Research/MEMS Flexible Display

2019-02-18 (月) 00:10:20 (542d)

Flexible Electric Poster using Plastic MEMS



Another type of image display under development is a Fabry-Perot interferometer color pixel using a thin film of PEN (polyethylene naphthalate) layered over a ticker PEN sheet with an air gap trapped inside. Electrostatic attraction force close the air gap to make an interferometric color for the transmission light.

Thee Primary Colors



The color is pre-determined by the thickness of the silicon oxide layer over the semi-transparent metal electrodes. Thanks to the flexibility of the PEN films, the color pixel sheet can operate on a curved surface. We have successfully developed three primary colors (red, green, and blue). Color purity today is relatively poor compared with that of the conventional CRT (cathode ray tube); it will be improved by altering the layer combination and thicknesses.

Color Pixel in Electrostatic Operation



  1. Y. Taii, A. Higo, H. Fujita and H. Toshiyoshi, "Electrostatically Controlled Transparent Display Pixels by PEN-Film MEMS", IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland.
  2. SPIE News Room (in pdf fileSPIE_NR_flex.pdf)