![[PukiWiki]](image/XYstage.jpg "[PukiWiki]")
#author("2019-02-17T15:13:52+00:00","default:hiroshi","hiroshi") *OXC (Optical Cross Connect) by Micro 2D Lens Scanner [#x53a61de] #ref(OXCmechanism.jpg,left,around,wrap,50%) #multilang(en_US){{ Microlens can be used as an optical scanner when it has XY motion capability; fine motion is for fiber-collimator offset alignment, and coarse motion is for inter-channel switch. Optical simulation has predicted that a micro lens of 1-mm-focal-length may switch a light to an output port located at a 20 cm distance with a 2 mm inter-channel pitch, by using a 20-um-lens displacement. }} #multilang(ja_JP){{ マイクロレンズをXY平面で駆動すると自由空間光スキャナとして用いることができます．特に，光ファイバ用のスイッチとして組み込むことにより，レンズの微小駆動によって光学アラインメントの調整が可能になり，また，レンズの粗動によってチャネル間の光スイッチ動作もできます．光学解析によると，焦点距離１mmのマイクロレンズを２０cmの間隔で対向配置した場合，光ファイバピッチ２mm間のスイッチングを行うにはレンズを２０μmだけ機械的に駆動すればよいことがわかります． }} Microlens can be used as an optical scanner when it has XY motion capability; fine motion is for fiber-collimator offset alignment, and coarse motion is for inter-channel switch. Optical simulation has predicted that a micro lens of 1-mm-focal-length may switch a light to an output port located at a 20 cm distance with a 2 mm inter-channel pitch, by using a 20-um-lens displacement. #clear *Micro XY Stage Mechanism [#h00d5a70] #ref(johnnyscanner1.jpg,left,around,wrap,53%) #multilang(en_US){{ The developed silicon micro lens 2D scanner has a double gimbal XY-stage using electrostatic comb drive mechanism for the 2D motion with relatively low driving voltage (~40V). The color of the suspension shows three different voltages (for GND, voltage to the +X comb electrode and to the -X comb electrode). }} #multilang(ja_JP){{ シリコン製のマイクロレンズを２次元駆動するために，櫛歯型の静電アクチュエータで動くダブル・ジンバルXYステージを開発しました（駆動電圧40V）．駆動のための電圧は，アクチュエータを機械的に支持するサスペンションを経由して与えられます． }} The developed silicon micro lens 2D scanner has a double gimbal XY-stage using electrostatic comb drive mechanism for the 2D motion with relatively low driving voltage (~40V). The color of the suspension shows three different voltages (for GND, voltage to the +X comb electrode and to the -X comb electrode). #clear *Micro XY Stage by SOI Micromachining [#m1fb5a22] #ref(johnnyscanner2.jpg,left,around,wrap,42%) #multilang(en_US){{ The SEM picture shows the fabricated 2D micro lens scanner. The inner stage has a thin silicon micro lens (3um sag) with four pairs of folded-suspensions (2.0um wide, 500um long) and electrostatic comb drive actuators. }} #multilang(ja_JP){{ 左の電子顕微鏡写真は実際に製作したレンズ型の２次元光スキャナです．内部のステージには，高低差３ミクロンのシリコンレンズが形成されており，幅２ミクロン，長さ５００ミクロンの折れ曲がりサスペンションは，櫛歯型静電アクチュエータによって柔軟に駆動されます． }} The SEM picture shows the fabricated 2D micro lens scanner. The inner stage has a thin silicon micro lens (3um sag) with four pairs of folded-suspensions (2.0um wide, 500um long) and electrostatic comb drive actuators. #clear *Contact Investigators [#g75b486f] Kazuhiro Takahashi and Ho Nam Kwon #clear *References [#id464130] +Kazuhiro Takahashi, Kunihiko Saruta, Makoto Mita, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "An Optical Scanner with Electrostatic Comb Drive XY-Stage," COLOR(#0000ff){IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications} (Optical MEMS 2004), Takamatsu, Japan, Aug. 22-26, 2004, pp. 56-57.
