Research/Optical Crossconnect by Electromagnetic Torsion Mirrors

2008-05-08 (木) 22:49:29 (4446d)

Electromagnetic Operation


We improved our electrostatic type switch to develop an electromagnetically operated fiber optic switch. A magnetic FeNi film was deposited on the mirror to make it controllable in a magnetic field. V-grooves were formed by the self-alignment technique to the mirror. Total size was reduced for faster switching speed and lower insertion loss.

Electromagnetically Latchable State Control


The mirror could be latched at the ON or OFF states without a constant supply of energy thanks to the residual magnetism in the coil core used for the electromagnetic operation of the mirror.


  1. Daisuke Miyauchi, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Self-Alignment Fabrication Technique Surface-Micromachined Optical Switches to Bulk-Micromachined V-Grooves," Trans. IEE Japan, vol. 119-E, No. 2 (1999) pp.108-112.
  2. Hiroshi Toshiyoshi, Daisuke Miyauchi, Hiroyuki Fujita, "Electromagnetic Torsion Mirrors for Self-Aligned Fiber Optic Cross-connectors by Silicon Micromachining," IEEE Journal of Selected Topics in Quantum Electronics (JSTQE), special issue on Micro-Opto-Electro Mechanical Systems (MOEMS), vol.5, No.1 (1999), pp.10-17.