Research/Highlight 2020

The following projects and research topics are on-going in 2020.

MEMS Electrostatic Energy Harvester†

• Design and microfabrication process for 1mW devices
• High performance rectifier circuits
• Design for wide band pass
• R&D Partner: Saginomiya Seisakusho Inc.

Microactuators with Built-in Electrets†

• Low-voltage micro audio speakers
• Integration of electret within MEMS
• R&D Partner: Prof. G. Hashiguchi, Shizuoka University

MEMS Optical Scanners†

• Scanner design for large optical angles
• Application to LiDAR
• Application to laser scan display
• Application to assistant gear for visually impaired
• R&D Partner: Stanley Electric Co., Ltd.

Optical Coherence Tomography by MEMS Tunable LD†

• High-speed MEMS optical scanner
• Application to OCT
• R&D Partner: SANTEC CORPORATION

Micro Shutter Array for Astronomical Spectroscopy†

• Electrostatic addressing control system
• R&D Partner: Institute of Astronomy, The University of Tokyo

TFT (Thin Film Transistor) Array for Cell Interface†

• TFT design for cell I/O
• Neuron / cardiac cell culture on TFT
• R&D Partner: SHARP COPRPORATION

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Introduction to Dept. Informatics and Electronics, IIS