*Micro Motherboard and Micro Connectors [#gfd736ca]
#ref(connectorSEM.GIF,left,around,wrap,40%)
Sensors, actuators, and integrated circuits made of different materials and by different processes can be assembled with this micro connector technique. The edge of a functional module is shaped into connector patterns, and is inserted into the slots of the micro motherboard. Chips can be plugged in and out several times like conventional connectors.
#clear
*Implementation [#v712e5db]
#ref(maleconnector.GIF,left,around,wrap,80%)
"Micro motherboard" with "micro connectors" of up to 6 slots, connector width 50 and 100 micron, length 200 microns, pitch 200 microns, contact resistance less than 0.2 Ohm/contact, stray capacitance 50pF, connect reinforced by electroplating of gold or copper.
#clear
*Rerefences [#w0eb25cb]
+Hiroshi Toshiyoshi, Yoshio Mita, Minoru Ogawa, Hiroyuki Fujita, "SILICON MICRO MOTHERBOARDS FOR THREE-DIMENSIONAL ASSEMBLING OF MICRO SYSTEMS," T.IEE Japan, 116-E(6), (1998), pp.444-448.
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+Hiroshi Toshiyoshi, Yoshio Mita, Minoru Ogawa, Hiroyuki Fujita, "Micro Electrical Connectors by Silicon Anisotropic Etching," Seisan-Kenkyu (Monthly Journal of Institute of Industrial Science, University of Tokyo) vol. 49, No.12 (1997) pp.14-16.
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+Hiroshi Toshiyoshi, Yoshio Mita, Minoru Ogawa, Hiroyuki Fujita, "Chip-Level Three-Dimensional Assembling of Microsystems," 1999 SPIE conference on Micromachining and Microfabrication, 30 March - 1 April, 1999, Paris, France., Presented by H. Fujita
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