Top > Research
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  • Research へ行く。

//[[Top Page]]

&aname(pagetop);
*&multilang(ja_JP){光MEMSとRF-MEMS研究};&multilang(en_US){Optical & RF-MEMS Research Activities}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#pagetop]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#pagetop]] / [[Top>[[Research]]]])}; [#o25ce98d]
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&multilang(ja_JP){年吉研究室は、東京大学生産技術研究所のマイクロナノメカトロニクス国際研究センターに所属しているMEMSの研究室です。MEMSとはMicro Electro Mechanical Systemsの略で、1ミリメートル程度の微小な機械構造を半導体プロセス等を用いて製作し、それをさまざまな方面に応用する研究です([[こちら>[[What is MEMS?/Introduction]]]]にMEMSのイントロがあります)。年吉研究室ではMEMSデバイスの設計理工学、MEMSプロセスの研究開発、MEMS技術の微小光学応用とRF(Radio Frequency) 高周波通信応用に取り組んでいます。最近の研究成果のサンプルは、[[先端研ニュース記事>[[News/2015-02-20]]]]をご覧下さい。};&multilang(en_US){We are a MEMS research group of Professor Hiroshi TOSHIYOSHI within the CIRMM (Center for International Research on Micronano Mechatronic Systems) located at the Institute of Industrial Science, the University of Tokyo.  MEMS -- Micro Electro Mechanical System(s) -- is a concept of making small mechanical machines of 1 millimeter or smaller by mainly using the semiconductor micro fabrication technology.  We study the design and fabrication techniques of MEMS for micro optics, nanophotonics, and radio-wave applications. Latest samples of our research activity could be found at [[News/2015-02-20]].};

// &br;&multilang(ja_JP){&color(White,Red){&size(10){<Eng>};}; = English Version Available.};


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|&multilang(ja_JP){凡例};&multilang(en_US){Legend};|(&color(Red){Year Start};-) = &multilang(ja_JP){現在実施中};&multilang(en_US){On-Going};&br;(&color(Aqua){Year Start};-&color(Aqua){Year End};) = &multilang(ja_JP){一時停止中};&multilang(en_US){Pending};&br;(&color(black){Year Start};-&color(black){Year End};) = &multilang(ja_JP){終了};&multilang(en_US){Completed};|



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&aname(CREST);
*&multilang(ja_JP){戦略的創造研究推進事業(CREST)「[[微小エネルギーを利用した革新的な環境発電技術の創出>http://www.jst.go.jp/kisoken/crest/research_area/ongoing/bunyah27-2.html]]」領域課題「エレクトレットMEMS振動・トライボ発電」(&color(Red){2015〜2019};)};&multilang(en_US){"Electret MEMS Vibrational Triboelectric Generation" in operation with the CREST-JST program "[[Scientific Innovation for Energy Harvesting Technology>http://www.jst.go.jp/kisoken/crest/en/research_area/ongoing/areah27-2.html]]" (&color(Red){2015-2019};)}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#CREST]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#CREST]] / [[Top>[[Research]]]])}; [#wa073d8e]

#ref(EH2016-05-25.png,right,around,nolink,zoom,150x150)
#ref(News/2017-06-22/2017-06-22B.png,right,around,nolink,zoom,150x150)
//#ref(EH2016-05-25.png,right,around,nolink,zoom,150x150)

#multilang(ja_JP){{
本研究では、次世代の無線センサノードに必要な10mW級の自立電源を実現するために、MEMS技術とイオン材料技術を駆使して、環境の振動から未利用エネルギーを回収する振動発電素子(エナジーハーベスタ)の基礎研究に取り組みます。特に、固体中のイオンを用いたエレクトレット(永久電荷)による静電誘導現象の解明と、イオン液体電気二重層キャパシタを用いた新規デバイスを開発します。

-[[JSTフェア2017ポスター>[[News/2017-08-31]]]]
}}
#multilang(en_US){{
We study on energy harvesters that produce electrical power from environmental vibrations through the MEMS (micro electro mechanical systems) mechanisms combined with ionic material technology, thereby targeting a 10 mW class power package needed for wireless sensor nodes of the next generation. A novel energy-harvesting device is developed by using the static induction current from electret (permanent charge) which is coupled with an electrical double-layer capacitor of ionic liquid.

-[[JST-Fair 2017 Poster>[[News/2017-08-31]]]]
}}

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&aname(MEH);
*&multilang(ja_JP){NEDOエネルギー・環境新技術先導プログラム(&color(Red){2015〜2016年度};)課題「[[トリリオンセンサ社会を支える高効率MEMS振動発電デバイスの研究>[[Research/NEDO-MEH]]]]」};&multilang(en_US){NEDO Energy & Environment Program "[[A Study on High Efficiency MEMS Micro Energy Harvesters for Trillion Sensor Society>[[Research/NEDO-MEH]]]]" (&color(Red){FY2015-2016};)}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#MEH]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#MEH]] / [[Top>[[Research]]]])}; [#b1aab270]
//
#ref(MEHroadmap_2015-03-03.png,around,right,zoom,300x300)
//
#multilang(ja_JP){{
2015年3月から2017年2月までの予定で、独立行政法人新エネルギー・産業技術総合開発機構(NEDO)の[[エネルギー・環境新技術先導プログラム>http://www.nedo.go.jp/koubo/CA3_100049.html?from=nedomail]]による「トリリオンセンサ社会を支える高効率MEMS振動発電デバイスの研究」プロジェクトを実施中です。
-[[研究紹介ポスター(NEDOパンフレットより)>[[Research/NEDO-MEH/Poster 2015]]]]
}}
#multilang(en_US){{
"[[A Study on High Efficiency MEMS Micro Energy Harvesters for Trillion Sensor Society>[[Research/NEDO-MEH]]]]" is currently operated as a national project adopted by the New Energy and Industrial Technology Development Organization (NEDO) between March 2015 and February 2017.
-[[Project Poster (from NEDO pamphlet)>[[Research/NEDO-MEH/Poster 2015]]]]
}}


