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MEMS Metamaterial Microwave Waveguide

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Metamaterial concept was actually established for more than four decades but it has been only experimentally and practically investigated for RF, microwave and millimeterwave circuits in the past 5 years. In parallel to this, MEMS concept has been intensively applied to the microwave area and implemented on silicon to take benefit from its micromachining ability toward RF-MEMS. Beyond these research works on RF-metamaterial and RF-MEMS, there are huge potentialities of mixing these two concepts: to integrate metamaterial on silicon and also add reconfigurable ability thanks to MEMS concept.

In a fundamental point of view, this project will increase the knowledge of material engineering for microwave applications, not using chemical or physicochemical ways, but by exploiting sub-wavelength periodically microstructuration of the silicon.

From an applied engineering point of view, this project will contribute to enhance the microwave performances and the functionalities of systems, which integrate metamaterial-based circuits on silicon and exploit its potentialities in terms of micromachining and electromechanically tunability.

Contact

Dr. David Dubuc with LIMMS/CNRS-IIS UMI-2820 is currently a principal investigator on this project with lab staff and students, and his project is in operation within the framework of the LIMMS program.


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Last-modified: Wed, 28 May 2008 23:49:53 JST (3463d)