#author("2019-12-10T05:06:15+00:00","default:hiroshi","hiroshi") #author("2020-01-16T07:02:53+00:00","default:hiroshi","hiroshi") MEMS Sensing Network System 2020 Jan 29 - 31, Tokyo Bigsite https://www.optojapan.jp/mems/ja/ https://unifiedsearch.jcdbizmatch.jp/nanotech2020/jp/sem/aap/seminar_details/v39yRRnswdQ#A29157586