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&aname(NEXT);
*&multilang(ja_JP){日本学術振興会/内閣府 最先端・次世代研究開発支援プログラム(2011〜2013年度)};&multilang(en_US){Funding Program for Next Generation World-Leading Researchers (NEXT Program), Japan Society for the Promotion of Science (JSPS) (FY2011-2013)}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#NEXT]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#NEXT]] / [[Top>[[Research]]]])}; [#ka4f7905]
//
#ref(saisentan.png,nolink,left,50%)
#ref(Research/NEXT Overview/yuheonchip3.png,around,right,nolink,zoom,150x150)
//
&multilang(ja_JP){2011年2月から2014年3月までの期間、日本学術振興会の[[最先端・次世代研究開発支援プログラム>http://www.jsps.go.jp/j-jisedai/index.html]]による「集積化MEMS技術による機能融合・低消費電力エレクトロニクス」プロジェクトを実施しました。};&multilang(en_US){A project titled "Multi-functional Low Power Electronics by Integrated MEMS Technology" has been performed in the lab, supported by [[the NEXT Program of the JSPS>http://www.jsps.go.jp/j-jisedai/index.html]] initiated by the Council for Science and Technology Policy (CSTP), from February 2011 through March 2014.};

-&multilang(ja_JP){[[研究成果報告>[[Research/NEXT Poster Report]]]]};&multilang(en_US){[[Output Report>[[Research/NEXT Poster Report]]]]}; (2014-03-01)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
-&multilang(ja_JP){[[研究全体の説明>[[Research/NEXT Overview]]]]};&multilang(en_US){[[Overview>[[Research/NEXT Overview]]]]}; (&color(black){2011};-&color(black){2014};)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[回路シミュレータLTSpiceを用いたCMOS−MEMSのためのマルチフィジクス解析手法>[[Research/Multi-physics Analysis for MEMS based on Electrical Circuit Simulator Spice]]]]};&multilang(en_US){[[Multi-physics Analysis for MEMS based on Electrical Circuit Simulator LTSpice>[[Research/Multi-physics Analysis for MEMS based on Electrical Circuit Simulator Spice]]]]}; (&color(Red){2008};-)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[回路シミュレータQucsを用いたMEMS解析手法>[[DAIQ]]]]};&multilang(en_US){[[MEMS Analysis  based on Electrical Circuit Simulator Qucs>[[DAIQ]]]]}; (&color(black){2008};-&color(Black){2016};)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[低消費電力エレクトロニクスのためのMEMSパワーゲートスイッチ>[[Research/MEMS Power Gate Switch for Low Power Electronics]]]]};&multilang(en_US){[[MEMS Power Gate Switch for Low Power Electronics>[[Research/MEMS Power Gate Switch for Low Power Electronics]]]]}; (&color(black){2010};-2013)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[MEMS可変容量による800MHz帯VCO>[[Research/MEMS Voltage Control Oscillator]]]]};&multilang(en_US){[[Voltage Conrolled Oscillator in 800 MHz Band using MEMS Tunable Capacitors>[[Research/MEMS Voltage Control Oscillator]]]]}; (&color(black){2010};-2013)
//
-&multilang(ja_JP){[[プログラマブルMEMS-PZT共振子アレイ>[[Research/Programmable MEMS PZT Resonator Array]]]]};&multilang(en_US){[[Programmable MEMS PZT Resonator Array>[[Research/Programmable MEMS PZT Resonator Array]]]]}; (&color(black){2011};-2013)
//
-&multilang(ja_JP){[[MEMS技術を用いたオールインワンポータブルOCTシステム>[[Research/All-in One Portable MEMS OCT System]]]]};&multilang(en_US){[[All-in-One type OCT Measurement System>[[Research/All-in One Portable MEMS OCT System]]]]}; (&color(Red){2010};-)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[光駆動型MEMSマイクロミラーによる光ファイバ内視鏡>[[Research/Fiber Optic Endoscope with an Optically Modulated Micro Mirror]]]]};&multilang(en_US){[[Fiber Optic Endoscope with an Optically Modulated Micro Mirror>[[Research/Fiber Optic Endoscope with an Optically Modulated Micro Mirror]]]]}; (&color(black){2005-2012};)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};

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&aname(KAST);
*&multilang(ja_JP){(財)神奈川科学技術アカデミー(KAST)光メカトロニクスプロジェクト(2005〜2007年度)};&multilang(en_US){KAST Optomechatronics Project (FY2005-2007)}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#KAST]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#KAST]] / [[Top>[[Research]]]])}; [#m9e22f78]
//
#ref(kastlogo.png,nolink,left,around)
#ref(Research/Optically Actuated Cantilever with Built-in Photovoltaic Cells/photovoltaic2.png,around,right,nolink,zoom,150x150)
//
&multilang(ja_JP){2005年4月から2008年3月の3年間、当研究室は財団法人神奈川科学技術アカデミー(KAST)の「光メカトロニクス」プロジェクトを運営しました。このプロジェクトでは、光とマイクロ/ナノメカの相互作用を切り口とした新しいMEMS応用の研究を行いました。};&multilang(en_US){A part of our optical MEMS research activities have been supported by the institute KAST (Kanagawa Academy of Science and Technology)'s three-year funding program "Optomechatronics" from April 2005 to March 2008.  In this program, we pursued the fundamental and application research of optical MEMS devices & systems in which light interacts with micro/nano mechanical structures.};

