsiung, Taiwan. (accepted, poster)
  15. Masahide Goto, Yuki Honda, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto, "Event-Driven Correlated Double Sampling for Pulse-Frequency-Modulation A/D Converters Integrated in Pixel-Parallel Image Sensors," in Proc. International Image Sensor Workshop, May 30 - June 2, 2017 (IISW), Grand Prince Hotel Hiroshima, Hiroshima, Japan.
  16. Hiroyuki Mitsuya, Hisayuki Ashizawa, Daisuke Anai, Hiroaki Honma, Gen Hashiguchi,Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A broad-band vibrational energy harvester utilizing symmetrically comb-drive coupled with strong charged electret," in Proc. Design, Test, Integration and Packaging of MEMS/MOEMS Symposium (DTIP 2017), May 29 - June 1, 2017, Bordeaux, France.
  17. Hiroaki Honma, Hiroyuki Mitsuya, Hisayuki Ashizawa, Gen Hashiguchi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Design and fabrication of a high-power energy harvester based on a three-ports comb drive mechanism for large displacement," in Proc. Design, Test, Integration and Packaging of MEMS/MOEMS Symposium (DTIP 2017), May 29 - June 1, 2017, Bordeaux, France.
  18. Wenjun Zhao, Hiroaki Honma, and Hiroshi Toshiyoshi, "Power management system of a MEMS vibrational energy harvesting sensor node under low vibration conditions," in Proc. Design, Test, Integration and Packaging of MEMS/MOEMS Symposium (DTIP 2017), May 29 - June 1, 2017, Bordeaux, France.
  19. Shimpei Ono, Kazumoto Miwa, Hiroyuki Mitsuya, Kazunori Ishibashi, Chikako Sano, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "New type of energy harvester with electric double layer electrets," in Proc. Design, Test, Integration and Packaging of MEMS/MOEMS Symposium (DTIP 2017), May 29 - June 1, 2017, Bordeaux, France.
  20. Zhengli Han and Hiroshi Toshiyoshi, "MEMS Reconfigurable Metamaterials for a Switchable THz Band Pass Filter," in Proc. 8th International Conference on Surface Plasmon Photonics (SPP8), May 22-26, 2017, Taipei, Taiwan.
  21. Yuki Honda, Masahide Goto, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto, "3-Layered Au/SiO2 Hybrid Bonding with 6-μm-Pitch Au Electrodes for 3D Structured Image Sensors," in Proc. 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2017), May 16-18, 2017, The University of Tokyo, Hongo, Japan.
  22. Hiroshi Toshiyoshi, "Thin Film Transistor Technology for Biochemical Engineering," in Proc. 12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017), April 9-12, 2017, UCLA, Los Angeles, California, USA. (invited)
  23. Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Yoshihiro Miyake, and Kazuya Masu, "MEMS inertial sensors for biomedical applications," in Proc. 12th Annual IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2017), April 9-12, 2017, UCLA, Los Angeles, California, USA. (invited)
  24. Agnes Tixier-Mita, Satoshi Ihida, Grant Cathcart, Faruk Azam Shaik, Yoshio Mita, and Hiroshi Toshiyoshi, "A Test Structure to Characterize Transparent Electrode Array Platform with Transparent Access TFTs for Bio-Chemical Applications," in Proc. 30th IEEE Int. Conf. on Microelectronic Test Structures (ICMTS 2017), March 27-30, 2017, Maison Minatec, Grenoble, France.
  25. Nicolas Lafitte, Keiji Isamoto, Kiyotaka Yamashita, Mohammed Saad Khan, Kouki Totsuka, Changho Chong, Nobuhiko Nishiyama, and Hiroshi Toshiyoshi, "MEMS technologies for Optical Coherence Tomography," in Proc. 3rd SPIE's International Conference on Nano-Bio Sensing, Imaging, and Spectroscopy (NBSIS 2017), Feb. 22-24, 2017, Jeju Island, Korea. (invited)
  26. Yongfang Li, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "Electrostamping through SAM layer for 1:1 Transcription of 40-nm-wide Patterns over mm2 Area," in Proc. 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2017), Rio Las Vegas Hotel and Casino, Las Vegas, NV, USA, pp. 278-281.
  27. Sungho Jeon and Hiroshi Toshiyoshi, "A Bi-directional Free-space Optical Communication System with MEMS Spatial light Modulator for Agile Data Link," in Proc. 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2017), Rio Las Vegas Hotel and Casino, Las Vegas, NV, USA, pp. 297-300.
  28. D. Terutsuki, H. Mitsuno, Y. Okamoto, T. Sakurai, A. Tixier-Mita, H. Toshiyoshi, Y. Mita, and R. Kanzaki, "Odor-sensitive Field Effect Transistor (OSFET) Based on Insect Cells Expressing Insect Odorant Receptors," in Proc. 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2017), Rio Las Vegas Hotel and Casino, Las Vegas, NV, USA, pp. 394-397.

Year 2016 (31 papers, including 5 invited)

  1. Satoshi Inoue, Takuya Takahashi, Momoko Kumemura, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "An implantable fluidic vibrational energy harvester," in Proc. 16th Int. Conf. on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2016), Dec. 6-9, 2016, Paris, France. (accepted, late news poster)
  2. Hideaki Koga, Hiroyuki Mitsuya, Tatsuhiko Sugiyama, Hiroshi Toshiyoshi, and Gen Hashiguchi, "1 mW output electrostatic vibratory power generator allowed by optimization of the proof mass," in Proc. 16th Int. Conf. on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2016), Dec. 6-9, 2016, Paris, France. (accepted, late news poster)
  3. Hiroyuki Mitsuya, Hisayuki Ashizawa, Kazunori Ishibashi, Hiroaki Homma, Manabu Ataka, Gen Hashiguchi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A Frequency-Independent Vibrational Energy Harvester using Symmetrically Charged Comb-Drive Electrodes with Heavily-Doped Ion Electrets," in Proc. 16th Int. Conf. on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2016), Dec. 6-9, 2016, Paris, France. (accepted, oral)
  4. Shimpei Ono, Kazumoto Miwa, Jenna Iori, Hiroyuki Mitsuya, Kazunori Ishibashi, Chikako Sano, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "A Novel Vibrational Energy Harvester with Electric Double Layers Electrets," in Proc. 16th Int. Conf. on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2016), Dec. 6-9, 2016, Paris, France. (accepted, poster)
  5. Chikako Sano, Hiroyuki Mitsuya, Shimpei Ono, Kazumoto Miwa, Manabu Ataka, Gen Hashiguchi, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "Electrostatic vibrational energy harvester with ionic liquid and potassium-ion-electret," in Proc. 16th Int. Conf. on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2016), Dec. 6-9, 2016, Paris, France. (accepted, poster)
  6. Masahide Goto, Yuki Honda, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto, "Pixel-Parallel 3-D Integrated CMOS Image Sensors Developed by Direct Bonding of SOI Layers for Next-Generation Television Systems," in Proc. International Microsystems, Packaging, Assembly and Circuit Technology Conference (IMPACT 2016), Oct. 26-28, 2016, Taipei Nangang Exhibition Center, Taipei, Taiwan. (invited)
  7. Masahide Goto, Yuki Honda, Toshihisa Watabe,Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi and Toshiro Hiramoto, "In-Pixel A/D Converters with 120-dB Dynamic Range Using Event-Driven Correlated Double Sampling for Stacked SOI Image Sensors," in Proc. IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S 2016), October 10-13, 2016, Hyatt Regency San Francisco Airport, CA. (oral)
  8. D. Yamane, T. Konishi, T. Safu, H. Nakajima, M. Teranishi1, C.-Y. Chen, T.-F. M. Chang, M. Sone, H. Toshiyoshi, K. Masu, and K. Machida, "Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices," in Proc. 29th International Microprocesses and Nanotechnology Conference (MNC 2016), November 8-11, 2016, ANA Crown Plaza Kyoto, Kyoto, Japan.
  9. Toshifumi Konishi, Teruaki Safu, Katsuyuki Machida, Daisuke Yamane, Masato Sone, Kazuya Masu, Hiroshi Toshiyoshi, "A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology," IEEE Sensors 2016, Oct. 30 - Nov. 2, 2016, Orland, FL, USA. (Best Industrial Paper Award)
  10. Yuki Honda, Kei Hagiwara, Masahide Goto, Toshihisa Watabe, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Hiroshi Toshiyoshi, Eiji Higurashi, and Toshiro Hiramoto, "Au/SiO2 hybrid bonding with 6-µm-pitch Au electrodes for 3D structured image sensors," Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME 2016), Oct. 2-7, 2016, Honolulu, Hawaii (oral).
  11. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, and Katsuyuki Machida, "A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology," in Proc. 2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016), Tsukuba International Congress Center, Tsukuba, Japan, Sept. 26-29, 2016. (oral)
  12. Toshifumi Konishi, Daisuke Yamane, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida, "A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System," in Proc. 2016 Int. Conf. on Solid State Devices and Materials (SSDM 2016), Tsukuba International Congress Center, Tsukuba, Japan, Sept. 26-29, 2016. (poster)
  13. K. Ito, A. Miura, K. Nishikawa, H. Iizuka, and H. Toshiyoshi, "Experimental Study on Electromagnetic Heat Transfer: Near-field Coupling, Thermal Diode, and Thermal Information Storage
," in Proc. 14th Int. Conf. on Near-Field Optics, Nanophotonics and Related Techniques (NFO-14), Sept. 4-8, 2016, Act City Hamamatsu, Hamamatsu, Japan.
  14. Zhengli Han, Takuya Takahashi, and Hiroshi Toshiyoshi, "A MEMS Metamaterial for Dynamic Terahertz Wave Switching," in Proc. 16th Int. Conf. on Nanotechnology (IEEE NANO 2016), Aug. 22-25, 2016, Sendai, Japan.
  15. Hiroshi Toshiyoshi, Satoshi Ihida, and Agnes Tixier-Mita, "MEMS on TFT," IEEE Int. Conf. on Optical MEMS and Nanophotonics (OMN 2016), July 31 - August 4, 2016, Singapore. (invited)
  16. Zhengli Han and Hiroshi Toshiyoshi, "Coupling Mechanism Analysis for MEMS Reconfigurable Metamateerial Device," IEEE Int. Conf. on Optical MEMS and Nanophotonics (OMN 2016), July 31 - August 4, 2016, Singapore.
  17. Zhengxi Cheng and Hiroshi Toshiyoshi, "A Design for CMOS Infrared Metamaterial Absorbers for Near Unity Absorpity," IEEE Int. Conf. on Optical MEMS and Nanophotonics (OMN 2016), July 31 - August 4, 2016, Singapore.
  18. Hiroyuki Mitsuya, Shimpei Ono, Kazumoto Miwa, Chikako Sano, Manabu Ataka, Hiroshi Toshiyoshi, Hiroyuki Fujita, "A SOFT ELECTRET GEL FOR LOW FREQUENCY VIBRATIONAL ENERGY HARVESTERS," in Proc. Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016), June 26 - 29, 2016, Kanazawa, Japan, pp. 215-216.
  19. Zhengxi Cheng and Hiroshi Toshiyoshi, “A Design of CMOS-MEMS Multispectral Infrared Emitter Arrays with Metamaterial Absorbers,” in Proc. Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016), June 26 - 29, 2016, Kanazawa, Japan, pp 203-204.
  20. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Hiroshi Toshiyohi, Kazuya Masu, and Katsuyuki Machida, “A Novel MEMS Inertial Sensor With Out-of-plane Differential Sensing Structure By Multi-layer Metal Technology,” in Proc. Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016), June 26 - 29, 2016, Kanazawa, Japan, pp. 299-300.
  21. Sungho Jeon and Hiroshi Toshiyoshi, “An Optical System for Bi-directional Free Space Optical Communication with Acquisition and Tracking Capabilities,” in Proc. Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016), June 26 - 29, 2016, Kanazawa, Japan, pp. 29-30.
  22. F. A. Shaik, G. Cathcart, S. Ihida, J. Kawada, Y. Ikeuchi, A. Tixier-Mita, and H. Toshiyoshi, “Two-Dimensional MATLAB Coupled COMSOL Simulation of EWOD for TFT Array Device,” in Proc. Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2016), June 26 - 29, 2016, Kanazawa, Japan, pp. 47-48.
  23. A. Tixier-Mita, S. Ihida, G. A. Cathcart, F. A. Shaik, and H. Toshiyoshi, "More Than Moore Applications with Thin-Film-Transistors Substrates from LCD: New Devices for Biological Cells Analyses," in Proc. 229th ECS Meeting, May 29 - June 3, 2016, San Diego, CA, US. (invited)
  24. D. Yamane, T. Konishi, H. Toshiyoshi, K. Masu, and K. Machida, "A 1-mG MEMS Sensor," in Proc. 229th ECS Meeting, May 29 - June 3, 2016, San Diego, CA, US. (invited, also publication in the More-than-Moore 3 issue of "ECS Transactions" (ECST))
  25. Masahide Goto, Kei Hagiwara, Yuki Honda, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto, "Pixel-Parallel CMOS Image Sensors with 16-bit A/D Converters Developed by 3-D Integration of SOI Layers with Au/SiO2 Hybrid Bonding," in Proc. 229th ECS Meeting, May 29 - June 3, 2016, San Diego, CA, US. (invited)
  26. Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, and Katsuyuki Machida, "A Design of Spring Constant Arranged for MEMS Accelerometer by Multi-layer Metal Technology," in Proc. 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2016), Matsushima and Sendai, Japan, 17-20 April, 2016.
  27. Kunhan Chen, Yongfang Li, Hiroshi Toshiyoshi, and Hiroyuki Fujita "Sub-30 nm Pattern Collective Transcription by Thin-film Edge Electrode Lithography," in Proc. 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2016), Matsushima and Sendai, Japan, 17-20 April, 2016.
  28. Zhengxi Cheng and Hiroshi Toshiyoshi, "Design of CMOS-MEMS Infrared Emitter Arrays," in Proc. 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2016), Matsushima and Sendai, Japan, 17-20 April, 2016.
  29. Grant A. Cathcart, Agnès Tixier-Mita, Satoshi Ihida, Faruk A. Shaik, and Hiroshi Toshiyoshi, "Transparent Thin Film Transistor Electrode Array for Real-Time In-Vitro Electrical Characterization of Cell Cultures," in Proc. 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2016), Matsushima and Sendai, Japan, 17-20 April, 2016.
  30. Masahide Goto, Kei Hagiwara, Yuki Honda, Masakazu Nanba,Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto, "Three-Dimensional Integration Technology of Separate SOI Layers for Photodetectors and Signal Processors of CMOS Image Sensors," in Proc. 2016 International Conference on Electronics Packaging (ICEP 2016), April 20-22, 2016, Sapporo Education and Culture Hall, Sapporo, Japan. (Outstanding Technical Paper Awards)
  31. Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida, "A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/√Hz by Multi-Layer Metal Technology," IEEE Inertial Sensors 2016, Laguna Beach, CA, US, Feb 22-25, 2016. (Late News)

