Research/Programmable MEMS PZT Resonator Array
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プログラマブルMEMS-PZT共振子アレイ
Programmable MEMS PZT Resonator Array
†
Coming soon to IIS Open House 2013 (May 31 - June 1)
.
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参考文献
References
†
Nicolas Lafitte, "DIGITALLY PROGRAMMABLE RESONATOR BY PZT-SOI PROCESS," in Proc. 17th Int. Conf on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), Barcelona, Spain, June 16-20, 2013.
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Last-modified: 2019-02-17 (日) 23:42:34