-&multilang(ja_JP){[[KAST光メカトロニクス・プロジェクトの全体構想>[[Research/KAST Optomechatronics Concept]]]]};&multilang(en_US){[[KAST Optomechatronics Concept>[[Research/KAST Optomechatronics Concept]]]]}; (2005-2008)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[光駆動型MEMSマイクロミラーによる光ファイバ内視鏡>[[Research/Fiber Optic Endoscope with an Optically Modulated Micro Mirror]]]]};&multilang(en_US){[[Fiber Optic Endoscope with an Optically Modulated Micro Mirror>[[Research/Fiber Optic Endoscope with an Optically Modulated Micro Mirror]]]]}; (&color(black){2005};-2012)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[液中レーザブレイクダウン・プラズマを用いた3次元画像ディスプレィ>[[Research/Three-Dimensional Image Display using Laser Breakdown Plasma in Water]]]]};&multilang(en_US){[[Three-Dimensional Image Display using Laser Breakdown Plasma in Water>[[Research/Three-Dimensional Image Display using Laser Breakdown Plasma in Water]]]]}; (2006-2009)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[集積化光電変換素子による光駆動カンチレバー>[[Research/Optically Actuated Cantilever with Built-in Photovoltaic Cells]]]]};&multilang(en_US){[[Optically Actuated Cantilever with Built-in Photovoltaic Cells>[[Research/Optically Actuated Cantilever with Built-in Photovoltaic Cells]]]]}; (2006-2008)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
//-&multilang(ja_JP){AFM型データストレージ用の上下2方向駆動MEMSカンチレバー};&multilang(en_US){Bidirectional MEMS Cantilever Array for AFM-type Data Storage Application}; (2006-2008)
//
//-[[財団法人神奈川科学技術アカデミーのプロジェクト説明ページへ>http://www.newkast.or.jp/innovation/project/toshiyoshi_project.html]]
//-See [[KAST Optomechatronics Project>http://www.newkast.or.jp/innovation/project/toshiyoshi_project.html]]

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&aname(RF);
*&multilang(ja_JP){RF-MEMSとマイクロ波〜テラヘルツ帯メタマテリアル};&multilang(en_US){RF-MEMS and Microwave ~ Terahertz Metamaterials}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#RF]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#RF]] / [[Top>[[Research]]]])}; [#p44b4801]
//
#ref(iconRF.jpg,left,nolink,around,50%)
#ref(Photo Monthly/varicap20121222.png,around,right,nolink,zoom,150x150)
//#ref(Photo Monthly/THzMtM1-20013-05-01.png,around,right,nolink,32%)
//
&multilang(ja_JP){RF-MEMS応用として、マイクロメカニカル周波数フィルタ(共振器)の新しい検出方法や、RF-MEMSスイッチに取り組んでいます。};&multilang(en_US){RF (radio frequency) is our new target application of MEMS technology such as band pass filters and waveguide switches, where microwave devices of low insertion loss and high channel isolation are needed.  Unlike most solid-state devices, MEMS approaches are expected to deliver benefits in terms of such device perfomance.};

-&multilang(ja_JP){MEMS技術による可変メタマテリアル・アンテナ};&multilang(en_US){Variable Metamaterials Antenna based on MEMS Technology}; (&color(aqua){2012};-)
-&multilang(ja_JP){[[MEMS技術によるTHz帯可変メタマテリアル>[[Research/Tunable Terahertz Metamaterial Based on MEMS Technology]]]]};&multilang(en_US){[[Tunable Terahertz Metamaterial Based on MEMS Technology>[[Research/Tunable Terahertz Metamaterial Based on MEMS Technology]]]]}; (&color(Red){2011};-)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[MEMS可変容量による800MHz帯VCO>[[Research/MEMS Voltage Control Oscillator]]]]};&multilang(en_US){[[Voltage Conrolled Oscillator in 800 MHz Band using MEMS Tunable Capacitors>[[Research/MEMS Voltage Control Oscillator]]]]}; (&color(black){2010};-2013)
//
-&multilang(ja_JP){[[機能レイヤ分離設計によるSOI−RF−MEMS受動素子に関する研究>[[Research/Monolithic Integration of Microwave Passive Devices with RF-MEMS]]]]};&multilang(en_US){[[Monolithic Integration of Microwave Passive Devices with RF-MEMS>[[Research/Monolithic Integration of Microwave Passive Devices with RF-MEMS]]]]}; (2006-2011)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[マイクロ波帯メタマテリアル導波路>[[Research/RF-MEMS Metamaterials]]]]};&multilang(en_US){[[RF-MEMS Metamaterials>[[Research/RF-MEMS Metamaterials]]]]}; (2007-2009)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[5.8GHz移相器用RF-MEMSスイッチ>[[Research/RF-MEMS Switch for 5.8GHz Phase Shifter]]]]};&multilang(en_US){[[RF-MEMS Switch for 5.8GHz Phase Shifter>[[Research/RF-MEMS Switch for 5.8GHz Phase Shifter]]]]}; (2003-2010)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[真空マイクロエレクトロニクスによる周波数フィルタ>[[Research/RF Bandpass Filters by Micro Vacuum Electronics]]]]};&multilang(en_US){[[RF Bandpass Filters by Micro Vacuum Electronics>[[Research/RF Bandpass Filters by Micro Vacuum Electronics]]]]}; (2004-2007)
//
//-[[Research/SOI-Bulkmicromachined MEMS SPST Switch using Electroplated Metal-to-Metal Contact]] (2003-2010)
//-[[Research/RF-MEMS Switch for 12GHz Band]]
//-[[12GHz帯RF-MEMSスイッチ>[[Research/RF-MEMS Switch for 12GHz Band]]]] (2006-)
//-SOIバルクマイクロマシニングによるメッキ金属接点型RF-MEMSスイッチ (2003-2010)
//[[Research/SOI-Bulkmicromachined MEMS SPST Switch using Electroplated Metal-to-Metal Contact]]]]

