Research/Programmable MEMS PZT Resonator Array

プログラマブルＭＥＭＳ-ＰＺＴ共振子アレイ
Programmable MEMS PZT Resonator Array†

• Coming soon to IIS Open House 2013 (May 31 - June 1).

参考文献
References†

1. Nicolas Lafitte, "DIGITALLY PROGRAMMABLE RESONATOR BY PZT-SOI PROCESS," in Proc. 17th Int. Conf on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), Barcelona, Spain, June 16-20, 2013.

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