Year 2015 (30 papers, including 4 invited)

  1. Hiroyuki Mitsuya, Shimpei Ono, Kazumoto Miwa, Manabu Ataka, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "Soft Electret Gel for Low Frequency Vibrational Energy Harvesters," in Proc. 15th Int. Conf. on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2015), Dec. 1-4, 2015, Boston, MA.
  2. Hisayuki Ashizawa, Hiroyuki Mitsuya, Kazunori Ishibashi, Takuro Ishikawa, Hiroyuki Fujita, Gen Hashiguchi, and Hiroshi Toshiyoshi, "Impulse-excited Energy Harvester based on Potassium-ion-electret," in Proc. 15th Int. Conf. on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2015), Dec. 1-4, 2015, Boston, MA.
  3. Kei Hagiwara, Masahide Goto, Yuki Honda, Masakazu Namba, Hiroshi Ohtake, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Hiroshi Toshiyoshi, Eiji Higurashi, and Toshiro Hiramoto, "Development of a Three-Dimensional Integrated Image Sensor with Pixel-Parallel Signal Processing Architecture," IEEE Sensors 2015, Nov. 1-4, 2015, Busan, Korea.
  4. Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida, "A Sub-1G CMOS-MEMS Accelerometer," IEEE Sensors 2015, Nov. 1-4, 2015, Busan, Korea.
  5. A. Tixier-Mita, S. Ihida, G. A. Cathcart, and H. Toshiyoshi, "Impedance Sensing on Yiast Cells with a TFT Substrate from a TFT/LCD Panel Display," in Proc. 19th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2015), Oct. 25-29, 2015, Gyeongju, Korea.
  6. Timothée Levi, Agnès Tixier-Mita, Bertrand-David Ségard, Hiroshi Toshiyoshi, Hiroyuki Fujita, Teruo Fujii, "BIOMIMETIC MICROFLUIDIC NEURONS FOR HYBRID EXPERIMENTS," in Proc. 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2015), Oct. 25-29, 2015, Gyeongju, Korea, pp. ___-___.
  7. Masahide Goto, Kei Hagiwara, Yuki Honda, Masakazu Nanba, Hiroshi Ohtake, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto, "128 x 96 Pixel-Parallel Three-Dimensional Integrated CMOS Image Sensors with 16-bit A/D Converters by Direct Bonding with Embedded Au Electrodes," in Proc. IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (IEEE S3S), Oct. 5-8, 2015, The DoubleTree Hilton Sonoma Wine Country, CA.
  8. Agnès Tixier-Mita, Betrand-David Segard, Grant A. Cathcart, Takuya Takahashi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Electronic Device from TFT Display for Applications on Biological Cells," 2015 International Conferene on Solid State Devices and Materials (SSDM 2015), Sept. 27-30, 2015, Sapporo Convention Center, Sapporo, Japan. (invited)
  9. Toshifumi Konishi, Daisuke Yamane, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Kazuya Masu, Hiroshi Toshiyoshi, and Katsuyuki Machida, "Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer," in Proc. 2015 International Conference on Solid State Devices and Materials (SSDM 2015), Sapporo Convention Center, Sapporo, Japan, Sept. 27-30, 2015.
  10. Daisuke Yamane,Toshifumi Konishi, Motohiro Takayasu, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, and Katsuyuki Machida, "Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology," in Proc. 2015 International Conference on Solid State Devices and Materials (SSDM 2015), Sapporo Convention Center, Sapporo, Japan, Sept. 27-30, 2015. (late news)
  11. M. Teranishi, T.F.M. Chang, C.Y. Chen, T. Konishi, K. Machida, H. Toshiyoshi, D. Yamane, K. Masu, and M. Sone, "Study on Ti/Au Two-Layered Cantilevers with Different Aspect Ratio for MEMS Devices," in Proc. 2015 International Conference on Solid State Devices and Materials (SSDM 2015), Sapporo Convention Center, Sapporo, Japan, Sept. 27-30, 2015.
  12. Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, and Katsyuki Machida, "A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology," in Proc. 41st Micro and Nano Engineering (MNE2015), Sept. 21-24, 2015, The Hague, The Netherlands. (accepted, poster)
  13. M. Teranishi, T.F.M. Chang, C.Y. Chen, T. Konishi, K. Machida, H. Toshiyoshi, D. Yamane, K. Masu, and M. Sone, "Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers," in Proc. 41st Micro and Nano Engineering (MNE2015), Sept. 21-24, 2015, The Hague, The Netherlands.
  14. Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, and Katsuyuki Machida, "A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology,in Proc. 25th Advanced Metallization Conference Asian Session (ADMETAplus2015), Sept. 16-18, 2015, Global Convention Plaza, Seoul National University, Seoul, Korea.
  15. Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, and Katsuyuki Machida, "A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology,in Proc. 32nd Advanced Metallization Conference (AMC2015), Sept. 9-11, 2015, West Pickle Research Center, Austin, Texas, US.
  16. Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya,Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto, "Three-Dimensional Integrated Circuits and Stacked CMOS Image Sensors using Direct Bonding of SOI Layers," IEEE International 3D System Integration Conference (3DIC), August 31-Sepember 2, 2015, International Center in Sendai, Sendai, Japan, IX-2.
  17. Kentaro Mori, Kensuke Misawa, Satoshi Ihida, Takuya Takahashi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Electrostatic Roll-up Blind Array for House Energy Management Systems," in Proc. IEEE Int. Conf. on Optical MEMS and Nanophotonics (OMN2015), Jerusalem, Israel, Aug. 2-6, 2015, Mo.3-7-1~2 (oral presented)
  18. Sungho Jeon, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A MEMS-based Interactive Laser Scanning Display with a Built-in Laser Range Finder," in Proc. 18th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2015), June 21-25, 2015, Anchorage, AK, USA, pp. 859-862.
  19. Yong Luo, Zhengli Han, Kazutaka Kikuta, Takuya Takahashi, Akira Hirose, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "An Active Metematerials Antenna Controlled by RF-MEMS Switches," in Proc. 18th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2015), June 21-25, 2015, Anchorage, AK, USA, pp. 303-306.
  20. Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto, "A Three-Dimensional Integration Technology with Embedded Au Electrodes for stacked CMOS Image Sensors," in Proc. 2015 Int. Image Sensor Workshop (IISW), June 8-11, 2015, Vaals, The Netherlands. (oral)
  21. D. Yamane, T. Konishi, H. Toshiyoshi, K. Masu, and K. Machida, "A Sub-1G MEMS Sensor," in Proc. 227th ECS Meeting, May 24-28, 2015, Hilton Chicago, Chicago, USA. (invited)
  22. Satoshi Maruyama, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "An Interface Circuit for Time-Multiplexed Electrostatic Drive and Sample of Electrostatic MEMS Mirror," in Proc. IEEE Design, Test, Integration and Packaging of MEMS/MOEMS Symposium (DTIP 2015), Montpellier, France, April 27-30, 2015, pp. 302-307.
  23. Hiroshi Toshiyoshi, "Lateral Spreads of Optical MEMS Technology from Fiber Telecom to Biophotonics," in Proc. IEEE Design, Test, Integration and Packaging of MEMS/MOEMS Symposium (DTIP 2015), Montpellier, France, April 27-30, 2015. (invited)
  24. Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Kazuya Masu, "CMOS-MEMS -New Frontier of Multilevel Interconnect Technology-," in Proc. 2015 International Conference on Electronics Packaging & iMAPS All Asia Conference (ICEP-IAAC 2015), April 14-17, 2015, Kyoto Terrsa, Kyoto, Japan (invited).
  25. Kota Ito, Kazutaka Nishikawa, Hideo Iizuka, Hiroshi Toshiyoshi, "Experimental Observation of Radiative Thermal Rectification Using a Phase-Change Material," in Proc. 2015 MRS Spring Meeting & Exhibit, April 6-10, 2015, San Francisco, CA, USA.
  26. Keiji Isamoto, Kiyotaka Yamashita, Mohammed Saad Khan, Nicolas Lafitte, Kouki Totsuka, Changho Chong, Nobuhiko Nishiyama, and Hiroshi Toshiyoshi, "A MEMS based electrically pumped tunable VCSEL operating at 1060nm for SS-OCT," SPIE Photonics West 2015 -- MOEMS and Miniaturized Systems XIV --, Feb. 9-12, 2015, The Moscone Center, San Francisco, CA.
  27. Keiichi Ikegami, Takaaki Koyama, Takao Saito, Yoshiaki Yasuda, and Hiroshi Toshiyoshi, "A biaxial PZT optical scanner for pico-projector applications," SPIE Photonics West 2015 -- MOEMS and Miniaturized Systems XIV --, Feb. 9-12, 2015, The Moscone Center, San Francisco, CA.
  28. K. Misawa, T. Sugiyama, G. Hashiguchi, H. Fujita, and H. Toshiyoshi "A Potassium Electret Energy Harvester for 3D-Stack Assembly," in Proc. 28th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2015), Jan. 18-22, 2015, Estril Portugal, pp. 1071-1074.
  29. A. Tixier-Mita, B. D. Segard, Y. J. Kim, Y. Matsunaga, H. Fujita, and H. Toshiyoshi, "TFT Panel Technology as a Base for Biological Cells Electrical Manipulation -- Application to Dielectricphoresis," in Proc. 28th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2015), Jan. 18-22, 2015, Estril Portugal, pp.354-357.
  30. Y. F. Li, A. Goryu, K. H. Chen, H. Toshiyoshi, and H. Fujita, "Thin-film Edge Electrode Lithography Enabling Low-cost Collective Transfer of Nanopatterns," in Proc. 28th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2015), Jan. 18-22, 2015, Estril Portugal, pp. 555-558.

Year 2014 (22 papers, including 3 invited)

  1. Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto, "Three-Dimensional Integrated CMOS Image Sensors with Pixel-Parallel A/D Converters Fabricated by Direct Bonding of SOI Layers," IEEE 2014 Int. Electron Devices Meeting (IEDM 2014), Dec. 15-17, 2014, Hilton San Francisco Union Square, San Francisco, CA, USA.
  2. T. Matsushima, T. Konishi, D. Yamane, H. Toshiyoshi, K. Masu, and K. Machida, "A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology," in Proc. 27th Int. Microprocesses and Nanotechnology Conference (MNC 2014), Nov. 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan.
  3. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida, "A 1mG-to-2G Integrated MEMS Inertial Sensor," IEEE Sensors 2014, Valencia Conference Center, Valencia, Spain, Nov. 2-5, 2014
  4. Toshifumi Konishi, Takaaki Matsushima, Daisuke Yamane, Kazuya Masu, Hiroshi Toshiyoshi, and Katsuyuki Machida, "A Novel Electromechanical Model of a MEMS Energy Harvesting Device for a Multi-physics Simulation Platform on a Circuit Simulator," in Proc. Int. Conf. on Solid-State Devices and Materials (SSDM 2014), Sep. 8-11, 2014, Tsukuba International Congress Center, Tsukuba, Japan.
  5. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, and Katsuyuki Machida, "A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers," in Proc. Int. Conf. on Solid-State Devices and Materials (SSDM 2014), Sep. 8-11, 2014, Tsukuba International Congress Center, Tsukuba, Japan.
  6. Kei Hagiwara, Masahide Goto, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto, "Three-dimensional integration of fully depleted silicon-on-insulator transistor substrates for CMOS image sensors using Au/SiO2 hybrid bonding and XeF2 etching," in Proc. 226th Meeting of the Electrochemical Society, Cancun, Mexico, Oct. 5-10, 2014 (also published in ECS Trans., vol. 24, No. 5, 2014, pp. 391-396)
  7. Zhengli Han, Kenta Kohno, Tapio Makela, Tomi Haatainen, Hiroyuki Fujita, Kazuhiko Hirakawa, and Hiroshi Toshiyoshi, "A MEMS Reconfigurable Metamaterial for Terahertz Filter Applications," in Proc. 8th Int. Congress on Advanced Electromagnetic Materials in Microwaves and Optics (Metamaterials 2014), Aug. 25-30, 2014, Copenhagen, Denmark.
  8. Keiichi Ikegami, Takaaki Koyama, Takao Saito, Yoshiaki Yasuda, and Hiroshi Toshiyoshi, "A BIAXIAL PIEZOELECTRIC MEMS SCANNING MIRROR AND ITS APPLICATION TO PICO-PROJECTORS," in Proc. IEEE Int. Conf. on Optical MEMS and Nanophotonics (OMN 2014), 17-21 August 2014, Glasgow, Scotland, pp. 95-96.
  9. T. Takahashi, M. Mita, M. Konishi, K. Motohara, N. Kobayashi, N. Kashikawa, H. Fujita, and H. Toshiyoshi, "DEVELOPMENT OF VISORED MEMS SHUTTER ARRAY FOR CRYOGENIC ENVIRONMENT," in Proc. IEEE Int. Conf. on Optical MEMS and Nanophotonics (OMN 2014), 17-21 August 2014, Glasgow, Scotland, pp. 147-148.
  10. Hiroshi Toshiyoshi and Agnès Tixier-Mita, "Optical MEMS for Biomedical Applications," in Proc 6th Int. Symp. on Microchemistry and Microsystems (ISMM2014), Grand Copthorne Waterfront Hotel, Singapore, July 30 - August 1, 2014, pp. 131-132. (invited)
  11. Yong Luo, Zhengli Han, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A Novel J-Shape Active MEMS Meta-material Antenna," in Proc. IEEE Int. Symp. Antenna and Propagation (AP-S 2014) & USNC-URSI Radio Science Meeting, Memphis, Tennessee, US, July 6-11, 2014, Paper Code 227.11.
  12. Yong Luo, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Numerical Analysis on J-shape Reconfigurable Meta-material Antenna with MEMS Switches," in Proc. 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014), June 29-July 2, 2014, EXCO, Daegu, Korea.
  13. Junan Liu, Agnès Tixier-Mita, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Ionic Polymer-Metal Composites (IPMC) Miniaturization Fabrication Process," in Proc. 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014), June 29-July 2, 2014, EXCO, Daegu, Korea.
  14. D. Yamane, T. Konishi, T. Matsushima, H. Toshiyoshi, K. Machida, K. Masu, "A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers," in Proc. 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014), June 29-July 2, 2014, EXCO, Daegu, Korea.
  15. Zhengli Han, Kenta Kohno, Tapio Makela, Tomi Haatainen, Hiroyuki Fujita, Kazuhiko Hirakawa, and Hiroshi Toshiyoshi, "A Tunable THz Filter based on Electrostatic MEMS Split Ring Resonator Array," in Proc. 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014), June 29-July 2, 2014, EXCO, Daegu, Korea.
  16. Kensuke Misawa, Hiroyuki Fujita, Gen Hashiguchi, and Hiroshi Toshiyoshi, "An Equivalent Circuit Model for the Electrostatic Energy Harvester with Permanent Electret," in Proc. 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014), June 29-July 2, 2014, EXCO, Daegu, Korea.
  17. D. Yamane, T. Konishi, T. Matsushima, H. Toshiyoshi, K. Machida, and K. Masu, "A Tri-axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer," in Proc.2014 IEEE Int. Interconnect Technology Conference/Advanced Metallization Conference 2014 (IITC/AMC2014), May 20 – 23, 2014, DoubleTree Hotel, San Jose, CA.
  18. Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, and Kazuya Masu, "Integrated CMOS-MEMS Technology and Its Applications," in Proc. the 225th Meeting of the Electrochemical Society (2nd More-Than-Moore Symposium), Orlando, Florida, US, May 11-16. (invited)
  19. Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Eiji Higurashi, Hiroshi Toshiyoshi, and Toshiro Hiramoto "Development of Novel Three-Dimensional Structuring of Integrated Circuits by Using Low Temperature Direct Bonding for CMOS Image Sensors," in Proc. the 225th Meeting of the Electrochemical Society (2nd More-Than-Moore Symposium), Orlando, Florida, US, May 11-16. (invited)
  20. Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu, "A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer," in Proc. Symp. on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014), Cannes, Cote d'Azur, France, April 1-4, 2014, pp. 69-72. (oral presented)
  21. Agnès Tixier-Mita, Isao Mori, Yoshio Mita, Takuya Takahashi, Olivier Fran, Bruno Le Pioufle, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Detection of Micro-Beads by Impedance Cytometry - Towards a Wholly Integrated Electronic Device for Biological Cells Applications," in Proc. Symp. on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014), Cannes, Cote d'Azur, France, April 1-4, 2014, pp. 87-92. (oral presented)
  22. A. Tixier-Mita, E. Lebrasseur, T. Takahashi, O. Francais, B. Le Pioufle, Y. Mita, H. Fujita, H. Toshiyoshi, "Compressively-Stressed Test Structures for Opaque Micro-Structures Releasing Visualization," in Proc. 27th IEEE International Conference on Microelectronic Test Structures (ICMTS 2014), Palazzo Antonini Cernazai, Udine, Italy, March 24-27, 2014, pp. 170-173. (oral presented).

