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| Day | Time | Lecture # | Contents |
| Mon | 12:00-13:00 | Lecture 1 | MEMS Introduction (part 1, history) |
| 15:30-16:30 | Lecture 2 | MEMS Introduction (part 2, applications) | |
| Tue | 09:00-11:00 | Lecture 3 | MEMS Process |
| Lecture 4 | Optical MEMS | ||
| 14:30-15:30 | Lecture 5 | Electrostatic Microactuator (part 1, electrostatic force) | |
| Wed | 09:00-11:00 | Lecture 6 | Electrostatic Microactuator (part 2, bending beam theory) |
| Lecture 7 | RF-MEMS (part 1, switch) | ||
| RF-MEMS (part 2, tunable capacitor) | |||
| 16:30-17:30 | Lecture 8 | Printed MEMS | |
| Thu | 09:00-11:00 | Lecture 9 | Integrated MEMS |
| Lecture 10 | Simulation Exercise on PC | ||
| Fri | 09:00-11:00 | Final Exam | Total 10 Questions |
| 16:30-17:00 | Motivation Lecture for ECE 2011 Undergraduate, Student Technical Festival | ||
2024-04-28 (日) 11:50:55
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