#author("2023-06-27T00:26:19+00:00","default:hiroshi","hiroshi")
#author("2023-07-06T12:46:38+00:00","default:hiroshi","hiroshi")
*Sensors and MaterialsからMEMSプロセス特集号が発行されました。&br;Special issue on MEMS process is online available at '''Sensors and Materials'''.&br;2023-06-27 [#oa192479]

-Sensors and Materials: Special Issue on Advanced Microfabrication Processes for MEMS/NEMS
--https://sensors.myu-group.co.jp/index.php?vol=35&no=6&sub_no=2

#ref(https://sensors.myu-group.co.jp/image/SM3300.jpg,zoom,300x300)



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