Welcome Remarks (English / Japanese / Top)

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Research Field: Welcome to the Optical and RF-MEMS Lab with Prof. Hiroshi Toshiyoshi and Prof. Agnes Tixier-Mita. We are a research group within the Centre for Interdisciplinary Research on Micro-Nano Methods (CIRMM)*1 located at the Institute of Industrial Science (IIS)*2, The University of Tokyo, Tokyo, Japan. Our research interest is in the optical and RF-MEMS*3 application of MEMS technology.

Research Topics: You may find our research topics (accomplishment and on-going) at Research. Our lab life can be sampled at Lab Daily Life page. Click on the links on the left to find more about us, such as Members and Publication.

Student Admission: Our lab accommodates graduate school students (master and Ph.D course) within the EE (Electrical Engineering) course of the University of Tokyo. Entrance exam information and lab topics for candidate students are at research high-light.

International Activities: We operate the Core-to-Core Program (A. Advanced) entrusted by the JSPS*4 from April 2012 to March 2017 as a matching fund to the EU-FP7*5 (EUJO-LIMMS)*6 granted to the France-Japan collaboration lab LIMMS*7; in this program, young researchers higher than the master-course level are dispatched to our oversea collaborating labs for their international research training.

National Project: From March 2015, we operate a NEDO Leading Program on High Efficiency MEMS Vibrational Energy Harvesters for Trillion Sensors Society in collaboration with NMEMS Technological Research Organization. From December 2015, we also operate a CREST program (Scientific Innovation for Energy Harvesting Technology) of JST on "Electret MEMS Vibrational Triboelectric Generation."

For Prospective Students (English / Japanese / Top)

We accommodate graduate school students studying in the following courses attached to the School of Engineering, The University of Tokyo, Tokyo, Japan: (2015-03-31)

TypeMajorAdmissionEntrance ExaminationType of ExaminationCourseNationalityExam. Info.
ADepartment of Electrical Engineering and Information Systems (EEIS)Oct. 2016, Apr. 2017(Schedule-A)
Aug. 2016
Written Exams and Interview in TokyoMS and PhDJapanese and Non-JapaneseInfo@

Lab News (English / Japanese / Top)

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Urayama-san wins a best paper award of IEEJ special issue. 2016-06-29
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Ito-kun publishes a paper in Optics Express. 2016-06-04
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The Lab joins Research Campus Open House. 2016-06-03
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Dr. Yong's device is published in IEEE EDL. 2016-05-22
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Integrated MEMS Workshop of JSAP is held at RCAST, UTokyo. 2016-05-20
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A review paper on TFT for MEMS is published. 2016-03-24
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Dr. M. Goto's paper wins a best paper awards. 2016-03-19
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We throw a farewell/welcome party for lab members. 2016-03-18
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Dr. Cheng publishes a design of IR emitter. 2016-03-14
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RF-MEMS VCO wins a paper award.2016-03-01
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Organizes IEEE MEMS 2016 in Shanghai.2016-01-28
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Lab faculty joins with a workshop with AICT Seoul National University. 2016-01-05
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Visitors from Nobeoka High School on their school excursion.2015-12-07
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MEMS energy harvester is granted a CREST budget.2015-11-20
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Mitsuya-san with a NEDO Project wins a poster award.2015-10-30

Distribution (English / Japanese / Top)

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A part of the JSAP version of technological history and near-future roadmap on MEMS and NEMS is available (in Japanese only). 1MB, 2010-03-18A PDF copy of "MEMS Spatial Light Modulator" contributed to Ubiquitous Laser Display (OITDA) is available for lab members only. 1MB, 2010-03-01A PDF copy of "Electrostatic Actuation" contributed to Elsevier Comprehensive Microsystems is available for lab members only. 3.1MB, 2008-05-01
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A PDF copy of "SOI MEMS Actuator" is available (in Japanese). 10MB, 2005-08-23An at-a-glance chart for silicon properties is available now for your study. 789kB, 2011-04-01MEMS simulation package on electrical circuit simulator Qucs is distributed. 2015-04-03

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© Optomechatronics Lab of Prof. Hiroshi TOSHIYOSHI (Micromachine System Engineering) within the CIRMM, IIS, the University of Tokyo

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*1 CIRMM = Centre for Interdisciplinary Research on Micro-Nano Methods
*2 IIS = Institute of Industrial Science
*3 RF-MEMS = Radio Frequency MEMS
*4 Japan Society for the Promotion of Science
*5 EU-FP7 = European Union 7th Framework Programme
*6 EUJO-LIMMS = Europe-Japan Opening of LIMMS
*7 LIMMS = Laboratory for Integrated Micro Mechatronic Systems, LIMMS/CNRS-IIS (UMI-2820)

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