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&aname(display);
*&multilang(ja_JP){MEMS画像ディスプレィ};&multilang(en_US){MEMS for Image Display}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#display]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#display]] / [[Top>[[Research]]]])}; [#o3fe0bd4]
//
#ref(iconDISP.jpg,nolink,left,around,50%)
#ref(Research/MEMS Optical Scanner for Laser Projection Image Display/palmtop.png,around,right,nolink,zoom,150x150)
//
&multilang(ja_JP){MEMS技術による光変調器は画像ディスプレィに応用可能です。たとえば、MEMS光スキャナはレーザ描画型の画像ディスプレィに使われます。また、MEMS回折格子はレーザ描画ディスプレィの光強度を調整する機構に使われます。光の干渉には、バックライトからの光を着色する効果があります。また、MEMS光スキャナを用いた3次元ディスプレィを実証研究を行っています。};&multilang(en_US){Optical modulation by means of MEMS can also be used for image display. For instance, a MEMS scanning mirror is used in the laser projection display.  A MEMS grating is used as a light valve for such laser projector. Optical interference (Fabry-Perot interferometer) can change the color of transmissive light.  We also demonstrated a 3D-display using MEMS optical scanners.};

-&multilang(ja_JP){レーザー描画型インタラクティブ画像ディスプレィ};&multilang(en_US){Interactive Image Display based on Spatial Laser Modulator}; (&color(Red){2012};-)
//
-&multilang(ja_JP){[[画像ディスプレィ用MEMS光スキャナへの応用 >[[Research/MEMS Optical Scanner for Laser Projection Image Display]]]]};&multilang(en_US){[[MEMS Optical Scanner for Laser Projection Image Display>[[Research/MEMS Optical Scanner for Laser Projection Image Display]]]]}; (&color(black){2011};-2015)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[MEMS画像ディスプレィ用圧電光スキャナ>[[Research/MEMS Optical Scanners for Projection Display]]]]};&multilang(en_US){[[MEMS Optical Scanners for Projection Display>[[Research/MEMS Optical Scanners for Projection Display]]]]}; (2002-2010)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[液中レーザブレイクダウン・プラズマを用いた3次元画像ディスプレィ>[[Research/Three-Dimensional Image Display using Laser Breakdown Plasma in Water]]]]};&multilang(en_US){[[Three-Dimensional Image Display using Laser Breakdown Plasma in Water>[[Research/Three-Dimensional Image Display using Laser Breakdown Plasma in Water]]]]}; (2006-2009)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[3次元画像ディスプレィ用ハイパワーハンドリングMEMS光スキャナ>[[Research/MEMS High-Power Handling Optical Scanner for 3D Display]]]]};&multilang(en_US){[[MEMS High-Power Handling Optical Scanner for 3D Display>[[Research/MEMS High-Power Handling Optical Scanner for 3D Display]]]]}; (2006-2009)
//
-&multilang(ja_JP){ピッチ可変型MEMSライトバルブ回折格子};&multilang(en_US){MEMS Pitch-Tunable Grating}; (2006-2009)
//
-&multilang(ja_JP){[[フレキシブルMEMS画像ディスプレィ>[[Research/MEMS Flexible Display]]]]};&multilang(en_US){[[MEMS Flexible Display>[[Research/MEMS Flexible Display]]]]}; (2004-2011)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};

//■■■■■■■■■■■■■■■■■■■■■■■■
&aname(iMEMS);
*&multilang(ja_JP){集積化MEMS};&multilang(en_US){Integrated MEMS}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#iMEMS]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#iMEMS]] / [[Top>[[Research]]]])}; [#i6b7d298]
//
#ref(iconIC.jpg,nolink,left,around,50%)
#ref(Research/MEMS Gratings Integrated with High Voltage Level Shifters/integratedgrating.png,around,right,nolink,zoom,150x150)
//
&multilang(ja_JP){本来MEMSとはマイクロエレクトロニクスとマイクロメカニクスの融合したシステムのことですが、加速度センサやディスプレー用ミラーアレイなどをのぞけば、電気機械系が本当の意味で集積化された例は少ないのが実情です。本研究室では、マイクロアクチュエータ系とその駆動回路系を容易に集積化するためのプラットフォーム技術開発に取り組んでいます。};&multilang(en_US){MEMS is a concept in a real sense that electronics and mechanics are integrated in a small space.  Such examples are, however, difficult to name today except highly advanced commercial MEMS products such as accelerometers and micromirror displays.  In this project, we are developing a platform technology of high-voltage driver circuits that could be monolithically integrated with post-processed microactuators.  This new technology will open up a easy access to potential MEMS designers who would like to have their microactuators operated with a co-existing monolithic drivers.};