Year 2013 (15 papers presented, including 5 invited)

  1. Kei Hagiwara, Masahide Goto, Hiroshi Ohtake, Yoshinori Iguchi, Takuya Saraya, Hiroshi Toshiyoshi, Eiji Higurashi, and Toshiro Hiramoto, "Hybrid bonding characteristics of Au/SiO2 substrates for 3D integrated image sensors," in Proc. Int. Conf. on Wafer Bonding (WaferBond 13), Dec. 5-6, 2013, KTH Royal Institute of Technology, Stockholm, Sweden.
  2. Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Gou Motohashi, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu, "Sub-1G Gold MEMS Accelerometer," IEEE Sensors 2013, Nov. 3-6, 2013, Baltimore, MA, USA.
  3. M. Goto, K. Hagiwara, Y. Iguchi, H. Ohtake, T. Saraya, E. Higurashi, H. Toshiyoshi, and T. Hiramoto, "Three-Dimensional Integrated Circuits with NFET and PFET on Separate Layers Fabricated by Low Temperature Au/SiO2 Hybrid Bonding," in Proc. 2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) (Formerly known as SOI Conference), Oct. 7-10, 2013, Hyatt Regency Monterey, Monterey, CA, USA. (Late News).
  4. Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Satoshi Maruyama, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu, "Novel Sensor Circuits Design using Multi-physics Simulation for CMOS-MEMS Technology," in Proc. 2013 Int. Conf. on Solid State Devices and Materials (SSDM 2013), Sept. 24-27, 2013, Hilton Fukuoka Sea Hawk, Fukuoka, Japan.
  5. Zhengli Han, Kenta Kohno, Tomi Haatainen, Tapio Makela, Hiroyuki Fujita, Kazuhiko Hirakawa, and Hiroshi Toshiyoshi, "ELECTROSTATIC MEMS TUNABLE SPLIT-RING RESONATORS FOR THZ FILTER APPLICATIONS," in Proc. IEEE Int. Conf. on Optical MEMS and Nanophotonics (OMN 2013), Kanazawa, Japan, Aug. 18-22, 2013, pp. 165-166. (invited)
  6. Sungho Jeon, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A MEMS Interactive Laser Projection Display with a Built-in Laser Range Finder," in Proc. IEEE Int. Conf. on Optical MEMS and Nanophotonics (OMN 2013), Kanazawa, Japan, Aug. 18-22, 2013, pp. 21-22.
  7. Satoshi Maruyama, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A Time-multiplexed Electrostatic Drive and Sample Interface Circuit for MEMS Optical Scanners," in Proc. IEEE Int. Conf. on Optical MEMS and Nanophotonics (OMN 2013), Kanazawa, Japan, Aug. 18-22, 2013, pp. 15-16.
  8. Hiroshi Toshiyoshi, Toshifumi Konishi, Katsuyuki Machida, and Kazuya Masu "A Mixed-Design Technique for Integrated MEMS using a Circuit Simulator with HDL," in Proc. 20th Int. Con. Mixed Design of Integrated Circuits and Systems (MIXDES 2013), Gdynia, Poland, 20-22 June 2013. (invited plenary)
  9. D. Yamane, T. Konishi, T. Matsushima, G. Motohashi, K. Kagaya, H. Ito, N. Ishihara, H. Toshiyoshi, K. Machida, and K. Masu, "An Arrayed MEMS Accelerometer with a Wide Range of Detection," in Proc. 17th Int. Conf on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), Barcelona, Spain, June 16-20, 2013, pp. 22-25
  10. N. Lafitte, T. Takahashi, M. Tani, M. Akamatsu, Y. Yasuda, H. Fujita, and H. Toshiyoshi, "Digitally Programmable Resonator by PZT-SOI Process," in Proc. 17th Int. Conf on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), Barcelona, Spain, June 16-20, 2013, pp. 494-497
  11. Manabu Ataka, Makoto Mita, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "Electrostatic Microactuators in a Flexible Sheet - Smart MEMS Sheet #2 -" in Proc. 17th Int. Conf on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), Barcelona, Spain, June 16-20, 2013, pp. 2341-2344
  12. Hiroshi Toshiyoshi, "Turning an SOI into MEMS Devices for Optics and RF," in Proc. the 223rd Meeting of the Electrochemical Society, The Sheraton Centre Toronto Hotel, Toronto, Canada, May 12-17, 2013. (invited)
  13. Hiroshi Toshiyoshi, "Optical MEMS Scanners for Image Display Applications," Laser Display Conference (LDC2013), April 23-25, 2013, Pacifico Yokohama, Japan, LDC-LIC1-4. (invited)
  14. Kazuya Masu, Noboru Ishihara, Toshifumi Konishi, Katsuyuki Machida, and Hiroshi Toshiyoshi, “Challenges in Integration of Diverse Functionalities on CMOS,” in Proc. 18th Asia and South Pacific Design Automation Conference (ASP-DAC 2013), Jan. 22-25, 2013, Pacifico Yokohama, Yokohama City Japan, pp. 390-393. (invited)
  15. Kenichiro Urayama, Koichiro Akahori, Nobuyuki Adachi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A Low Phase-Noise VCO for Multi-Band Transceiver using Fully Packaged MEMS Electrostatic Varactors," in Proc. 26th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS2013), Jan. 20-24, 2013, Taipei, Taiwan, pp. 737-740.

Year 2012 (13 papers presented, including 4 invited)

  1. Hiroshi Toshiyoshi, Toshifumi Konishi, Katsuyuki Machida, and Kazuya Masu, "A Multi-Physics Simulation Technique for Integrated MEMS," 2012 IEEE International Electron Devices Meeting (IEDM 2012), Hilton San Francisco, Dec. 10-12, 2012. pp. 6.3.1-6.3.4. (invited).
  2. Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Gou Motohashi, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, and Kazuya Masu, "Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers," in Proc. 25th Int. Microprocesses and Nanotechnology Conference (MNC 2012), Kobe Meriken Park Oriental Hotel, Kobe, Japan, Oct. 30 - Nov. 2, 2012.
  3. Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, and Hiroshi Toshiyoshi, "Multi-physics Equivalent Circuit Models for MEMS Sensors and Actuators," The 1st Int. Symp. on More-than-Moore, the 222nd Meeting of the Electrochemical Society / The 2012 Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME), Hawaii Convention Center, Hawaii, US, Oct. 7-12, 2012. (invited)
  4. M. Goto, K. Hagiwara, Y. Iguchi, H. Ohtake, T. Saraya, H. Toshiyoshi, and T. Hiramoto, "Development of Novel MOSFET with Front and Back Side Electrodes for 3D-Structured Image Sensors," The 1st Int. Symp. on More-than-Moore, the 222nd Meeting of the Electrochemical Society / The 2012 Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME), Hawaii Convention Center, Hawaii, US, Oct. 7-12, 2012.
  5. Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Gou Motohashi, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu, "A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer," in Proc. 2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012), Kyoto Int. Conf. Center, Kyoto, Japan, Sept. 25-27, 2012.
  6. T. Konishi, S. Maruyama, M. Mita, D. Yamane, H. Ito, K. Machida, N. Ishihara, K. Masu, H. Fujita, and H. Toshiyoshi, "A CMOS-MEMS Design Technique based on an Electrical Circuit Simulator with Hardware Description Language," in Proc. 2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012), Kyoto Int. Conf. Center, Kyoto, Japan, Sept. 25-27, 2012.
  7. Kei Hagiwara, Masahide Goto, Yoshiyori Iguchi, Hiroshi Ohtake, Takuya Saraya, Hiroshi Toshiyoshi, Toshiro Hiramoto, "Fabrication of vertically signal transferable MOSFET for pixel-parallel readout CMOS image sensor," in Proc. 38th Int. Conf on Micro and Nano Engineering (MNE 2012), Sept 16 - 20, 2012, Toulouse, France.
  8. S. Choi, A. Higo, K. Kikuta, H. Toshiyoshi, and Y. Nakano, "A Slanted InP Waveguide for Fiber Coupler using Skewed Dry Etching Process," in Proc. IEEE International Optical MEMS & Nanophotonics Conference, Banff, Alberta, Canada, August 6-9, 2012, pp. 202-203. (poster)
  9. Daisuke Yamane, Yi-Chien Wu, Ting-Hsiang Wu, Hiroshi Toshiyoshi, Michael A. Teitell, and Pei-Yu Chiou, "Real-Time Monitoring of Photothermal Porated Mammalian Cells by Electric Impedance Sensors," in Proc. IEEE International Optical MEMS & Nanophotonics Conference, Banff, Alberta, Canada, August 6-9, 2012, pp. 220-221. (oral)
  10. Zhengli Han, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Electrostatically Tunable MEMS THz Metamaterials based on DC/RF Decoupled Split-Ring Resonator Arrays," in Proc. IEEE International Optical MEMS & Nanophotonics Conference, Banff, Alberta, Canada, August 6-9, 2012, pp. 27-28. (oral)
  11. H. Fujita and H. Toshiyoshi, and T. Ishida, "From MEMS-CMOS towards Heterogeneous Integration over Scale," in Proc. 221st ECS Meeting, Seattle, Washington, US, May 6-10, 2012. (invited)
  12. H. Fujita and H. Toshiyoshi, "Heterogeneous Integration over Scale, Material and Process," 2012 Material Research Society (MRS) Spring Meeting & Exhibit, April 11-13, 2012, Moscone West, San Francisco, CA, US, B6.1. (invited)
  13. Koichi Ishida, Tsung-Ching Huang, Kentaro Honda, Yasuhiro Shinozuka, Hiroshi Fuketa, Tomoyuki Yokota, Ute Zschieschang, Hagen Klauk, Gregory Tortissier, Tsuyoshi Sekitani, Makoto Takamiya, Hiroshi Toshiyoshi, Takao Someya, Takayasu Sakurai, "Insole Pedometer with Piezoelectric Energy Harvester and 2V Organic Digital and Analog Circuits," in Proc. 2012 IEEE International Solid-State Circuits Conference (ISSCC), 19-23 Feb. 2012, San Francisco, CA, USA, pp. 308-310.

Year 2011 (13 papers presented, including 4 invited)

  1. A. Tixier-Mita, T. Takahashi, and H. Toshiyoshi, "Integration of Chemical Sensors with LSI Technology - History and Applications -," Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD'2011), June 29th – July 1st 2011, Deajeon, Korea, pp. 150-155, 2011. (invited)
  2. S. Maruyama, M. Mita, K. Isamoto, C. Chong, H. Fujita, and H. Toshiyoshi, "An Equivalent SPICE Circuit Model for Semi-parallel Plate Electrostatic Torsion Mirror," Int. Workshop on Micro/Nano-Engineering, Dec. 17-18, 2011, Rohm Plaza, Katsura Campus, Kyoto University, MS-06.
  3. H. Yasuda, H. Fujita, and H. Toshiyoshi, "An Integrated MEMS Switch for Low Power Electronics," Int. Workshop on Micro/Nano-Engineering, Dec. 17-18, 2011, Rohm Plaza, Katsura Campus, Kyoto University, FB-16.
  4. H. Toshiyoshi, "A Spice-based multi-physics simulation technique for integrated MEMS," 2011 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2011), September 8-10, 2011, Hotel Hankyu Expo Park, Osaka, Japan. (invited)
  5. Keiji Isamoto, Kohki Totsuka, Tooru Sakai, Takuya Suzuki, Atsushi Morosawa, Changho Chong, Hiroyuki Fujita, Hiroshi Toshiyoshi, "A High Speed MEMS Scanner for 140-kHz SS-OCT," IEEE Int. Conf. on Optical MEMS and Nanophotonics, Istanbul, Turkey, Aug. 8-11, 2011.
  6. Akio Higo, Taelim Lee, Satoshi Maruyama, Hiroyuki Fujita, Yoshiaki Nakano, and Hiroshi Toshiyoshi, "Transmission Color Control by Stacked Wire-Grid Polarizers with In-plane Rotation," IEEE Int. Conf. on Optical MEMS and Nanophotonics, Istanbul, Turkey, Aug. 8-11, 2011.
  7. T. Takahashi, M. Mita, K. Motohara, N. Kobayashi, N. Kashikawa, H. Fujita, and H. Toshiyoshi, "Electrostatically Addressable Visored Shutter Array by Electroplating for Astronomical Spectrography," IEEE Int. Conf. on Optical MEMS and Nanophotonics, Istanbul, Turkey, Aug. 8-11, 2011.
  8. G. Tortissier, P. Ginet, B. Kim, H. Fujita, H. Toshiyoshi, "Enhanced CF4 plasma treated polymer film for flexible display application," IEEE Int. Conf. on Optical MEMS and Nanophotonics, Istanbul, Turkey, Aug. 8-11, 2011.
  9. G. Tortissier, H. Fujita, and H. Toshiyoshi, "FLEXIBLE COLOR FILTER MEMS DISPLAY," Int. Conf. on Materials for Advanced Tech. (ICMAT 2011), Suntec, Singapore, 26 June - 1 July, 2011.
  10. Taelim Lee, Akio Higo, Hiroyuki Fujita, Yoshiaki Nakano, and Hiroshi Toshiyoshi, "Transmissive Color Shift through Layered Sub-wavelength Gratings based on Plasmon Enhanced Coupling," in Proc. 16th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2011), Beijing, China, June 5-9, 2011.
  11. Y.-C. Chen, T. Ishida, H. Toshiyoshi, R. Chen, and H. Fujita, "SPONTANEOUS OSCILLATION DUE TO CHARGING EFFECT IN MEMS RF SWITCHES," in Proc. 16th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2011), Beijing, China, June 5-9, 2011.
  12. Daisuke Yamane and Hiroshi Toshiyoshi, "Monolithic integration of passive RF components by MEMS," IEEE 2011 International Symposium on VLSI Design, Automation and Test (VLSI-DAT), Hsinchu, Taiwan, Apr. 25-28, 2011. (invited)
  13. Hiroshi Toshiyoshi, "Lateral Spread of MEMS WDM Technologies," in Proc. SPIE vol. 7930 "MOEMS and Miniaturized Systems X" (Eds., H. Schenk, W. Piyawattanametha), SPIE Photonic West (MOEMS-MEMS), Jan. 24, 2011, Moscone Center, San Francisco, CA, USA, Program p. 22 (SPIE#7930). (invited plenary)

