Research/Vapor HF Sacrificial Oxide Release with Lab Utensils
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開始行:
*Labware Setup for Vapor HF Release [#j8603176]
#ref(vaporHFsetup.JPG,left,wrap,around,20%)
#ref(setupphoto.JPG,left,wrap,around,28%)
Thermal oxide (or similar pure SiO2) can be removed in va...
#clear
#clear
*Etch Rate [#g87dd196]
#ref(etchrate.JPG,left,around,wrap,40%)
Etchrate seems to be almost equivalent to that of BHF (bu...
#clear
*Release Results [#md043b26]
#ref(releasedcantilevers.JPG,left,around,wrap,29%)
Maximum 1 millimeter long cantilever has been successfull...
#clear
*References [#uadb4aac]
+Yamato Fukuta, Hiroyuki Fujita, and Hiroshi Toshiyoshi, ...
//
+Y. Fukuta, H. Fujita and H. Toshiyoshi, presented at IE...
#ref(fukuta_denkititle.JPG)
終了行:
*Labware Setup for Vapor HF Release [#j8603176]
#ref(vaporHFsetup.JPG,left,wrap,around,20%)
#ref(setupphoto.JPG,left,wrap,around,28%)
Thermal oxide (or similar pure SiO2) can be removed in va...
#clear
#clear
*Etch Rate [#g87dd196]
#ref(etchrate.JPG,left,around,wrap,40%)
Etchrate seems to be almost equivalent to that of BHF (bu...
#clear
*Release Results [#md043b26]
#ref(releasedcantilevers.JPG,left,around,wrap,29%)
Maximum 1 millimeter long cantilever has been successfull...
#clear
*References [#uadb4aac]
+Yamato Fukuta, Hiroyuki Fujita, and Hiroshi Toshiyoshi, ...
//
+Y. Fukuta, H. Fujita and H. Toshiyoshi, presented at IE...
#ref(fukuta_denkititle.JPG)
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