-&multilang(ja_JP){[[高電圧レベルシフタ回路とMEMS回折格子の集積化>[[Research/MEMS Gratings Integrated with High Voltage Level Shifters]]]]};&multilang(en_US){[[MEMS Gratings Integrated with High Voltage Level Shifters>[[Research/MEMS Gratings Integrated with High Voltage Level Shifters]]]]}; (2006-2009)
//
-&multilang(ja_JP){データストレージ用MEMS/NEMS構造};&multilang(en_US){Micro-Nano Mechanical Structure for Data Storage}; (2005-2007, &color(black){2010};-&color(black){2013};)
//
-&multilang(ja_JP){[[MEMSアクチュエータとアナログ高電圧駆動回路のモノリシック集積化>[[Research/Monolithic Integration of Microactuators with High Voltage Driver Circuits]]]]};&multilang(en_US){[[Monolithic Integration of Microactuators with High Voltage Driver Circuits>[[Research/Monolithic Integration of Microactuators with High Voltage Driver Circuits]]]]}; (2003-2009)
//
-&multilang(ja_JP){[[MEMSアクチュエータの制御回路の集積化>[[Research/Monolithic Integration of Control Circuitry with MEMS Actuators]]]]};&multilang(en_US){[[Monolithic Integration of Control Circuitry with MEMS Actuators>[[Research/Monolithic Integration of Control Circuitry with MEMS Actuators]]]]}; (2005-2010)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};


//■■■■■■■■■■■■■■■■■■■■■■■■
&aname(fiber);
*&multilang(ja_JP){MEMS技術の光通信応用};&multilang(en_US){MEMS for Fiber-optic Applications}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#fiber]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#fiber]] / [[Top>[[Research]]]])}; [#s2eaed16]
//
#ref(iconFIBER.jpg,nolink,left,around,50%)
#ref(Research/MEMS Tunable Wavelength Selective Filter/cubes.png,around,right,nolink,zoom,150x150)
//
&multilang(ja_JP){本研究室はMEMSの光ファイバ通信応用を出発点にして発足しました。光ファイバ通信は、一本の光ファイバ内に4、8、16波…の波長の異なる光をまとめて通す波長多重通信に移行しつつあります。光ファイバ通信分野には、スイッチ、クロスコネクト、波長選択スイッチ、可変減衰器など、MEMS技術の応用先がいろいろと考えられています。};&multilang(en_US){This is the origin where we started various optical MEMS projects.  Fiber optic communication system today is shifting toward more advanved ones using multiple wavelengths called wavelength division multiplex (WDM), and there are a plenty of rooms in which MEMS approaches is useful, such as fiber optic switches and crossconnects (OXC), wavelength selective switches (WSS), variable optial attenuators (VOA), and fiber dispersion compensators.};


-&multilang(ja_JP){[[MEMS波長選択フィルタ>[[Research/MEMS Tunable Wavelength Selective Filter]]]]};&multilang(en_US){[[MEMS Tunable Wavelength Selective Filter>[[Research/MEMS Tunable Wavelength Selective Filter]]]]}; (2005-2010)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[くしば型静電アクチュエータを用いたMEMS可変減衰器>[[Research/MEMS Variable Optical Attenuator with Vertical Comb Drive Mechanism]]]]};&multilang(en_US){[[MEMS Variable Optical Attenuator with Vertical Comb Drive Mechanism>[[Research/MEMS Variable Optical Attenuator with Vertical Comb Drive Mechanism]]]]}; (2002-2008)
//
-&multilang(ja_JP){[[平行平板型静電アクチュエータを用いたMEMS可変減衰器>[[Research/MEMS Variable Optical Attenuator with Parallel-Plate Tilt Mirror]]]]};&multilang(en_US){[[MEMS Variable Optical Attenuator with Parallel-Plate Tilt Mirror>[[Research/MEMS Variable Optical Attenuator with Parallel-Plate Tilt Mirror]]]]}; (&color(black){2002};-2010)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[光スイッチ用電磁駆動型マイクロトーションミラー>[[Research/Optical Crossconnect by Electromagnetic Torsion Mirrors]]]]};&multilang(en_US){[[Optical Crossconnect by Electromagnetic Torsion Mirrors>[[Research/Optical Crossconnect by Electromagnetic Torsion Mirrors]]]]}; (1996-1998)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[光ファイバスイッチ用静電マイクロミラー>[[Research/Microtorsion Mirrors for Fiber Optical Crossconnect]]]]};&multilang(en_US){[[Microtorsion Mirrors for Fiber Optical Crossconnect>[[Research/Microtorsion Mirrors for Fiber Optical Crossconnect]]]]}; (1995-1997)

//■■■■■■■■■■■■■■■■■■■■■■■■
&aname(newMEMS);
*&multilang(ja_JP){新機能光MEMS};&multilang(en_US){New Functional Optical MEMS}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#newMEMS]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#newMEMS]] / [[Top>[[Research]]]])}; [#h5d96aa9]
//
#ref(iconNEW.jpg,nolink,left,around,50%)
#ref(Research/Fiber Optic Endoscope with an Optically Modulated Micro Mirror/endoscopescanner.png,nolink,around,right,zoom,150x150)
//
&multilang(ja_JP){光通信応用以外にも、いろいろな光MEMS技術を開発しています。たとえば、光によって駆動できるマイクロミラーを用いて、別の光を制御する新しい微小光学システムを研究中です。また、フォトニック結晶光導波路とMEMSアクチュエータを組み合わせた光変調器にも取り組んでいます。};&multilang(en_US){Besides the optical MEMS projects for fiber network, we have divergently investigate potential applications.  Our latest results include optically-controlled MEMS, which coulld be used to have mechano-optic interaction in a micro space to create new functional device.  We also have challenged integration of MEMS actuator onto a photonic bandgap crystal waveguide to make a ultra small light wave circuits with high efficiency modulators and switches.};