Year 2010 (14 papers presented, including 2 invited)

  1. Katia Grenier, David Dubuc, Paul-Emile Poleni, Momoko Kumemura, Hiroshi Toshiyoshi, Teruo Fujii, Hiroyuki Fujita, "Resonant based microwave biosensor for biological cells discrimination," Paper Digest 2010 IEEE Radio and Wireless Symposium (RWW 2010), pp. 523-526.
  2. T. Konishi, S. Maruyama, T. Matsushima, M. Mita, K. Machida, N. Ishihara, K. Masu, H. Fujita, H. Toshiyoshi, "A SPICE-based Multi-physics Seamless Simulation Platform for CMOS-MEMS," in Proc. 2010 Int. Conf. on Solid State Devices and Materials (SSDM2010), The Univ. of Tokyo, Tokyo, Japan, Sept. 22-24, 2010, G-6-5 (Late News Paper, oral presentation).
  3. H. Yamada, Y. Onozuka, A. Iida, K. Itaya, H. Funaki, K. Takahashi, and H. Toshiyoshi, "A wafer-level system integration technology for flexible pseudo-SOC incorporates MEMS-CMOS heterogeneous devices," IEEE Components, Packaging and Manufacturing Technology (CPMT) Symposium, Aug. 24-26, 2010, Univ. of Tokyo, Tokyo, Japan. (Best Paper Award)
  4. G. Tortissier, C.-Y. Lo, H. Fujita, and H. Toshiyoshi, "Flexible display system based on MEMS Fabry-Perot interferometer," in Proc. IEEE Int. Conf. on Optical MEMS and Nanophotonics, Sapporo Convention Center, Sapporo, Japan, Aug. 9-12, 2010, pp. 75-76.
  5. Taelim Lee, Akio Higo, Hiroyuki Fujita, Yoshiaki Nakano, and Hiroshi Toshiyoshi, "A study on color-tunable MEMS device based on plasmon photonics," in Proc. IEEE Int. Conf. on Optical MEMS and Nanophotonics, Sapporo Convention Center, Sapporo, Japan, Aug. 9-12, 2010, pp.107-108.
  6. S. Maruyama, A. Higo, M. Nakada, K. Takahashi, T. Takahashi, M. Mita, H. Fujita, Y. Nakano, and H. Toshiyoshi, "A mixed-signal analysis for tilted MEMS torsion mirror devices," IEEE Int. Conf. on Optical MEMS and Nanophotonics, Sapporo Convention Center, Sapporo, Japan, Aug. 9-12, 2010, pp. 109-110.
  7. M. Mita, T. Mizuno, M. Ataka, H. Toshiyoshi, "A 2-axis MEMS Scanner for the Landing Laser Radar of the Space Explorer," in Proc. IEEE Int. Conf. on Optical MEMS and Nanophotonics, Sapporo Convention Center, Sapporo, Japan, Aug. 9-12, 2010, pp. 111-112.
  8. D. Yamane, W. Sun, S. Kawasaki, H. Fujita, and H. Toshiyoshi, "A Ku-Band RF-Mems Phase Shifter With SOI Double-Side Bulk-Micromachining Design," in Proc. 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, July 6-9, 2010, Perth, Australia, pp. 68-69.
  9. C. Lo and H. Toshiyoshi, "Low-Cost Visual Curvature Sensor by Interferometer," in Proc. 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, July 6-9, 2010, Perth, Australia, p. 233.
  10. A. Higo, K. Takahashi, M. Nakada, H. Fujita, H. Toshiyoshi, and Y. Nakano, "Parylene Covered Selective Area HF Vapor Release For Silicon Photonic Wire Waveguides," in Proc. 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, July 6-9, 2010, Perth, Australia, p. 168.
  11. Yuheon Yi, Satoshi Maruyama, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "An All-Digital CMOS-MEMS Resonator with PLL Based On Digital Displacement Detection," in Proc. 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, July 6-9, 2010, Perth, Australia, p. 282.
  12. H. Toshiyoshi, "Multi-User-Multi-Chip Integrated MEMS for Micro Optics," in Proc. 15th OptoElectronics and Communications Conference (OECC2010), July 5-9 2010, Sapporo Convention Center, Japan. (invited)
  13. H. Toshiyoshi, "MEMS Actuators for Optical and RF Communication Devices," in Proc. IMAPS/ACerS 6th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2010), OVTA, Chiba, Japan, April 18-21, 2010, p. 22. (invited)
  14. D. Yamane, W. Sun, H. Fujita, H. Toshiyoshi, S. Kawasaki, "Development of a Dual-SPDT RF-MEMS Switch for Ku-band" in Proc. IEEE 2010 Radio and Wireless Symposium (RWS2010), New Orleans, LA, USA, Jan. 10-14, 2010, paper ID WE1A-5.

Year 2009 (19 papers presented including 2 invited)

  1. A. Higo, H. Toshiyoshi, H. Fujita, and Y. Nakano, "MEMS Integrated with Silicon Photonic Wire Waveguides," in Proc. 16th Int. Display Workshop (IDW'09), Dec. 9-11, 2009, World Convention Center Summit, Phoenix Seagaia Resort, Miyazaki, Japan, session MEMS3-3. (invited)
  2. S. Maruyama, M. Mita, K. Takahashi, T. Takahashi, H. Fujita, and H. Toshiyoshi, "A Mixed-Signal Equivalent Circuit Model for MEMS Digital Mirror," in Proc. 16th Int. Display Workshop (IDW'09), Dec. 9-11, 2009, World Convention Center Summit, Phoenix Seagaia Resort, Miyazaki, Japan, session MEMS5-4.
  3. B. Charlot, K. Yamashita, W. Sun, H. Fujita, and H. Toshiyoshi, "Field emission displacement gauge for microelectromechanical resonators," in Proc. 2009 Symp. on Design, Test Integration & Packaging of MEMS/MOEMS, April 1-3, 2009, Rome, Italy, p.7.
  4. K. Grenier, D. Dubuc, P.-E. Poleni, M. Kumemura, H. Toshiyoshi, H. Fujii, and H. Toshiyoshi, "New broadband and contact-less RF/microfluidic sensor dedicated to bioengineering," in Proc. IEEE MTT-S Int. Microwave Symp. (MTT), June 7-12, 2009, Boston, USA, pp. 1329-1332.
  5. K. Grenier, D. Dubuc, M. Kumemura, H. Toshiyoshi, and H. Fujita, "Contact-less radio-frequencies biosensor for biological parameters analysis," in Proc. 2nd Int. Conf. on Biomedical Electronics and Devices (BIODEVICES 2009), Porto, Portugal, Jan. 14-17, 2009, pp. 398-401.
  6. D. Dubuc, K. Grenier, H. Fujita, and H. Toshiyoshi, "Micro-fabricated tunable artificial dielectric for reconfigurable microwave circuits," in Proc. 39th European Microwave Conference (EuMC), Rome, Italy, Sept. 20 - Oct. 1, 2009, pp. 520-523.
  7. D. Yamane, K. Yamashita, H. Seita, H. Fujita, H. Toshiyoshi, S. Kawasaki, "A Dual-SPDT RF-MEMS Switch on a Small-Sized LTCC Phase Shifter for Ku-band operation," in Proc. 2009 Asia-Pacific Microwave Conference (APMC 2009), Suntec Singapore International Convention & Exhibition Centre, Singapore, Dec. 7-10, 2009, TU3P-29 (#1719).
  8. Daisuke Yamane, Kiyotaka Yamashita, Harunobu Seita, Hiroshi Toshiyoshi, and Shigeo Kawasaki, "A Prototype of Ku-Band Small-Sized LTCC Phase Shifter with RF-MEMS Switches," in Proc. 2009 Thailand-Japan MicroWave (TJMW2009), King Mongkut’s University of Technology North Bangkok Bangkok, Thailand, August 20-21, 2009, FR7-5.
  9. B. Charlot, K. Yamashita, W. Sun, H. Fujita and H. Toshiyoshi, "Si:H Bistable nanowire For Memory applications," in Proc. 20th Workshop on Micromachining, Micromechanics and Microsystems (MME09), Toulouse, France, September 20-22, 2009, session D04 (ID 175).
  10. K. Takahashi, I. W. Jung, A. Higo, Y. Mita, H. Fujita, H. Toshiyoshi, and O. Solgaard, "A CMOS Compatible Low Temperature Process for Photonic Crystal MEMS Scanner," in Proc. IEEE Optical MEMS and Nanophotonics 2009, Clearwater Beach, Florida, USA, 17-20 August 2009, WB4.
  11. T. Takahashi, S. Maruyama, M. Mita, H. Fujita, and H. Toshiyoshi, "A Mixed-signal Analysis Tool for MOEMS based on Circuit Simulator," in Proc. IEEE Optical MEMS and Nanophotonics 2009, Clearwater Beach, Florida, USA, 17-20 August 2009, ThB1.
  12. A. Higo, K. Takahashi, H. Fujita, Y. Nakano, and H. Toshiyoshi, "A Novel Parylene/Al/Parylene Sandwitch Procetion Mask for HF Vapor Release for Micro Electro Mechanical Systems," in Proc. 15th Int. Conf. on Solid-State Sensors, Actuators & Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25, 2009, pp. 196-199.
  13. S. Maruyama, K. Takahashi, H. Fujita and H. Toshiyoshi, "A MEMS Digital Mirror Array Integrated with High-Voltage Level-Shifter," in Proc. 15th Int. Conf. on Solid-State Sensors, Actuators & Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25, 2009, pp. 2314-2317.
  14. H. Toshiyoshi, "Optical MEMS for Information Technology," in Proc. 15th Int. Conf. on Solid-State Sensors, Actuators & Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25, 2009, pp. 2198-2201. (invited)
  15. Yuheon Yi, Hiroyuki Fujita and Hiroshi Toshiyoshi, "The dynamic model of electrostatic torsion mirror with pullin consideration for multiphysics behavior anticipation," in Proc. EuroSimE, Delft, The Netherlands, April 27-29, 2009.
  16. Yuheon Yi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Dynamic Model of a Parallel Plate Actuator with Pull-in Consideration for CMOS-MEMS Simultaneous Behavior Anticipation," in Proc. The 15th Workshop on Synthesis And System Integration of Mixed Information Technologies (SASIMI 2009), Pacific Hotel Okinawa, Okinawa, Japan, March 9-10, 2009, pp. 370 - 373
  17. K. Takahashi, M. Mita, M. Nakada, D. Yamane, A. Higo, H. Fujita, and H. Toshiyoshi, “Development of Multi-user Multi-chip SOI CMOS-MEMS processes,” in Proc. 22nd IEEE Int. Conf. on Micro Electro Mechanical Systems, Jan. 25-29, 2009, Sorrento, Italy.
  18. M. Nakada, K. Takahashi, T. Takahashi, A. Higo, H. Fujita and H. Toshiyoshi, “Development of Skewed DRIE Process and its Application to Electrostatic Tilt Mirror,” in Proc. 22nd IEEE Int. Conf. on Micro Electro Mechanical Systems, Jan. 25-29, 2009, Sorrento, Italy.
  19. D. Yamane, H. Seita, W. Sun, S. Kawasaki, H. Fujita and H. Toshiyoshi, “A 12-GHz DPDT RF-MEMS Switch with Layer-wise Waveguide/Actuator Design Technique,” in Proc. 22nd IEEE Int. Conf. on Micro Electro Mechanical Systems, Jan. 25-29, 2009, Sorrento, Italy.

Year 2008 (19 papers including 1 invited)

