Research/DRIE Wafer Fixed with DP Oil
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開始行:
*DRIE of arbitrary shaped silicon wafer [#a4e42c1a]
#ref(DRIE.png,left,around,wrap,40%)
Most DRIE chambers are equipped with a 4-inch or 6-inch w...
#clear
*Wafer fixed with DP oil [#pdaaee04]
#ref(DPoil.png,left,around,wrap,25%)
First, de-gas the DP oil in vacuum to remove all air trap...
Caution: Do not use fonbrin oil (that is usually used for...
#clear
*Wafer removal [#a827767d]
#ref(removal.png,left,around,wrap,34%)
Using a transparent quartz wafer is good to see the resul...
#clear
*DP oil removal [#he9eb697]
#ref(aceton.png,left,around,wrap,28%)
Do not dip the wafer into acetone but just place it onto ...
#clear
*Reference [#lf2ea25a]
-DP oil used in our work was from ShinEtsu Chemical: HIVA...
-If you think this information useful, please refer in yo...
終了行:
*DRIE of arbitrary shaped silicon wafer [#a4e42c1a]
#ref(DRIE.png,left,around,wrap,40%)
Most DRIE chambers are equipped with a 4-inch or 6-inch w...
#clear
*Wafer fixed with DP oil [#pdaaee04]
#ref(DPoil.png,left,around,wrap,25%)
First, de-gas the DP oil in vacuum to remove all air trap...
Caution: Do not use fonbrin oil (that is usually used for...
#clear
*Wafer removal [#a827767d]
#ref(removal.png,left,around,wrap,34%)
Using a transparent quartz wafer is good to see the resul...
#clear
*DP oil removal [#he9eb697]
#ref(aceton.png,left,around,wrap,28%)
Do not dip the wafer into acetone but just place it onto ...
#clear
*Reference [#lf2ea25a]
-DP oil used in our work was from ShinEtsu Chemical: HIVA...
-If you think this information useful, please refer in yo...
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