-&multilang(ja_JP){[[MEMS技術を用いたオールインワンポータブルOCTシステム>[[Research/All-in One Portable MEMS OCT System]]]]};&multilang(en_US){[[All-in-One type OCT Measurement System>[[Research/All-in One Portable MEMS OCT System]]]]}; (&color(Red){2010};-)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[OCT波長可変光源用の高速MEMS光スキャナ>[[Research/Wavelength Tunable Light Source for the Next Generation OCT System by High-speed MEMS Optical Scanner]]]]};&multilang(en_US){[[Fast MEMS Scanner for OCT Tunable Wavelength LD>[[Research/Wavelength Tunable Light Source for the Next Generation OCT System by High-speed MEMS Optical Scanner]]]]}; (&color(Red){2009};-)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){プラズモン制御MEMSカラーピクセル};&multilang(en_US){Plasmon Phonic MEMS for Tunable Color Pixels}; (&color(Aqua){2009};-&color(Aqua){2011};)
//
-&multilang(ja_JP){[[光駆動型MEMSマイクロミラーによる光ファイバ内視鏡>[[Research/Fiber Optic Endoscope with an Optically Modulated Micro Mirror]]]]};&multilang(en_US){[[Fiber Optic Endoscope with an Optically Modulated Micro Mirror>[[Research/Fiber Optic Endoscope with an Optically Modulated Micro Mirror]]]]}; (&color(black){2005};-2010)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[MEMS・NEMSフォトニック結晶光導波路デバイス>[[Research/MEMS-NEMS Photonic Crystal Devices]]]]};&multilang(en_US){[[MEMS-NEMS Photonic Crystal Devices>[[Research/MEMS-NEMS Photonic Crystal Devices]]]]}; (2002-2008)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
//-&multilang(ja_JP){[[光制御型静電駆動マイクロミラー>[[Research/Optically Assisted Electrstatic Actuators]]]]};&multilang(en_US){[[Research/Optically Assisted Electrstatic Actuators]]}; (2003-2010)

//■■■■■■■■■■■■■■■■■■■■■■■■

&aname(LargeArea);
*&multilang(ja_JP){大面積MEMS};&multilang(en_US){Large Area MEMS}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#LargeArea]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#LargeArea]] / [[Top>[[Research]]]])}; [#xb17498d]
//
#ref(iconR2R.jpg,nolink,left,around,50%)
#ref(Research/MEMS Flexible Display/flexible.png,around,right,nolink,zoom,150x150)
//
&multilang(ja_JP){半導体プロセスはフォトマスクやウエハのサイズによって、できあがりのデバイス寸法に上限があります。その一方で、印刷技術による製法では幅数センチメートルのフレキシブル資料から、新聞紙のような大判のウェブ(紙)を取り扱うことも可能です。ここでは、薄いプラスチックフィルム上にグラビア印刷、フレキソ印刷、インクジェット印刷等を施すことによりMEMS構造を製作する手法と、その応用研究を紹介します。};&multilang(en_US){While the overall system size is limited by the photomasks or wafers used in the semiconductor microfabrication, large area system can be produced by printing technique. We investigate the fabrication process for large area MEMS by using gravure, flexo, and ink-jet printing technique, as well as its applications including electronic signage.};

-&multilang(ja_JP){大面積MEMS技術によるTHz帯メタマテリアル};&multilang(en_US){Large Area MEMS for THz Metamaterial}; (&color(Red){2012};-)
//
-&multilang(ja_JP){[[インクジェット・プリントによる大面積MEMS>[[Research/Large Area MEMS by Ink-jet Printing]]]]};&multilang(en_US){[[Large Area MEMS by Ink-jet Printing>[[Research/Large Area MEMS by Ink-jet Printing]]]]}; (2009-2011, &color(Red){2013};-)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[プラスチックMEMS技術を用いたフレキシブル電子ポスター>[[Research/MEMS Flexible Display]]]]};&multilang(en_US){[[Flexible Display>[[Research/MEMS Flexible Display]]]]}; (2004-2010)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};

#clear

//■■■■■■■■■■■■■■■■■■■■■■■■
&aname(astronomy);
*&multilang(ja_JP){MEMS技術の天文学・宇宙応用};&multilang(en_US){MEMS for Astronomy}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#astronomy]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#astronomy]] / [[Top>[[Research]]]])}; [#u11d45b0]
//
#ref(iconSTAR.jpg,nolink,left,around,50%)
#ref(Photo Monthly/shutters.png,around,nolink,right,zoom,150x150)
//
&multilang(ja_JP){非常に小さなマイクロ機械が、「光年」スケールの天文分野にも使われています。本研究室では、東京大学理学部天文センターと共同で、天体望遠鏡の近赤外分光器に搭載するマイクロシャッタアレイを製作し、銀河進化などの理論天文学に役立つ天文観測装置の要素部品を研究開発しています。};&multilang(en_US){It would be interesting to know a "micro" mechanical device could be used for astronotic applications, which is usually measured in a unit of "light year."  We have a joint project with the astronotic center of the University of Tokyo to develop MEMS shutters that would be used in an astronotic infrared telescope.};