  1. J. S. Park, T. Saraya, K. Miyaji, K. Shimizu, A. Higo, K. Takahashi, Y. H. Yi, H. Toshiyoshi, and T. Hiramoto, "Characteristic modulation of silicon MOSFETs and single electron transistors with a movable gate electrode," in Proc. IEEE 2008 Silicon Nanoelectronics Workshop (SNW 2008).
  2. C.-Y. Lo, O.-H. Huttunen, J. Hiitola-Keinanen, J. Petaja, J. Hast, A. Maaninen, H. Kopola, H. Fujita, and H. Toshiyoshi, "Active Matrix Flexible Display Array Fabricated by MEMS Printing Techniques," in Proc. 15th Int. Display Workshops (IDW '08), Toki Messe Niigata Convention Center, Niigata, Japan, Dec.3-5, 2008, pp. 1353-1356.
  3. Jukka Hast, Olli-Heikki Huttunen, Johanna Hiitola-Keinänen, Jarno Petäjä, Arto Maaninen, Harri Kopola, Chengyao Lo, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Towards large area roll-to-roll manufactured MEMS display," Organic Semiconductor Conference (OSC 08 Europe), Sept. 29 - Oct. 1, 2008, Frankfurt Messe, Fankfurt, Germany.
  4. D. Yamane, T. Yamamoto, K. Urayama, K. Yamashita, H. Toshiyoshi, and S. Kawasaki, "A Phase Shifter by LTCC Substrate with an RF-MEMS Switch," in Proc. 38th European Microwave Conference (EuMC 2008), Amsterdam, Netherlands, Oct. 27-31, 2008.
  5. Kazuhiro Takahashi, Makoto Mita, Hiroyuki Fujita, Kazuhiro Suzuki, Hideyuki Funaki, Kazuhiko Itaya and Hiroshi Toshiyoshi, "A Study on Process-compatibility in CMOS-first MEMS-last Integration," IEEE Custom Integrated Circuits Conference (CICC 2008), Sept. 21-24, 2008, DoubleTree Hotel, San Jose, CA, USA, paper# 6-3.
  6. David Dubuc, Daisuke Yamane, Zhang Rui, Yuheon Yi, Katia Grenier, Hiroyuki Fujita, Hiroshi Toshiyoshi, "Modelling and design guidelines of metamaterial-based artificial dielectric for the miniaturization of microwave passive circuits," Technical session 12, Poster session, Metamaterial2008, Pamplona, Spain, 21-26 September 2008.
  7. C.-Y. Lo, J. Kiitola-Keinanen, O.-H. Huttunen, J. Petaja, J. Hast, A. Maaninen, H. Kopola, H. Fujita, and H. Toshiyoshi, "Novel roll-to-roll lift-off patterned active-matrix display on flexible polymer substrate," 34th Int. Conf. on Micro and Nano Engineering (MNE 2008), Sept. 15-18, 2008, Athens, Greece (PTE - P 11).
  8. Ch.-Y. Lo, H. Fujita, H. Toshiyoshi, "Hydrophilicity control for micro droplet positioning on SiO2 by photolithography process and post chemical treatment," 34th Int. Conf. on Micro and Nano Engineering (MNE 2008), Sept. 15-18, 2008, Athens, Greece (MAN-P05).
  9. Yasutaka Ohira, Aleksandr Checkovskiy, Toshio Yamanoi, Takashi Endo, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A High-Power Handling MEMS Optical Scanner for Display Applications," IEEE/LEOS Int. Conf. on Optical MEMS & Nanophotonics, Freiburg, Germany, Aug. 11-14, 2008 (Tu4.2). *1
  10. C.-Y. Lo, J. Hast, O.-H. Huttunen, J. Petäjä, J. Hiitola-Keinänen, A. Maaninen, H. K. Kopola, VTT, H. Fujita and H. Toshiyoshi, "Low Operation Voltage Non Self-Emissive MEMS Color Filter Pixels," IEEE/LEOS Int. Conf. on Optical MEMS & Nanophotonics, Freiburg, Germany, Aug. 11-14, 2008, (P10).*2
  11. M. Nakada, K. Takahashi, A. Higo, H. Fujita and H. Toshiyoshi, "Design and Fabrication of Parylene-Hinged Slow-Scan Optical Scanner for OCT Endoscope Application," IEEE/LEOS Int. Conf. on Optical MEMS & Nanophotonics, Freiburg, Germany, Aug. 11-14, 2008, (Tu1.5). *3
  12. K. Yamashita, B. Charlot, W. Sun, K. Kakushima, H. Fujita, and H. Toshiyoshi, "Modulation and detection of field-emission current by using MEMS resonator for application to RF-MEMS band-pass filters," in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2008), June 22-25, 2008, TAYIH Landis Hotel, Tainan, Taiwan R.O.C., p. 1D1-2.
  13. Y. Yi, H. Fujita, and H. Toshiyoshi, "Low voltage actuated MEMS switch/relay for power gating application," in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2008), June 22-25, 2008, TAYIH Landis Hotel, Tainan, Taiwan R.O.C., p. 1A1-5.
  14. M. Nakada, H. N. Kwon, C. Chong, A. Morosawa, K. Isamoto, H. Fujita, and H. Toshiyoshi, "Optical coherence tomography based on power-over-fiber MEMS scanner," in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2008), June 22-25, 2008, TAYIH Landis Hotel, Tainan, Taiwan R.O.C., p. 2A2-3.
  15. A. Higo, H. Fujita, H. Toshiyoshi, and Y. Nakano, "Design and fabrication of optical waveguide modulator integrated with silicon wire waveguide," in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2008), June 22-25, 2008, TAYIH Landis Hotel, Tainan, Taiwan R.O.C., p. 2A2-4.
  16. K. Takahashi, M. Mita, H. Fujita, and H. Toshiyoshi, "An SOI-MEMS compatible designing technique of reversed double-deck actuators with interlayer electrical connection," in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2008), June 22-25, 2008, TAYIH Landis Hotel, Tainan, Taiwan R.O.C., p. 1A2-6.
  17. Hiroshi Toshiyoshi, "MEMS for Optical Information Technology," in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2008), June 22-25, 2008, TAYIH Landis Hotel, Tainan, Taiwan R.O.C. (invited)
  18. Jukka Hast, Cheng-Yao Lo, Olli-Heikki Huttunen, Johanna Hiitola-Keinanen, Jarno Petaja, Hiroshi Toshiyoshi, Arto Maaninen, Harri Kopola, and Hiroyuki Fujita, "Towards roll-to-roll manufactured flexible, large scale, and low cost MEMS display," in Proc. the 9th Optics Days 2008, May 8-9, 2008, Technopolis, Kuopio, Finland.
  19. Cheng-Yao Lo, Olli-Heikki Huttunen, Jarno Petaja, Johanna Hiitola-Keinanen, Jukka Hast, Arto Maaninen, Harri Kopola, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Substrate Design Concerns for Printed Flexible Displays," in Proc. the 1st Int. Conf. on R2R Printed Electronics 2008, April 30 - May 2, 2008, Konkuk University, Seoul, Korea.

Year 2007 (24 papers including 2 invited)

  1. K. Takahashi, M. Mita, H. Fujita and H. Toshiyoshi, "Topological layer switch technique for monolithically integrated electrostatic XYZ-stage," in Proc. Future Generation Communication and Networking (FGCN 2007), vol. 2, 2007, pp. 651-654.
  2. M. Nakada, C. Chong, K. Isamoto, A. Morosawa, H. Fujita and H. Toshiyoshi, "Design and Fabrication of Silicon Bulk Micromachined Optical Scanner for Medical Endoscope," in Proc. 14th Int. Display Workshop, Sapporo Convention Center, Sapporo, Japan, Dec. 5-7, 2007.
  3. C. Lo, O.-H. Huttunen, J. Petaja, J. Hast, A. Maaninen, H. Kopola, H. Fujita, H. Toshiyoshi, "Novel Printing Processes for MEMS Fabry-Perot Display Pixel," in Proc. 14th Int. Display Workshop, Sapporo Convention Center, Sapporo, Japan, Dec. 5-7, 2007.
  4. A. Chekhovskiy and H. Toshiyoshi, "3-Dimensional Displaying in Liquid," in Proc. 14th Int. Display Workshop, Sapporo Convention Center, Sapporo, Japan, Dec. 5-7, 2007.
  5. C. Lo, O.-H. Huttunen, J. Petaja, J. Hast, A. Maaninen, H. Kopola, H. Fujita, H. Toshiyoshi, "Capability of Realization of Roll-to-Roll Printed MEMS Fabry-Perot Display Pixels," Proc. 2nd Student Conference of Printing Future Days, Technical University of Chemnitz, Germany, Nov. 5-8, 2007, pp. 19-24.
  6. A. Chekhovskiy and H. Toshiyoshi, "3-Dimentional Liquid Display," in Proc. SPIE 6783 (Asia-Pacific Optical Communications, November 1-5, 2007, Wuhan, China, poster 6783-120).
  7. A. Chekhovskiy and H. Toshiyoshi, "3-dimensional displaying in liquid," in Proc. 12th Microoptics Conference (MOC '07), Sunport Takamatsu, Takamatsu, Kagawa, Japan, Oct. 28-31, 2007.
  8. C. Lo, H. Fujita, and H. Toshiyoshi, "MEMS Fabry-Perot Pixels," in Proc. 20th Annnual Meeting of the IEEE/LEOS, Buena Vista Resort & Spa, Lake Buena Vista, Florida, US, Oct. 21-25, 2007. (invited)
  9. H. Toshiyoshi, "MEMS Devices and Technologies for Photonic Network," in Proc. 12th Optoelectronics and Communication Conf. / 16th Int. Conf. on Integrated Optics and Optical Fiber Communication (OECC/IOOC 2007), July 9-13, 2007, Yokohama, Kanagawa, Japan, 13E2-1. (invited)
  10. K. Takahashi, K. Suzuki, H. Funaki, K. Itaya, H. Fujita, and H. Toshiyoshi, “A study on optical diffraction characteristics of skewed MEMS pitch tunable gratings,” in Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Nanophotonics, Aug. 12-16, 2007, Hualien, Taiwan, pp. 175-176.
  11. A. Higo, H. Fujita, Y. Nakano, and H. Toshiyoshi, “Design and fabrication of photonic MEMS waveguide modulators,” in Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Nanophotonics, Aug. 12-16, 2007, Hualien, Taiwan, pp. 173-174.
  12. H. N. Kwon, M. Nakada, Y. Hirabayashi, A. Higo, M. Ataka, H. Fujita, and H. Toshiyoshi, “Bi-directionally driven metal cantilevers developed for optical actuation,” in Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Nanophotonics, Aug. 12-16, 2007, Hualien, Taiwan, pp. 49-50.
  13. Hiroshi Toshiyoshi, Keiji Isamoto, Atsushi Morosawa, Changho Chong, and Hiroyuki Fujita, “Reliability issues of optical MEMS related to device packaging,” European Microelectronics and Packaging Conf. & Exhibition (EMPC 2007), Oulu, Finland, June 17-20, 2007.
  14. Makoto Mita, Kazuhiro Takahashi, Manabu Ataka, Hiroyuki Fujita and Hiroshi Toshiyoshi, “Highly mobile 2D micro impact actuator for space applications,” The 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10 - 14, 2007 (2EC13.P).
  15. Makoto Mita, Manabu Ataka, Tadashi Ishida, Hiroyuki Fujita, and Hiroshi Toshiyoshi, “Frequency transition phenomenon of self-oscillated micro cantilever by changing driving voltage,” The 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10 - 14, 2007 (2EL9.P).
  16. Kazuhiro Takahashi, Makoto Mita, Hiroyuki Fujita, Hiroshi Toshiyoshi, Kazuhiro Suzuki, Hideyuki Funaki, and Kazuhiko Itaya, “Integrating high voltage driver circuits with bulk micromachined actuators,” in Proc. 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10 - 14, 2007, pp. 1329-1332 (2EP9.P).
  17. Toshio Yamanoi, Takashi Endo, and Hiroshi Toshiyoshi, “A hybrid-assembled MEMS Fabry-Perot wavelength tunable filter,” The 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10 - 14, 2007 (3EK10.P).
  18. Tadashi Ishida, Kuniyuki Kakushima, Makoto Mita, Hiroshi Toshiyoshi, and Hiroyuki Fujita, “In-situ TEM observation of crystal facet dependent self-rearranging gold atoms under tensile stress controlled by MEMS nanoprobe positionner,” The 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10 - 14, 2007 (4C2.2).
  19. H. Kwon, A. Higo, and H. Toshiyoshi, "Chromium-Gold-Chromium Layered Bidirectional Cantilevers by Electro-static and Electro-thermal Actuation," in Proc. 6th Korean MEMS Conf., Jeju, April 6-8, 2007.
  20. Kazuhiro Takahashi, Makoto Mita, Hiroyuki Fujita, Hiroshi Toshiyoshi, "Topological Layer Switch Technique for Monolithically Integrated Electrostatic XYZ-stage," in Proc. 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2007), Jan. 21-25, 2007, Kobe Portopia Hall and Kobe Portopia Hotel, Japan, pp. 651-654 (Poster M33).
  21. Kazuhiro Takahashi, Hiroyuki Fujita, Hiroshi Toshiyoshi, Kazuhiro Suzuki, Hideyuki Funaki, and Kazuhiko Itaya, "Tunable Light Grating integrated with High-voltage Driver IC for Image Projection Display," in Proc. 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2007), Jan. 21-25, 2007, Kobe Portopia Hall and Kobe Portopia Hotel, Japan, pp. 147-150 (TP28).
  22. Edin Sarajlic, Dominique Collard, Hiroshi Toshiyoshi, Hiroyuki Fujita, "12-Bit Microelectromechanical Digital-to-Analog Converter of Displacement: Design, Fabrication and Characterization," in Proc. 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2007), Jan. 21-25, 2007, Kobe Portopia Hall and Kobe Portopia Hotel, Japan (oral).
  23. Masanao Tani, Masahiro Akamatsu, Yoshiaki Yasuda, and Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Two-Axis Piezoelectric Tilting Micromirror with a Newly Developed PZT-meandering Actuator," in Proc. 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2007), Jan. 21-25, 2007, Kobe Portopia Hall and Kobe Portopia Hotel, Japan (Poster M35).
  24. Honam Kwon, Akio Higo, and Hiroshi Toshiyoshi, "Fabrication of Micro-tips by Lift Off Process with Contact Shadow Masking," in Proc. 2nd IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (NEMS 2007), Jan .16-19, 2007, Bangkok, Thailand (Poster 149).

Year 2006 (18 papers including 2 invited)

