Research/Programmable MEMS PZT Resonator Array

2019-02-17 (日) 23:42:34 (243d)

プログラマブルMEMS-PZT共振子アレイ
Programmable MEMS PZT Resonator Array

  • Coming soon to IIS Open House 2013 (May 31 - June 1).
PZTresonators1.png

参考文献
References

  1. Nicolas Lafitte, "DIGITALLY PROGRAMMABLE RESONATOR BY PZT-SOI PROCESS," in Proc. 17th Int. Conf on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), Barcelona, Spain, June 16-20, 2013.