Research/Self-Assembled Vertical Comb-Drive Actuator
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開始行:
*Self-assembled vertical comb-drive actuator [#of6dc4f3]
#ref(Research/Fiber Optic Endoscope with an Optically Mod...
MEMS researchers usually try to avoid the "process sticti...
#clear
*Initial offset of vertical comb drive mechanism by using...
#ref(SAVCprocess.png,left,wrap,around,30%)
The SEM picture (top) is a MEMS scanner with the vertical...
#clear
*Reference [#ca27c5df]
+K. Isamoto, T. Makino, A. Morosawa, C. Chong, H. Fujita,...
//#ref(2_311.pdf.tgz)
+See also [[Research/Fiber Optic Endoscope with an Optica...
----
HT 2006-05-07
終了行:
*Self-assembled vertical comb-drive actuator [#of6dc4f3]
#ref(Research/Fiber Optic Endoscope with an Optically Mod...
MEMS researchers usually try to avoid the "process sticti...
#clear
*Initial offset of vertical comb drive mechanism by using...
#ref(SAVCprocess.png,left,wrap,around,30%)
The SEM picture (top) is a MEMS scanner with the vertical...
#clear
*Reference [#ca27c5df]
+K. Isamoto, T. Makino, A. Morosawa, C. Chong, H. Fujita,...
//#ref(2_311.pdf.tgz)
+See also [[Research/Fiber Optic Endoscope with an Optica...
----
HT 2006-05-07
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