  1. Takahide Mizuno, Makoto Mita, Takuya Takahara, Yusuke Mamada, Norihide Takeyama, Takuya Takahashi, and Hiroshi Toshiyoshi, "Two dimensional scanning LIDAR for planetary explorer," in Proc. MNT for Aerospace Applications, CANEUS 2006.
  2. M. Nakada, H. Fujita, H. Toshiyoshi, C. Chong, K. Isamoto, "Wavelength Division Multiplexing for MEMS-based Fiber Optic Endoscope," Proc. 5th Int. Conf. on Optics-Photonics Design & Fabrication (ODF '06), Dec. 6-8, 2006, Nara-Ken New Public Hall, Nara, Japan. (invited)
  3. Y. Yasuda, M. Tani, M. Akamatsu, and H. Toshiyoshi, "A PZT-actuated 2D optical scanner for MEMS image projection display," Proc. 13th Int. Display Workshop (IDW '06), Otsu, Japan, Dec. 6 - 8, 2006 (MEMS4-3).
  4. R. Shigematsu, D. Tosu, A. Higo, H. Toshiyoshi, and H. Fujita, "Black board type MEMS interactive display," Proc. 13th Int. Display Workshop (IDW '06), Otsu, Japan, Dec. 6 - 8, 2006 (MEMS5-2).
  5. Muneki Nakada, Changho Chong, Keiji Isamoto, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Micro Optomechanical Devices for Medical Endoscope Applications," SPIE Optics East ---Photonics for Applications in Industry, Life Sciences, and Communication---, Oct. 1-4, 2006, Hynes Convention Center, Boston, MA, USA, Optomechatronics Technologies Conference Proc. SPIE Vol. 6376. (invited)
  6. K. Yamashita, W. Sun, B. Charlot, K. Kakushima, H. Fujita, and H. Toshiyoshi, "Time dependence of field-emission current for silicon RF-MEMS applications," Proc. 32nd Int. Conf. on Micro- and Nano-Engieering 2006 (MNE 2006), Barcelona, Spain, Sept. 17-20, 2006 (oral 3A-3).
  7. A. Higo, H. Fujita, and H. Toshiyoshi, "Design and fabrication of optical MEMS modulator with silicon wire waveguide," Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2006), Big Sky Resort, Big Sky, Montana, Aug. 21-24, 2006, poster presentation.
  8. K. Takahashi, H. N. Kwon, M. Mita, K. Saruta, J. H. Lee, H. Fujita, and H. Toshiyoshi, "A 3D optical crossconnect using microlens scanner with topologically layer switch architecture," Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2006), Big Sky Resort, Big Sky, Montana, Aug. 21-24, 2006.
  9. M. Nakada, C. Chong, K. Isamoto, H. Fujita, and H. Toshiyoshi, "Design and fabrication of optical MEMS scanners for optically modulated fiber endoscopes," Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2006), Big Sky Resort, Big Sky, Montana, Aug. 21-24, 2006.
  10. M. Tani, M. Akamatsu, Y. Yasuda, H. Fujita, and H. Toshiyoshi, "A combination of fast resonant mode and slow static deflection of SOI-PZT actuators for MEMS image projection display," Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2006), Big Sky Resort, Big Sky, Montana, Aug. 21-24, 2006.
  11. Y. Taii, A. Higo, H. Fujita, and H. Toshiyoshi, "Color Pixels by Plastic MEMS Technology for Flexible Electronic Display," Proc. Asia Pacific Conference on Transducers and Micro-Nano Technology, June 25-28, 2006, Marina-Mandarin Hotel, Singapore.
  12. T. Takahashi, M. Mita, K. Motohara, N. Kobayashi, N. Kashikawa, H. Fujita, and H. Toshiyoshi, "Electrostatically Addressable Gatefold Micro-shutter Arrays for Astronomical Infrared Spectrograph," Proc. Asia Pacific Conference on Transducers and Micro-Nano Technology, June 25-28, 2006, Marina-Mandarin Hotel, Singapore.
  13. K. Takahashi, M. Mita, H.N. Kwon, H. Fujita, and H. Toshiyoshi, "A Comb-driven XY-stage with topological layer switch architecture for high-density arrayed systems," The 8th Korean MEMS Conference, April 6-8, 2006, Korea.
  14. H. N. Kwon, K. Takanashi, J. H. Lee, H. Fujita, and H. Toshiyoshi, "A 9x9 Optical Cross-Connect utilizing Silicon Lens-Scanners with Spider-Leg Actuators," The 8th Korean MEMS Conference, April 6-8, Korea.
  15. C. Chong, K. Isamoto, M. Nakada, H. Fujita, and H. Toshiyoshi, "A Photovoltaically Modulated MEMS Optical Scanner for Fiber Endoscope," Int. Conf. on Microtechnologies in Medicine and Biology (MMB 2006), May 9-12, 2006, Bankoku-Shinryokan, Okinawa, Japan.
  16. Changho Chong, Keiji Isamoto, Jonathan Evans, and Hiroshi Toshiyoshi, "Optically-modulated MEMS scanning endoscope for optical coherent tomography," OSA Biomedical Optics Topical Meeting, March 22, 2006, Fort Lauderdale, FL, USA.
  17. H. N. Kwon, J. H Lee, K. Takahashi, H. Toshiyoshi, "Optical characterization of 9 x 9 optical cross connect utilizing silicon lens scanners with spider-leg actuators," Proc. SPIE Photonics West, MOEMS-MEMS 2006, SPIE vol. #6114, San Jose, CA, USA, Jan. 25-26, 2006, pp. 131-138.
  18. R. Shigematsu, A. Higo, H. Toshiyoshi, and H. Fujita, "Manually re-writable panel for large area MEMS," in Proc. 19th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2006), Jan .22-26, 2006, Lutfi Kirdar Convention and Exhibition Centre, Istanbul, Turkey, pp. 44-47.

Year 2005 (28 papers including 3 invited)

  1. S. Iwamoto, M. Tokushima, A. Gomyo, H. Yamada, A. Higo, H. Toshiyoshi, H. Fujita, and Y. Arakawa, "Optical switching in photonic crystal waveguide controlled by micro electro mechanical system," Technical Digest, Pacific Rim Conf. on Lasers and Electro-Optics (CLEO 2005), 2005.
  2. Y. Taii, A. Higo, H. Fujita, and H. Toshiyoshi, "Flexible Transparent Display by Plastic MEMS," The 12th. Int. Display Workshop / Asia Display 2005 (IDW/AD 05), Dec. 6 - 9, 2005, Sunport Takamatsu, Takamatsu, Japan.
  3. K. Takahashi, M. Mita, H. Fujita, and H. Toshiyoshi, "A High Fill-factor Comb-driven XY-stage with Topological Layer Switch Architecture," The 12th. Int. Display Workshop / Asia Display 2005 (IDW/AD 05), Dec. 6 - 9, 2005, Sunport Takamatsu, Takamatsu, Japan.
  4. R. Shigematsu, A. Higo, H. Toshiyoshi, and H. Fujita, "Blackboard-type Display Compatible with Large Area MEMS," The 12th. Int. Display Workshop / Asia Display 2005 (IDW/AD 05), Dec. 6 - 9, 2005, Sunport Takamatsu, Takamatsu, Japan.
  5. H. Toshiyoshi and H. Fujita, "MEMS Technologies for Micro Optics - From Fiber Optic Communication to Display -," The 12th. Int. Display Workshop / Asia Display 2005 (IDW/AD 05), Dec. 6 - 9, 2005, Sunport Takamatsu, Takamatsu, Japan. (invited)
  6. Hiroshi Toshiyoshi, "MEMS for micro optics from fiber optic communication to display," SPIE International Symposium on Optomechatronic Technologies (ISOT 2005), Sapporo Convention Center, Dec. 5-7, 2005. (invited)
  7. Hiroshi Toshiyoshi, "MEMS for Optical Information Technology," Nanoengineering Symposium 2005, Korea Institute of Machinery and Materials (KIMM), Daejeon, Korea, Oct. 26-28, 2005. (invited)
  8. M. Tani, M. Akamatsu, Y. Yasuda, H. Fujita and H. Toshiyoshi, "A Laser Display using a PZT-Actuated 2D Optical Scanner," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland, pp. 9-10. (oral A2)
  9. Y. Taii, A. Higo, H. Fujita and H. Toshiyoshi, "Electrostatically Controlled Transparent Display Pixels by PEN-Film MEMS," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland. (oral A4)
  10. M. Yoda, K. Isamoto, C. Chong, H. Ito, A. Murata, and H. Toshiyoshi, "Design and Fabrication of A MEMS 1-D Optical Scanner using Self-Assembled Vertical Combs and Scan-Angle Magnifying Mechanism," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland. (oral B2)
  11. K. Takahashi, H. N. Kwon, K. Saruta, M. Mita, J.-H. Lee, H. Fujita and H. Toshiyoshi, "A 2D Optical Lens Scanner with Small Footprint Actuators," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland. (poster P1.9)
  12. A. Higo, S. Iwamoto, M. Ishida, Y. Arakawa, H. Fujita, A. Gomyo, M. Tokushima, H. Yamada, and H. Toshiyoshi, "Design and Fabrication of MEMS Optical Modulators Integrated with PhC Waveguides," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland. (oral G4)
  13. T. Takahashi, M. Mita, H. Fujita and H. Toshiyoshi, "Electrostatic Micro-Shutter Array for Infrared Spectrograph," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland. (oral H2)
  14. H. N. Kwon, T.-H. Kim, H. Toshiyoshi, J.-H. Lee, "A 2x2 Optical Add-Drop Module with Attenuation Controllability using Two 45 deg Movable Micromirrors," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland. (poster P2.9)
  15. Kentaro Motohara, Takuya Takahashi, Hiroshi Toshiyoshi, Makoto Mita, Naoto Kobayashi, Nobunari Kashikawa, "Development of Microshutter Arrays for Ground-Based Instruments," Instrumentation for Extremely Large Telescopes, 2005/7/25-29, Bavaria, Germany.
  16. Kiyotaka Yamashita, Winston Sun, Kuniyuki Kakushima, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "An RF-MEMS Device with a Lateral Field-Emission Detector," The 18th Int. Vacuum Nanoelectronics Conference (IVNC 2005), 10-14 July 2005, St. Catherine's College, Oxford, UK.
  17. Winston Sun, Kiyotaka Yamashita, Kuniyuki Kakushima, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A LATERAL FIELD-EMISSION RF MEMS DEVICE," The Croucher Foundation Advanced Study Institute (ASI) "Frontier Research on Nano-mechanics," May 17 - 20, 2005, Hong Kong Univ, Hong Kong.
  18. K. Kakushima, G. Hashiguchi, M. Ataka, H. Toshiyoshi, and H. Fujita, "Real Time Observation of Micromachined Field Emission Tip using Transmission Electron Microscope," Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  19. Yuko Yamauchi, Akio Higo, Kuniyuki Kakushima, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A LIGHT-IN LIGHT-OUT MICRO MIRROR DEVICE," Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  20. Makoto Mita, Kuniyuki Kakushima, Manabu Ataka, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "Foxtail Actuators," Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  21. K. Takahashi, H. N. Kwon, M. Mita, H. Fujita, H. Toshiyoshi, K. Suzuki, H. Funaki, "Monolithic Integration of High Voltage Driver Circuits and MEMS Actuators by ASIC-like postprocess," Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  22. Kiyotaka Yamashita, Winston Sun, Kuniyuki Kakushima, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A LATERAL FIELD-EMISSION RF MEMS DEVICE," Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  23. Ho Nam Kwon, Jong-Hyun Lee, Kazuhiro "Johnny" Takahashi, and Hiroshi Toshiyoshi, "Micro XY-stages with Spider-leg Actuators for 2-Dimensional Optical Scanning," Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  24. M. Yoda, K. Isamoto, Changho Chong, H. Ito, S. Kamisuki, M. Atobe, and H. Toshiyoshi, "A MEMS 1-D Optical Scanner for Laser Projection Display using Self-assembled Vertical Combs and Scan-angle Magnifying Mechanism," Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  25. Yoshiaki Yasuda, Masahiro Akamatsu, Masanao Tani, and Hiroshi Toshiyoshi, "Piezoelectric 2D-Optical Micro Scanners With PZT Thick Films," Proc. 17th Int. Symp. on Integrated Ferroelectrics (ISIF 2005), April 17 - 20, 2005, Shanghai, China.
  26. Vincent Agache, Bernard Legrand, Kunihiko Nakamura, Hideki Kawakatsu, Lionel Buchaillot, Hiroshi Toshiyoshi, Dominique Collard, and Hiroyuki Fujita "Characterization of Vertical Vibration of Electrostatically Actuated Resonators using Atomic Force Microscope in Noncontact Mode," 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  27. Makoto Mita, Hiroshi Toshiyoshi, Manabu Ataka, Hiroyuki Fujita, "A Micro Dice -An Electrostatic Micro Random number generator,'' IEEE MEMS 2005, January 30 - February 3, 2005, Miami Beach, Florida, USA.
  28. Makoto Mita, Hiroshi Toshiyoshi, Hiroyuki Fujita, "An Electrostatic Inertia-Driven Micro Rover,'' IEEE MEMS 2005, January 30 - February 3, 2005, Miami Beach, Florida, USA

Year 2004 (11 articles, 2 invited)

  1. Dai Kobayashi, Akio Higo, Hiroshi Toshiyoshi, Hiroyuki Fujita, Hideki Kawakatsu, "A Fabrication Method of Nanocantilevers Using Silicon Direct bonding," The 12th International Colloquium on Scanning Probe Microscopy, p.56 2004-12-01
  2. Hiroshi Toshiyoshi, "MEMS for Fiber Optic Application," International Workshop on Micromechatronics and Micro and Nano Fabrication, October 5th and 6th, 2004 University of Karlsruhe, Germany.
  3. Hiroshi Toshiyoshi, "Pros and Cons of Surface Stiction in MEMS Devices and Processes," Nano Interface Mechanics Workshop (NMW2004), 8-9 September 2004, Institute of Industrial Science, University of Tokyo, Tokyo, Japan. (invited)
  4. Kazuhiro Takahashi, Kunihiko Saruta, Makoto Mita, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "An Optical Scanner with Electrostatic Comb Drive XY-Stage," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2004), Takamatsu, Japan, Aug. 22-26, 2004, pp. 56-57.
  5. Hiroshi Obi, Toshio Yamanoi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A Vertical-Comb Torsion Mirror with Distributed Gap for Suppressing In-Plane Instability," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2004), Takamatsu, Japan, Aug. 22-26, 2004, pp. 60-61.
  6. Yuko Yamauchi, Akio Higo, Kuniyuki Kakushima, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Optically Assisted Electrostatic Actuation Mechanism," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2004), Takamatsu, Japan, Aug. 22-26, 2004, pp. 164-165.
  7. Keiji Isamoto, Tatsuya Makino, Kazuya Kato, Atsushi Morosawa, Changho Chong, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A Two-Mask Process for Self-Assembled Vertical Comb Drive Mirrors," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2004), Takamatsu, Japan, Aug. 22-26, 2004, pp.172-173.
  8. Masanao Tani, Masahiro Akamatsu, Yoshiaki Yasuda, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A 2D-Optical Scanner Actuated by PZT Film Deposited by Arc Discharged Reactive Ion-Plating (ADRIP) Method," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2004), Takamatsu, Japan, Aug. 22-26, 2004, pp. 188-189.
  9. Akio Higo, Satoshi Iwamoto, Satomi Ishida, Hiroyuki Fujita, Yasuhiko Arakawa, Hiroshi Toshiyoshi, Hirohito Yamada, Akiko Gomyo and Masatoshi Tokushima, "Micromechanical Structures for Photonic Crystal Waveguide Switches," Asia-Pacific Conf. on Transducers and micro-Nano Technology (APCOT 2004), July 4-7, 2004, Sapporo, Japan.
  10. Hiroshi Toshiyoshi, "Stability Issues in MEMS Devices and Packages," International Workshop on SoC/SiP Integration of MEMS and Passive Components with RF-ICs, March 2, 2004, Keyaki Hall, Chiba University. (invited)
  11. Chang-ho Chong, Keiji Isamoto, Atsushi Morosawa, Kazuya Kato, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "MEMS variable optical attenuator with simple and smart design for stable and reliable operation," Proc. SPIE vol. 5279, pp. 40-48, 2004.

