Research/High-Yield Sacrificial Release and Surface Treatment
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開始行:
*Mechanical structure to avoid in-process stiction [#t82d...
#ref(sam3.png,left,around,wrap,50%)
Mechanical contact is sometimes unavoidable in designing ...
#clear
*SAM coating process [#t2cc99eb]
#ref(sam1.png,left,around,wrap,22%)
#ref(sam2.png,left,around,wrap,48%)
From our previous experience in sacrificially releasing s...
#clear
*Quantitative analysis of stiction [#pf82bbe5]
#ref(sam4.png,left,around,wrap,30%)
#ref(sam5.png,left,around,wrap,36%)
As a quantitative measurement of surface stiction force, ...
Neverthless, the best design is a design without mechanic...
#clear
*Reference [#z9daa714]
+Detail information about vapor HF, ozone and HMDS proces...
++泰井祐輔，角嶋邦之，横川隆司，小野志亜之，高橋琢二，諫...
+MSDS of HMDS can be found at, for instance: http://www.j...
終了行:
*Mechanical structure to avoid in-process stiction [#t82d...
#ref(sam3.png,left,around,wrap,50%)
Mechanical contact is sometimes unavoidable in designing ...
#clear
*SAM coating process [#t2cc99eb]
#ref(sam1.png,left,around,wrap,22%)
#ref(sam2.png,left,around,wrap,48%)
From our previous experience in sacrificially releasing s...
#clear
*Quantitative analysis of stiction [#pf82bbe5]
#ref(sam4.png,left,around,wrap,30%)
#ref(sam5.png,left,around,wrap,36%)
As a quantitative measurement of surface stiction force, ...
Neverthless, the best design is a design without mechanic...
#clear
*Reference [#z9daa714]
+Detail information about vapor HF, ozone and HMDS proces...
++泰井祐輔，角嶋邦之，横川隆司，小野志亜之，高橋琢二，諫...
+MSDS of HMDS can be found at, for instance: http://www.j...
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