2019-02-18 (月) 00:12:44 (542d)

MEMSAURS (メムザウルス)



MEMSAUR is our lab mascot. It is made of silicon processed by the DRIE*1. The MEMSAUR's eye is a MEMS optical scanner driven by the electrostatic force, like an optical scanner used in laser display. Its tong is also an electrostatic actuator that vibrates at a resonant frequency. Electrical interconnections are made by the surface texture scales to its legs, where electrical wirebonds are made.

*1 Deep Reactive Ion Etching