Year 2003 (12 articles, 6 invited)

  1. Hiroshi Toshiyoshi, "Micro Electro Mechanical Devices for Fiber Optic Telecommunication," International Symposium on Micro-Mechanical Engineering Heat Transfer, Fluid Dynamics, Reliability and Mechatronics (ISMME 2003), AIST, Tsukuba, Japan, Dec. 1 - 3, 2003. (invited)
  2. Hiroshi Toshiyoshi, "MEMS for Fiber Optic Applications," The 16th Int. Conf. on Optical Fiber Sensors (OFS-16), Oct. 13-17, 2003, Nara-ken New Public Hall, Nara, Japan. (invited)
  3. C. Chong, K. Isamoto, H. Fujita, and H. Toshiyoshi, "Variable Optical Attenuator with Simple SOI-MEMS Mirror (tentative title)," Asia-Pacific Optical and Wireless Communications (APOC 2003), Nov. 2 - 6, 2003, Wuhan Science and Technology Conference & Exhibition Center, Wuhan, China. (invited)
  4. C. Chong, K. Isamoto, H. Fujita, and H. Toshiyoshi, "Variable Optical Attenuator with Simple SOI-MEMS Mirror," Proc. the 29th European Conference on Optical Communication / the 14th Int. Conf. on Integrated Optics and Optical Fiber Communication (ECOC / IOOC 2003), Sep. 21-25, 2003, Rimini, Italy, Mo-3.5.2.
  5. Keiji Isamoto, Kazuya Kato, Atsushi Morosawa, Changho Chong, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Micromechanical VOA Design for High Shock-Tolerance and Low Temperature-Dependence," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (MOEMS 03), Outrigger Waikoloa Beach, Hawaii, USA, Aug. 18 - 21, 2003.
  6. W. Piyawattanametha, P. R. Patterson, D. Hah, H. Toshiyoshi, and M. C.Wu, "A 2D Scanner by Surface and Bulk Micromachined Angular Vertical Comb Actuators," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (MOEMS '03), Outrigger Waikoloa Beach, Hawaii, USA, Aug. 18 - 21, 2003.
  7. Hiroshi Toshiyoshi, "MEMS for Fiber Optic Applications," Proc. 5th Japanese-Finnish Joint Symposium Optics in Engineering (OIE '03), Aug. 7-9, 2003, Saariselka, Lapland, Finland. (invited)
  8. H. Toshiyoshi, K. Isamoto, A. Morosawa, M. Tei, and H. Fujita, "A 5-Volt Operated MEMS Variable Optical Attenuator," Proc. the 12th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 03), Boston Marriott Copley Place, Boston, MA, USA, June 8-12, 2003, 4D1.2, pp. 1768-1771.
  9. Makoto Mita, Hiroaki Kawara, Hiroshi Toshiyoshi, Manabu Ataka, and Hiroyuki Fujita, "An Electrostatic 2-Dimensional Micro-Gripper for Nano Structure," Proc. the 12th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 03), Boston Marriott Copley Place, Boston, MA, USA, June 8-12, 2003, 4D1.2, pp. 1768-1771.
  10. W. Piyawattanametha, P. Patterson, D. Hah, H. Toshiyoshi, M. C. Wu, "A Surface and Bulk Micromachined Angular Vertical Combdrive for Scanning Micromirrors," 2003 Optical Fiber Communication Conference and Exposition (OFC 2003), March 23 - 28, 2003, Georgia World Congress Center, Atlanta, Georgia, USA, TuN1.
  11. M. C. M. Lee, D. Hah, E. K. Lau, H. Toshiyoshi and M.Wu, "Nano-electro-mechanical Photonic Crystal Switch," Proc. The 6th International Symposium on Contemporary Photonics Technology (CPT2003), KOKUYO HALL, Shinagawa, Tokyo, Japan, January 15-17, 2003. (invited)
  12. Dooyoung Hah, Chang-Auck Choi, Chi-Hoon Jun, Youn Tae Kim, Pamera R. Patterson, Hiroshi Toshiyoshi, Ming C. Wu, "MOEM scanners for optical networks," Proc. the 9th KIEE MEMS Symposium. (invited)

Year 2002 (17 articles, 1 invited)

  1. Hiroshi Toshiyoshi, Kunihiko Saruta, Hiroyuki Fujita, Ming C. Wu, "Alternative Optical MEMS," Proc. the 3rd Int. Conf on Optics-photonics Design & Fabrication (ODF 2002) Oct. 30 - Nov. 1, 2002, National Museum of Emerging Science and Innovation, Tokyo, Japan, pp. 27-28. (invited)
  2. Makoto Mita, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Electrostatic Piggyback Microactuators for Head Element Positioning" ASME/IEEE Asia Pacific Magnetic Recording Conference (APMRC) 2002, Aug. 28-29, 2002, Pan Pacific Hotel, Singapore.
  3. Kunihiko Saruta, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Bulk Micromachined 2D Lens Scanners for Transparent Optical Fiber Switches," Conf. Digest of 2002 IEEE/LEOS Int. Conf. on Optical MEMS (Optical MEMS 2002), 20-23 August, 2002, Hotel de la Paix, Lugano, Switzerland, pp. 13-14.
  4. Sophia Huang, Jui-Che (Ted) Tsai, Dooyoung Hah, Hiroshi Toshiyoshi, and Ming C. Wu, "Open-Loop Operation of MEMS WDM Routers with Analog Micromirror Array," Conf. Digest of 2002 IEEE/LEOS Int. Conf. on Optical MEMS (Optical MEMS 2002), 20-23 August, 2002, Hotel de la Paix, Lugano, Switzerland, pp. 179-180.
  5. Makoto Mita, Hiroshi Toshiyoshi and Hiroyuki Fujita, "Hard-Disk Head Positi ning Mechanism using SOI Wafer," Proc. 19th SENSOR SYMPOSIUM, May 29-31, 2002 , Kyoto, Japan, pp. 455-458, A1-5.
  6. G. Hashiguchi, Y. Wada, J. Endo, H. Toshiyoshi, and H. Fujita, "A Micrimachined Nanoprobe device and Its Application to Visual Observation of Nano Phenomena in a Transmission Electron Microscope, " Proc. 19th SENSOR SYMPOSIUM, May 29-31, 2002 , Kyoto, Japan, pp.35-38, A1-5.
  7. S. Kawai, D. Kobayashi, D. Saya, A. Kato, H. Toshiyoshi, H. Fujita and H. Kawakatsu , "Millions of nanocantilevers and Towards Atomic Force Microscopy up to 100 MHz," Proc. 19th SENSOR SYMPOSIUM, May 29-31, 2002 , Kyoto, Japan, pp.29-33, A1-4.
  8. D. Hah, S. Huang, H. Nguyen, H. Chang, J.-C. Tsai, M. C. Wu, H. Toshiyoshi, "Low Voltage MEMS Analog Micromirror Arrays with Hidden Vertical Comb-Drive Actuators," 2002 Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head 2002), June 2-6, 2002, Crown Plaza Resort, Hilton Head Island, SC.
  9. P.-Y. Chiou, M. C. Wu, H. Moon, C.-J. Kim, and H. Toshiyoshi, "Optical Actuation of Microfluidics Based on Opto-Electrowetting," 2002 Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head 2002), June 2-6, 2002, Crowne Plaza Resort, Hilton Head Island, SC.
  10. D. Hah, M.C. Wu, H. Toshiyoshi, "Design of electrostatic actuators for MOEMS applications," Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS (DTIP MOEMS 2002), May 6-8, 2002, Cannes-Mandelieu, Cote d'Azur, France, Session-9: Component Design, May 8, Wednesday.
  11. P. Patterson, D. Hah (University of California at Los Angeles), H. Toshiyoshi (University of Tokyo), and M. Wu (University of California at Los Angeles), "MOEMS Electrostatic Scanning Micromirrors Design and Fabrication," The 201st Meeting of the Electrochemical Society, May 12-17, 2002, Philadelphia, PA, abst# 671 at Session-O1 (May, 15, 2002).
  12. Hsin Chang, Dooyoung Hah, Sophia Huang, Hung Nguyen, Hiroshi Toshiyoshi, Ming, C. Wu, "A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuators," OFC 2002, March 17-22, Anaheim, CA (Tuesday, March 19, 02:45 PM - 03:00 PM)
  13. Ming-Chang Mark Lee, Dooyoung Hah, Erwin K. Lau, Hiroshi Toshiyoshi, Ming Wu, "Nano-Electro-Mechanical Photonic Crystal Switch," OFC 2002, in Anaheim, CA, Mar. 17-22, 2002, at Session-TuO.
  14. Dooyoung Hah, Sophia Huang, Hung Nguyen, Hsin Chang, Hiroshi Toshiyoshi, and Ming C. Wu, " A Low Voltage, Large Scan Angle MEMS Micromirror Array with Hidden Vertical Comb-Drive Actuators for WDM Routers," OFC 2002, in Anaheim, CA, Mar. 17-22, 2002.
  15. M. C. Wu, D. Hah, P. Patterson, H. Toshiyoshi, "Microelectromechanical Scanning Devices for Optical-Networking Applications," IEEE International Solid-State Circuit Conference (ISSCC 2002), Feb. 3-7, 2002, San Francisco, USA (presentation No. 21.6).
  16. M. Mita, H. Toshiyoshi, K. Kakushima, G. Hashiguchi, D. Kobayashi, J. Endo, Y. Wada, and H. Fujita, "Characterization of Bulk Micromachined Tunneling Tip Integrated with Positioning Actuator," The 15th IEEE Int. Micro Electro Mech. Syst. Conf. (MEMS 2002), Jan. 20-24, 2002, Las Vegas, Nevada, USA, TP22.
  17. P. R. Patterson, D. Hah, H. Nguyen, H. Toshiyoshi, R.-M. Chao, and M.C. Wu, "A Scanning Micromirror with Angular Comb Drive Actuation," Proc. 15th IEEE Int. Micro Electro Mech. Syst. Conf. (MEMS 2002), Jan. 20-24, 2002, Las Vegas, Nevada, USA, WP10.

Year 2001 (6 articles, 1 invited)

  1. H. Fujita, H. Toshiyoshi, Y. Wada, "Micromachined tools for nano technology," RIKEN Review, (no.36), (First Japan-Switzerland Bilateral Symposium on Science and Technology in Micro/Nano Scale, Wako, Japan, 26-28 Oct. 2000.) Inst. Phys. Chem. Res. (RIKEN), June 2001. p.12-15.
  2. Hiroshi Toshiyoshi, "Design Strategy for MEMS 2D Scanning Mirrors," Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS2001), Sept. 25-28, 2001, Bankoku Shinryokan and Busena Terrace Resort, Okinawa, Japan, IT-4. (invited)
  3. Pamela R. Patterson, Dooyoung Hah, Hsin Chang, Hiroshi Toshiyoshi, Ming C. Wu, "An Angular Vertical Comb Drive Actuator for Scanning Micromirrors," Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2001), Sept. 25-28, 2001, Bankoku Shinryokan and Busena Terrace Resort, Okinawa, Japan, C-2.
  4. W. Piywattanametha, P. R. Patterson. G. D. J. Su, H. Toshiyoshi, M. C. Wu, "A MEMS Non-interferometric Differential Confocal Scanning Optical Microscope," Digest of the 11th Int. Conf. on Solid-State Sensors and Actuators (Transducers 2001 & Eurosensors XV), June 10-14, 2001, Munich, Germany, 2B2.05.
  5. D. Saya, K. Fukushima, H. Toshiyoshi, G. Hashiguchi, H. Fujita, and H. Kawakatsu, "Fabrication of Array of Single-Crystal Si Multi-Probe Cantilevers with Several Microns Size for Parallel Operation of Atomic Force Microscope," 14th Int. Conf. on Micro Electro Mechanical Systems (MEMS 2001), Jan. 21 - 25, 2001, Interlaken, Switzerland, MP22.
  6. H. Nguyen, J. Su, H. Toshiyoshi, M. C. Wu, "Device Transplant of Optical MEMS for out of Plane Beam Steering," 14th Int. Conf. on Micro Electro Mechanical Systems (MEMS 2001), Jan. 21 - 25, 2001, Interlaken, Switzerland, TP23.

Year 2000 (sabbatical at UCLA, 10 articles, 1 invited)

  1. D. Saya, K. Fukushima, H. Toshiyoshi, G. Hashiguchi, H. Fujita, and H. Kawakatsu, "Fabrication of single crystal Si multi-probe cantilever array," Proc. of The 8th International Colloquium on Scanning Probe Microscopy & Asian SPM 3, 2000.12, p.44.
  2. Ming C. Wu and Hiroshi Toshiyoshi, "Recent Advances in Micro-Opto-Electro-Mechanical Systems (MOEMS)," CLEO/Europe-IQEC 2000, 12 - 14 September, Nice Acropolis, Nice, France, CWD6. (invited)
  3. Hiroshi Toshiyoshi, Guo-Dung John Su, Jason LaCosse, Ming C. Wu, "Surface Micromachined 2D Lens Scanner Array," Proc. IEEE/LEOS Optical MEMS, Kauai, Hawaii, Aug. 21-24, 2000, Late News Session, PD-1.
  4. Pamela R. Patterson, Guo-Dung J. Su, Hiroshi Toshiyoshi, Ming C. Wu, "A MEMS 2-D Scanner with Bonded Single-Crystalline Honeycomb Micromirror," Solid-State Sensor & Actuator Workshop (Hilton Head 2000), June 4-8, 2000, Hilton Head Island, SC (Supplemental Digest of Late News Poster Session), p. 17-18.
  5. Hiroshi Toshiyoshi, Wibool Piyawattanametha, Cheng Ta Chan, and Ming C. Wu, "Linearization and Analysis of Electrostatically Actuated MEMS 2D Optical Scanner," Solid-State Sensor & Actuator Workshop (Hilton Head 2000), June 4-8, 2000, Hilton Head Island, SC (Supplemental Digest of Late News Poster Session), p. 7-8.
  6. Guo-Dung J. Su, Hung Nguyen, Pamela Paterson, Hiroshi Toshiyoshi, Ming C. Wu, "Surface-Micromachined 2D Optical Scanners with high-Performance Single-Crystalline Silicon Micromirrors," Conference on Lasers and Electro-Optics / Quantum Electronic and Laser Science Conference (CLEO/QELS 2000), May 7-10, 2000, San Francisco, CA (Post deadline paper) CPD21-1.
  7. Wibool Piyawattanametha, Hiroshi Toshiyoshi, Jason LaCosse, Ming C. Wu, "Surface-Micromachined Confocal Scanning Optical Microscope," Conference on Lasers and Electro-Optics / Quantum Electronic and Laser Science Conference (CLEO/QELS 2000), May 7-10, 2000, San Francisco, CA, CThL3.
  8. H. Nguyen, P. Patterson, H. Toshiyoshi, and M.C. Wu, "A Substrate-Independent Wafer Transfer Technique for Surface-Micromachined Devices," The 13th IEEE International Micro Electro Mechanical Systems Conference (MEMS 2000), Jan. 23- 27, 2000, Miyazaki, Japan.
  9. K. Fukushima, D. Saya, H. Toshiyoshi, H. Fujita, G. Hashiguchi, and H. Kawakatsu, "Measurement of Characteristics of Nanometric Oscillator for Atomic Force Microscopy," The 13th IEEE International Micro Electro Mechanical Systems Conference (MEMS 2000), Jan. 23- 27, 2000, Miyazaki, Japan.
  10. K. Fukushima, D. Saya, H. Toshiyoshi, H. Fujita, G. Hashiguchi, and H. Kawakatsu, "Measurement of characteristics of nanometric mechanical oscillators," Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on, 23-27 Jan. 2000 Page(s): 211 - 216

Year 1999 (sabbatical at UCLA, 19 articles, 2 invited)

