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*Electrostatic Vertical Comb Drive Actuators [#w56f7a47]
#ref(koshin_mirror.jpg,left,around,wrap,26%)
A torsion mirror with electrstatic vertical comb drive actuators has been developed by using deep RIE on an SOI wafer.

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*Optical Scan Demonstration [#y88e70e2]
#ref(HO_LaserScan.jpg,left,wrap,around,43%)
The mirror shown above is scaning incident light beam with a large optical scan angle of 40 degrees at the resonant frequency of 6 kHz with relatively small voltage 9 Vac.

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*Varialbe Optical Attenuator --- a fiber optic component --- [#oe4ec4e2]
#ref(koshin_VOA.JPG,around,left,wrap,38%)
The mirror is used for an variable optical attenuator (VOA) for fiber optic communications.

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*References [#zb41dfdc]
This work has been done in collaboration with [[Koshin Kogaku Co., Ltd.:http://www.koshin-kogaku.co.jp/English/]]~
Hirosh Obi, Toshio Yamanoi, and Hiroshi Toshiyoshi (C) 2004~
[[Conference report on this work (in Japanese):http://toshi.fujita3.iis.u-tokyo.ac.jp/toshilab_j/index.php?cmd=read&page=%B9%F1%C6%E2%B3%D8%B2%F1%C8%AF%C9%BD&word=%A5%D0%A1%BC%A5%C6%A5%A3%A5%AB%A5%EB%A1%A6%A5%B3%A1%BC%A5%E0%B7%BF%A5%C8%A1%BC%A5%B7%A5%E7%A5%F3%A5%DF%A5%E9%A1%BC%A4%CE%BF%E5%CA%BF%CC%CC%C6%E2%B0%C2%C4%EA%B2%BD]]