-&multilang(ja_JP){MEMSレーザレンジファインダ};&multilang(en_US){MEMS Laser Range Finder}; (&color(black){2006};-2010)
//
-&multilang(ja_JP){[[天文分光用マイクロシャッタアレイ>[[Research/Electrostatically Addressable Visored Shutter Array by Electroplating for Astronomical Spectrography]]]]};&multilang(en_US){[[Electrostatically Addressable Visored Shutter Array by Electroplating for Astronomical Spectrography>[[Research/Electrostatically Addressable Visored Shutter Array by Electroplating for Astronomical Spectrography]]]]}; (&color(Red){2010};-)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[天文分光用MEMSシャッタアレイ>[[Research/MEMS Microshutters for Infrared Astronomical Observatory]]]]};&multilang(en_US){[[MEMS Microshutters for Infrared Astronomical Observatory>[[Research/MEMS Microshutters for Infrared Astronomical Observatory]]]]}; (2003-2009)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};

//■■■■■■■■■■■■■■■■■■■■■■■■
&aname(tora);
*&multilang(ja_JP){SOIーMEMSアクチュエータの新設計概念};&multilang(en_US){Topologically Layer Switching Architecture for MEMS (TOLASUM)}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#tora]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#tora]] / [[Top>[[Research]]]])}; [#o7a7c096]
//
#ref(iconTOLA.jpg,nolink,left,around,50%)
#ref(Research/TOLASUM/tolachip.png,around,nolink,right,zoom,150x150)
//
&multilang(ja_JP){従来のSOI-MEMSでは、SOI層にアクチュエータの電気的機能と機械的能が集中していたので、無理のある設計をせざるを得ないことがありました。本研究では、SOI-基板間を簡単に電気的接続する方法(スティクションバー)を開発し、SOI層と基板層を用途にあわせて使い分ける手法を開発しました。};&multilang(en_US){Electrical and mechanical functions are integrated into the SOI layer in the conventional SOI-MEMS technology, and hence MEMS designer sometimes experience difficulty in designing devices without compromizing.  We newly invented a simple and effective method of making electrical interconnection between the SOI and the substrate layers.  Mechanical and electrical functions can be thus allocated in either the SOI and the substrate layer in an ad hoc manner.};

-&multilang(ja_JP){TOLASUM Z};&multilang(en_US){TOLASUM Z}; (2006-2009)
-&multilang(ja_JP){[[レイヤースイッチ設計トポロジーの新概念>[[Research/TOLASUM]]]]};&multilang(en_US){[[Topological Layer Switch for Universal Microstructure>[[Research/TOLASUM]]]]}; (2005-2009)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};

//■■■■■■■■■■■■■■■■■■■■■■■■
&aname(actuator);
*&multilang(ja_JP){光MEMSのためのアクチュエータ};&multilang(en_US){MEMS Actuators and Mechanisms for Optical MEMS Applications}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#actuator]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#actuator]] / [[Top>[[Research]]]])}; [#a75e3074]
//
#ref(iconMECH.jpg,nolink,left,around,50%)
#ref(Research/MEMS High-Power Handling Optical Scanner for 3D Display/hybridmirror.png,around,right,nolink,zoom,150x150)
//
&multilang(ja_JP){本研究室は、シリコンマイクロアクチュエータの開発に基礎を置いています。光応用向けのさまざまなアクチュエータを開発しています。};&multilang(en_US){The backbone of our research is the developing capability of silicon micro actuators, mainly electrostatic types, which could be used to spatially modulate light beams in free space.};

-&multilang(ja_JP){[[ハイパワーハンドリング可能なMEMS光スキャナ>[[Research/MEMS High-Power Handling Optical Scanner for 3D Display]]]]};&multilang(en_US){[[MEMS High-Power Handling Optical Scanner for 3D Display>[[Research/MEMS High-Power Handling Optical Scanner for 3D Display]]]]}; (2007-2009)
//
-&multilang(ja_JP){[[表面張力を利用した自動組立型垂直くしば型静電アクチュエータ>[[Research/Self-Assembled Vertical Comb-Drive Actuator]]]]};&multilang(en_US){[[Self-Assembled Vertical Comb-Drive Actuator>[[Research/Self-Assembled Vertical Comb-Drive Actuator]]]]}; (2002-2005)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[静電駆動アクチュエータの解析モデル>[[DAIQ]]]]};&multilang(en_US){[[MEMS Design and Analysis Interface to Qucs>[[DAIQ]]]]}; (&color(Red){2008};-)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[マイクロメカニカル構造を用いた微小変位のデジタル/アナログ変換器>[[Research/Micro Mechanical Digital-Analog Converter (MEMDAC)]]]]};&multilang(en_US){[[Micro Mechanical Digital-Analog Converter (MEMDAC)>[[Research/Micro Mechanical Digital-Analog Converter (MEMDAC)]]]]}; (1998-1999)
//
-&multilang(ja_JP){[[マイクロXYステージ駆動型シリコン製マイクロレンズ>[[Research/Micro XY-stage for 2D Lens Scanner]]]]};&multilang(en_US){[[Micro XY-stage for 2D Lens Scanner>[[Research/Micro XY-stage for 2D Lens Scanner]]]]}; (2003-2006)
//&multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[シリコンレンズ光スキャナ>[[Research/Silicon Bulk Lens Scanners]]]]};&multilang(en_US){[[Silicon Bulk Lens Scanners>[[Research/Silicon Bulk Lens Scanners]]]]}; (2002-2006)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[光クロスコネクト応用フォトレジストレンズ型光スキャナ>[[Research/Photoresist Micro Lens Scanner for Optical Crossconnect]]]]};&multilang(en_US){[[Photoresist Micro Lens Scanner for Optical Crossconnect>[[Research/Photoresist Micro Lens Scanner for Optical Crossconnect]]]]}; (1999-2001)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};