  1. K. Fukushima et al., The 7th International Colloquium on Scanning Probe Microscopy (ICSPM-7), Atagawa, December, 1999.
  2. D. Saya et al., The 7th International Colloquium on Scanning Probe Microscopy (ICSPM-7), Atagawa, December, 1999.
  3. Hiroshi Toshiyoshi, "An Overview of Micro-Electro-Mechanical Systems (MEMS)," presented at Executive Forum, 1999 American Society of Precision Engineering Annual Meeting, Oct. 31 - Nov. 3, 1999, Monterey, CA. (invited)
  4. Hiroshi Toshiyoshi, "Microactuators for optical applications," 1999 OSA Annual meetings/ILS-XV, Sept. 26 - 30, 1999, Santa Clara Convention Center, Santa Clara, CA (TuGG-1). (invited)
  5. Hiroshi Toshiyoshi, Guo-Dung John Su, Jason LaCosse, Ming C. Wu, "Micromechanical Lens Scanners for Fiber Optic Switches," Proc. 3rd Int'l Conf. on Micro Opto Electro Mechanical Systems (MOEMS 99), Aug. 30 - Sep. 1, 1999, Mainz, Germany, pp. 165-170.
  6. H. Fujita, G. Hashiguchi, M. Mita, H. Toshiyoshi, D. Kobayashi, M. Goto, Y. Wada, J. Endo, "A micromachined tunneling current device for the direct observation of the tunneling gap," Proc. 7th IEEE Int. Conf. on Emerging Technologies and Factory Automation. (ETFA '99), Barcelona, Spain, Oct. 18-21, 1999, pp.367-72, vol.1.
  7. A. Tixier, J. P. Gouy, Y. Mita, H. Toshiyoshi, and H. Fujita, "Microactuated slider based tunable filters for optical fiber transmission," Proc. 3rd Int'l Conf. on Micro Opto Electro Mechanical Systems (MOEMS 99), Aug. 30 - Sep. 1, 1999, Mainz, Germany.
  8. Hideki Kawakatsu, Hiroshi Toshiyoshi, Daisuke Saya, Hiroyuki Fujita, " Strength measurement and calculations on silicon-based nanometric oscillators for scanning force microcopy operating in the gigahertz range," The 2nd International Conference on Non-Contact AFM, Sep. 1-4, 1999, Pontresina, Switzerland.
  9. Hideki Kawakatsu, Hiroshi Toshiyoshi, Daisuke Saya, Hiroyuki Fujita, "A Silicon Based Nanometric Oscillator with Natural Frequency in the GHz Range for Scanning Force Microscopy," The 10th International Conference on Scanning Tunneling Microscopy / Spectroscopy and Related Techniques (STM 99), July 18-23, 1999, Seoul, Korea, WeP1-37 (poster session).
  10. Hiroshi Toshiyoshi, Masahide Goto, Makoto Mita, Gen Hashiguchi, Hiroyuki Fujita, Dai Kobayashi, Junji Endo, Yasuo Wada, "Micromechanical Tunneling Probes & Actuators on a Silicon Chip," 1999 Int. Microprocesses and Nanotechnology Conf., July 6-8, 1999, Yokohama, Japan, 8B-7-2.
  11. M. Mita, H. Toshiyoshi, T. Oba, Y. Mita, and H. Fujita, "Multi-height HARMS by Planar Photolithography on Initial Surface," Workshop and Exhibition on High Aspect Ratio Microstructure Technology (HARMST'99), 3-15, June 1999, Kazusa Academia Center, Chiba, JAPAN.
  12. Kyoseok Chun, Gen Hashiguchi, Hiroshi Toshiyoshi, Hiroyuki Fujita, The University of Tokyo, Yuji Kikuchi, National Food Research Institute, Jun Ishikawa, Yuji Murakami, Eiichi Tamiya, Japan Advanced Institute of Science and Technology, Japan "DNA Injection into Plant Cell Conglomerates by Micromachined Hollow Microcapillary Arrays," The 10th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS 99), Sendai, Japan, June 7-10, 1999.
  13. Gen Hashiguchi, Makoto Mita, Hiroshi Toshiyoshi, Dai Kobayashi, Yasuo Wada, Junji Endo, Masahide Goto, Hiroyuki Fujita, "Fabrication of Facing Nano-wire Probes for In-Situ Observation of Tunneling Phenomena with Ultra-High Resolution TEM," The 10th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS 99), Sendai, Japan, June 7-10, 1999.
  14. Makoto Mita, Philippe Helin, Daisuke Miyauchi, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Optical and Surface Characterization of Polysilicon Replica Mirrors for an Optical Fiber Switch," The 10th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS 99), Sendai, Japan, June 7-10, 1999.
  15. Hiroshi Toshiyoshi, Dai Kobayashi, Gen Hashiguchi, Makoto Mita, Hiroyuki Fujita, Yasuo Wada, Junji Endo, "Micro Electro Mechanical Digital-to-Analog Converter (MEMDAC)," The 10th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS 99), Sendai, Japan, June 7-10, 1999.
  16. H. Toshiyoshi, D. Miyauchi, and H. Fujita, "A Magnetically Driven Microoptical Switch," The Journal of the Electrochemical Society, Proc. ECS the Fifth International Symposium on Magnetic Materials, Processes and Devices (Electrochem. Soc., Boston, 1998).
  17. J. P. Gouy, A. Tixier, G. Hashiguchi, H. Toshiyoshi, and H. Fujita, "Design of a pigtailed tunable filter for optical fiber transmissions at 1.3-1.55 microns," 1999 SPIE conference on Micromachining and Microfabrication, 30 March - 1 April, 1999, Paris, France.
  18. Hiroshi Toshiyoshi, Yoshio Mita, Minoru Ogawa, and Hiroyuki Fujita, "Chip-Level Three-Dimensional Assembling of Microsystems," 1999 SPIE conference on Micromachining and Microfabrication, 30 March - 1 April, 1999, Paris, France.
  19. K. Chun, G. Hashiguchi, H. Toshiyoshi, H. Fujita, Y. Kikuchi, J. Ishikawa, Y. Murakami, and E. Tamiya, "An Array of Hollow Microcapillaries for the Controlled Injection of Genetic Materials into Animal/Plant Cells, " 12th Annual International Conference on Micro Electro Mechanical Systems (MEMS 99), January 17-21, 1999, Orlando, Florida, USA.

Year 1998 (8 artciles, 1 invited)

  1. Daisuke Saya, Hiroshi Toshiyoshi, Hiroyuki Fujita, Hideki Kawakatsu, "Fabrication Technique of Silicon based Nanometric Oscillators," The 6th International Colloquium on Scanning Tunneling Microscopy organized by Thin Film and Surface Physics Division of Japan Society of Applied Physics, Atagawa, 1998.12.10-12, p.83.
  2. Hideki Kawakatsu, Hiroshi Toshiyoshi, Hiroyuki Fujita, and Daisuke Saya, "Silicon Based Nanometric Oscillators - Where Mechanics Meets Electronics Without Fail -," The 6th International Colloquium on Scanning Tunneling Microscopy organized by Thin Film and Surface Physics Division of Japan Society of Applied Physics, Atagawa, 1998.12.10-12, p.39.
  3. Hideki Kawakatsu, Hiroshi Toshiyoshi, Hiroyuki Fujita, and Daisuke Saya, "Silicon Based Nanometric Oscillators -Where Mechanics Meets Electronics Without Fail-," Fourth Joint Workshop on Production Technology, Dec. 1-2, 1998, Tokyo, p.59 (A joint workshop by the members of the Research Group on Production Technology, IIS, University of Tokyo, and the members of the Research Institute of Mechanical Technology, Pusan National University).
  4. Markus Mueller, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Acoustic wavelet analysis using micro electro-mechanical sensors," SPIE 1998 Symposium on Micromachining and Microfabrication, 20-22 September, 1998, Santa Clara, California, USA.
  5. H. Toshiyoshi, D. Miyauchi, H. Fujita, "A Magnetically Driven Microoptical Switch," 5th International Symposium on Magnetic Materials, Processes and Devices as part of the 194th Meeting of the Electrochemical Society, Boston, Nov.1-6, 1998.
  6. Hiroyuki Fujita, Hiroshi Toshiyoshi, "Micromacined Optical Switches for Free-Space Beam Steering," Proc. 1998 IEEE/LEOS Summer Topical Meetings, 20-24 July, 1998, Monterey, CA. (invited)
  7. Makoto Mita, Daisuke Miyauchi, Hiroshi Toshiyoshi, Hiroyuki Fujita, "An-Out-of-Plane Polysilicon Actuator with a Smooth Vertical Mirror for Optical Fiber Switch Application," Proc. 1998 IEEE/LEOS Summer Topical Meetings, 20-24 July, 1998, Monterey, CA.
  8. Hiroshi Toshiyoshi, Daisuke Miyauchi, Hiroyuki Fujita, "Micromechanical Fiber Optic Switches based on Electromagnetic Torsion Mirrors," Proc. 1998 IEEE/LEOS Summer Topical Meetings, 20-24 July, 1998, Monterey, CA.

Year 1997 (9 articles, 1 invited)

  1. C. Gorecki, E. Bonnotte, H. Toshiyoshi, F. Benoit, H. Kawakatsu, H. Fujita, "Original approach to an optically active silicon-based interferometric structure for sensing applications, " Proceedings of the SPIE - The International Society for Optical Engineering, vol.3098, (Optical Inspection and Micromeasurements II, Munich, Germany, 16-19 June 1997.) SPIE-Int. Soc. Opt. Eng, 1997. p.392-9.
  2. E. Bonnotte, C. Gorecki, H. Toshiyoshi, and H. Kawakatsu, "Silicon-based interferometric sensor with phase modulation driven by surface acoustic waves," Proceedings of the SPIE - The International Society for Optical Engineering, vol.3242, (Smart Electronics and MEMS, Adelaide, SA, Australia, 11-13 Dec. 1997.) SPIE-Int. Soc. Opt. Eng., 1997. p.329-36.
  3. Daisuke Miyauchi, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Optical Cross-connect Switch by Silicon Micromachining," IEEE/LEOS International Conference on Optical MEMS and Their Applications (MOEMS 97), Nov.18-21, 1997, Nara, Japan, pp.253-258.
  4. Masakazu Kobayashi, Hiroshi Toshiyoshi, Hiroyuki Fujita, "A Micromechanical Tunable Interferometer for Free-Space Optical Interconnection," IEEE/LEOS International Conference on Optical MEMS and Their Applications (MOEMS 97), Nov.18-21, 1997, Nara, Japan, pp.171-175.
  5. Hiroshi Toshiyoshi, "Electrostatic micromirrors for a free-space optical switch," Optical Society of America Annual Meeting, 1997.10.12-17, Long Beach, California, USA, p.167. (invited)
  6. Hiroshi Toshiyoshi, Masakazu Kobayashi, Hiroyuki Fujita, Jean Podlecki, Takao Someya, Yasuhiko Arakawa, "Micromechanical Wavelength Filters for Optical Interconnection," France-Japan Workshop "From Nano to Macroscale science and technology through Microsystems (N2M 97)," May 21-23, 1997, Tokyo, Japan.
  7. H. Toshiyoshi, "Micro Mechanical Polysilicon Torsion Mirrors for an Electrostatic Optical Switch in a Free-Space," SPIE's 1996 Symposium on Smart Materials, Structures and MEMS, Bangalore, India, (1996.12), p.556-561.
  8. Ronald Mueller, Hannes Bleuler, Hiroshi Toshiyoshi, Cedric Aymon, Philipp Blum, Christof Sidler, Gunter Heine, "A Flat miniature active magnetic motor bearing combination for HDD applications," 25th International Symposium on Incremental Motion Control Systems and Devices, San Jose, USA, July 1997.
  9. Christophe Gorecki, Eric Bonnotte, Hiroshi Toshiyoshi, Fred Benoit, Hideki Kawakatsu, Hiroyuki Fujita, "Novel Approach of Optically Active Silicon Based Intereferometric Structure for Sensing Applications," Technical Program of European Symposium on Lasers and Optics in Manufacturing (Conference on Lasers in Material Processing/Optics and Vision in Manufacturing), 16-20 June 1997, Fairground, Munich FR Germany.

Year 1996 (2 articles)

  1. H. Toshiyoshi and H. Fujita, "Microactuators for Optical Switches," Proc. 3rd France-Japan Cong. & 1st Europe-Asia Cong. on Mechatronics (MECHATRONICS '96), vol.2, Besancon, France, (1996.10), pp.614-619
  2. H. Toshiyoshi and H. Fujita, "Optical Crossconnection by Silicon Micromachined Torsion Mirrors," Digest IEEE/LEOS 1996 Summer Topical Meetings, Keystone, Colorado, USA, (1996.8), pp.63-64.

Year 1995 (5 articles)

  1. Yamato FUKUTA, Hiroshi TOSHIYOSHI, Shigeo NAMAMURA, Terunobu AKIYAMA, Hiroyuki FUJITA, "AN FEM MODELING OF PLASTICALLY REFORMED POLYSILICON BEAMS WITH JOULE HEAT" IEEE Forum on Micromachine and Micromechatrohnics, October 30-31, 1995, Nagoya Municipal Industrial Research Institute, Nagoya, Japan.
  2. Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, and Toshitsugu Ueda, "Microactuators Based on Newly Developed Pseudostatic Displacement Mechanism," 1995 Int. Mechanical Eng. Congress & Exposition (ASME '95), Nov. 12-17, 1995, San Francisco Hilton, San Francisco, California, pp.989-994.
  3. Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Toshitsugu Ueda, "Piezoelectric & Electrostatic Actuators to Generate Pseudo-Static Displacement from Resonant Oscillation," 4th Japan Int. SAMPE Symposium & Exhibition (JISSE-4), Sep. 25-28, 1995, Tokyo, Japan, pp.1070-1075.
  4. Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, and Toshitsugu Ueda, "A Piezoelectric Pseudo-Static Actuator for Large Displacement under AC Voltage Operation," The 8th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '95), Stockholm, Sweden, Jun. 25-29, 1995, 92-B5.
  5. Hiroshi Toshiyoshi, Hiroyuki Fujita, "An Electrostatically Operated Torsion Mirror for Optical Switching Device," The 8th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '95), Stockholm, Sweden, Jun. 25-29, 1995, 68-B1.

Year 1994 (1 article)

  1. Hiroshi Toshiyoshi, Hiroyuki Fujita, Toshitsugu Ueda, "A Self-excited Chopper made by Quartz Micromachining and its Application to an Optical Sensor," Proc. 7th IEEE Workshop on Micro Electro Mechanical Systems (MEMS '94), Jan. 25-28, 1994, Oiso, Japan, pp.325-330.

Year 1993 (2 articles)

  1. Hiroshi Toshiyoshi, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda, "A Piezoelectrically Operated Optical Chopper by Quartz Micromachining," The 7th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '93), Yokohama Japan, Jun. 7-10, 1993, pp.128-131.
  2. Hiroshi Toshiyoshi, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda, "Piezoelectrically Operated Actuators by Quartz Micromachining for Optical Application," Proc. IEEE Micro Electro Mechanical System Workshop (MEMS '93), Ft. Lauderdale, USA, Feb.7-10, 1993, pp.133-138.

*1 No printed proceedings distributed.
*2 No printed proceedings distributed.
*3 No printed proceedings distributed.

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