Research/NEXT Poster Report (English Text)
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開始行:
Funding Program for Next Generation World-Leading Researc...
Integrated MEMS Technology for Multi-functional Low Power...
PI: Hiroshi Toshiyoshi, RCAST, The University of Tokyo
//#contents
*Contribution of This Work [#bb4adab5]
**1. Background and Scope [#n62f6401]
Integrated MEMS is a technology to assemble microscopic "...
Integrated MEMS is expected to be an enabling power for t...
For this reason, this study focuses onto the standardizat...
**2. Design Platform for Integrated MEMS (Equivalent Circ...
FEM is a powerful tool for MEMS but is also difficult to ...
''Reference'': T. Konishi, K. Machida, S. Maruyama, M. Mi...
**3. Fabrication Process for Integrated MEMS (Post CMOS M...
As a multi-purpose process for integrated MEMS, we have d...
The process capability has been verified by demonstrating...
Another demonstration has been made to prove an idea to u...
''Reference'': M. Mita, M. Ataka, and H. Toshiyoshi, “Mic...
**4. Multi-User Integrated MEMS Processes (Wafer Shuttle ...
It would cost a lot if one place an order of VLSI wafer f...
''Reference'': NTT~AT (0.18, 0.35 and 0.6 um), VDEC Rohm ...
*Applications [#o00749e7]
**A. Cognitive Wireless Communication (RF-MEMS Variable C...
Cognitive wireless communication is a way to optimize the...
This work was performed in collaboration with Japan Radio...
''Data'': operation voltage 35V, capacitor range 0.55-0.7...
''Reference'': K. Urayama, K. Akahori, N. Adachi, H. Fuji...
**B. Event/Personal Monitoring (High Sensitive MEMS Accel...
Application field of MEMS accelerometers would go beyond ...
This work was performed in collaboration with NTT Advance...
''Data'': 0.35um CMOS, Vdd = 3.3V, acceleration range 0.5...
''Reference'': T. Konishi, D. Yamane, T. Matsuhsima, K. M...
**C. Micro Display for Everywhere (Laser Scan MEMS Image ...
A focus-less image projector can be constructed by using ...
This work was performed in collaboration with Stanley Ele...
''Data'': scanner drive voltage 40V, image VGA class, ran...
''Reference'': Sungho Jeon, Hiroyuki Fujita, and Hiroshi ...
**D. OCT Medical Inspection Gear (MEMS Tunable Wavelength...
MEMS tunable light source is not limited to the optical f...
This work was performed in collaboration with Santec Corp...
''Data'': scanner operation voltage 70V, scanner resonanc...
''Reference'': K. Isamoto, K. Totsuka, T. Sakai, T. Suzuk...
*Perspective of This Work for 2030 [#x88d4e81]
**Harvesting Unharnessed Energy for Trillion Sensor Era [...
It is said that we will soon see a new era to produce a t...
Power consumption of VLSI is becoming smaller every year ...
*Acknowledgement [#m46b99dd]
This research is granted by the Japan Society for the Pro...
終了行:
Funding Program for Next Generation World-Leading Researc...
Integrated MEMS Technology for Multi-functional Low Power...
PI: Hiroshi Toshiyoshi, RCAST, The University of Tokyo
//#contents
*Contribution of This Work [#bb4adab5]
**1. Background and Scope [#n62f6401]
Integrated MEMS is a technology to assemble microscopic "...
Integrated MEMS is expected to be an enabling power for t...
For this reason, this study focuses onto the standardizat...
**2. Design Platform for Integrated MEMS (Equivalent Circ...
FEM is a powerful tool for MEMS but is also difficult to ...
''Reference'': T. Konishi, K. Machida, S. Maruyama, M. Mi...
**3. Fabrication Process for Integrated MEMS (Post CMOS M...
As a multi-purpose process for integrated MEMS, we have d...
The process capability has been verified by demonstrating...
Another demonstration has been made to prove an idea to u...
''Reference'': M. Mita, M. Ataka, and H. Toshiyoshi, “Mic...
**4. Multi-User Integrated MEMS Processes (Wafer Shuttle ...
It would cost a lot if one place an order of VLSI wafer f...
''Reference'': NTT~AT (0.18, 0.35 and 0.6 um), VDEC Rohm ...
*Applications [#o00749e7]
**A. Cognitive Wireless Communication (RF-MEMS Variable C...
Cognitive wireless communication is a way to optimize the...
This work was performed in collaboration with Japan Radio...
''Data'': operation voltage 35V, capacitor range 0.55-0.7...
''Reference'': K. Urayama, K. Akahori, N. Adachi, H. Fuji...
**B. Event/Personal Monitoring (High Sensitive MEMS Accel...
Application field of MEMS accelerometers would go beyond ...
This work was performed in collaboration with NTT Advance...
''Data'': 0.35um CMOS, Vdd = 3.3V, acceleration range 0.5...
''Reference'': T. Konishi, D. Yamane, T. Matsuhsima, K. M...
**C. Micro Display for Everywhere (Laser Scan MEMS Image ...
A focus-less image projector can be constructed by using ...
This work was performed in collaboration with Stanley Ele...
''Data'': scanner drive voltage 40V, image VGA class, ran...
''Reference'': Sungho Jeon, Hiroyuki Fujita, and Hiroshi ...
**D. OCT Medical Inspection Gear (MEMS Tunable Wavelength...
MEMS tunable light source is not limited to the optical f...
This work was performed in collaboration with Santec Corp...
''Data'': scanner operation voltage 70V, scanner resonanc...
''Reference'': K. Isamoto, K. Totsuka, T. Sakai, T. Suzuk...
*Perspective of This Work for 2030 [#x88d4e81]
**Harvesting Unharnessed Energy for Trillion Sensor Era [...
It is said that we will soon see a new era to produce a t...
Power consumption of VLSI is becoming smaller every year ...
*Acknowledgement [#m46b99dd]
This research is granted by the Japan Society for the Pro...
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