Sensors and MaterialsからMEMSプロセス特集号が発行されました。
Special issue on MEMS process is online available at Sensors and Materials.
- Sensors and Materials: Special Issue on Advanced Microfabrication Processes for MEMS/NEMS
- Ten Sekiguchi, Hidetaka Ueno, Vivek Anand Menon, Ryo Ichige, Yuya Tanaka, Hiroshi Toshiyoshi, and Takaaki Suzuki, "UV-curable PDMS Photolithography and Its Application for Flexible Mechanical Metamaterials," Sensors and Materials, vol. 35, no. 6(2), 2023, pp. 1995-2011. https://doi.org/10.18494/SAM4351
- Gen Hashiguchi and Hiroshi Toshiyoshi, "An Electret MEMS Vibration Energy Harvester with Reconfigurable Frequency Response," Sensors and Materials, vol. 35, no. 6(2), 2023, pp. 1957-1983. https://doi.org/10.18494/SAM4367
- Hiroaki Honma, Sho Ikeno, and Hiroshi Toshiyoshi, "MEMS Electrostatic Energy Harvester Developed by Simultaneous Process for Anodic Bonding and Electret Charging," submitted to Sensors and Materials, vol. 35, no. 6(2), 2023, pp. pp. 1941-1955. https://doi.org/10.18494/SAM4402
Call for Papers
Last-modified: 2023-07-10 (月) 07:46:24