![[PukiWiki]](image/XYstage.jpg "[PukiWiki]")
name : Daisuke Yamane
course : Electrical & Electronics Engineering Course (first year of Ph.D course)
RF-MEMS switch for Active Phased Array Antenna
key word
{RF-MEMS, MEMS switch, phase shifter, SPDT, ohmic-contact, SOI bulk-micromachining, electrostatic actuator, electroplating, HFSS, etc)
Department of Electrical Engineering,
Institute of industrical Science, The University of Tokyo
4-6-1 Komaba Meguro-ku 153-8505, Tokyo, Japan
Ski (Alpine ski, Racing)