//■■■■■■■■■■■■■■■■■■■■■■■■
&aname(fab);
*&multilang(ja_JP){シリコンマイクロマシニング};&multilang(en_US){Silicon Micro Fabrication}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#fab]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#fab]] / [[Top>[[Research]]]])}; [#j27e1a05]
//
#ref(iconFAB.jpg,nolink,left,around,50%)
#ref(Research/Vapor HF Sacrificial Oxide Release with Lab Utensils/releasedcantilevers.JPG,around,right,nolink,zoom,150x150)
//
&multilang(ja_JP){MEMSプロセスの基本として、さまざまなシリコン・マイクロマシニング技術、ノウハウを開発しています。};&multilang(en_US){Silicon micro fabrication is the commonly essential part of our projects.  Most techniques are "a sort of" classified as "know-how," but we will show some useful skills here.};

-&multilang(ja_JP){[[化学実験器具でできる蒸気フッ酸によるリリース法>[[Research/Vapor HF Sacrificial Oxide Release with Lab Utensils]]]]};&multilang(en_US){[[Vapor HF Sacrificial Oxide Release with Lab Utensils>[[Research/Vapor HF Sacrificial Oxide Release with Lab Utensils]]]]}; (2004-2005)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[表面化学改質によるスティクションの低減>[[Research/High-Yield Sacrificial Release and Surface Treatment]]]]};&multilang(en_US){[[High-Yield Sacrificial Release and Surface Treatment>[[Research/High-Yield Sacrificial Release and Surface Treatment]]]]}; (2004-2005)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){高アスペクト比ドライエッチング};&multilang(en_US){High Aspect Ratio Dry Etching}; (&color(black){2002};-2006)
//
-&multilang(ja_JP){[[DPオイルを使ったDRIE中のウエハ固定>[[Research/DRIE Wafer Fixed with DP Oil]]]]};&multilang(en_US){[[DRIE Wafer Fixed with DP Oil>[[Research/DRIE Wafer Fixed with DP Oil]]]]}; (1996-1999)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};


//■■■■■■■■■■■■■■■■■■■■■■■■
&aname(misc);
*&multilang(ja_JP){そのほか};&multilang(en_US){Miscellaneous}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#misc]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#misc]] / [[Top>[[Research]]]])}; [#kced4fbd]
//
#ref(iconDOOR.jpg,nolink,left,around,50%)
#ref(Research/MEMS Buckling Memory/bistableSEM.png,around,right,nolink,zoom,150x150)
//
&multilang(ja_JP){そのほか、さまざまなちょっと変わったアクチュエータやプロセスを開発しています。};&multilang(en_US){During the past almost ten years, we have produced various "interesting" devices, which may not be directly related to optics.  Here are some examples:};

-&multilang(ja_JP){[[両持ち梁の座屈現象を利用したMEMS型メモリ素子>[[Research/MEMS Buckling Memory]]]]};&multilang(en_US){[[MEMS Buckling Memory>[[Research/MEMS Buckling Memory]]]]}; (2007-2009)
//
-&multilang(ja_JP){[[水晶の圧電性を利用したマクロアクチュエータとその製作法>[[Research/Quartz Micromachining and Piezoelectric Microactuators]]]]};&multilang(en_US){[[Quartz Micromachining and Piezoelectric Microactuators>[[Research/Quartz Micromachining and Piezoelectric Microactuators]]]]}; (1993-1994)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[ハードディスク・ドライブのヘッド位置決め機構用MEMSピギーバックアクチュエータ>[[Research/Electrostatic Microactuators for HDD Piggyback System]]]]};&multilang(en_US){[[Electrostatic Microactuators for HDD Piggyback System>[[Research/Electrostatic Microactuators for HDD Piggyback System]]]]}; (2002-2003)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[シリコン高アスペクト比ドライエッチングによるマイクロコネクタ>[[Research/Micro Connectors by Silicon DRIE]]]]};&multilang(en_US){[[Micro Connectors by Silicon DRIE>[[Research/Micro Connectors by Silicon DRIE]]]]}; (1996-1997)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[シリコン共振器アレイによる周波数フィルタバンク>[[Research/Multichannel Acoustic Filter Bank]]]]};&multilang(en_US){[[Multichannel Acoustic Filter Bank>[[Research/Multichannel Acoustic Filter Bank]]]]}; (1997-1998)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};

//■■■■■■■■■■■■■■■■■■■■■■■■
&aname(tips);
*&multilang(ja_JP){ヒント集};&multilang(en_US){MEMS Tips for You}; &size(12){([[English:http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=en#tips]] / [[Japanese>http://toshi.iis.u-tokyo.ac.jp/toshilab/?page=Research&cmd=multilang&lang=ja#tips]] / [[Top>[[Research]]]])}; [#v89a7f5e]
//
#ref(iconHINT.jpg,nolink,left,around,50%)
#ref(Hint/Silicon Cube on Your Palm/cube.JPG,around,right,nolink,zoom,150x150)
//
&multilang(ja_JP){MEMS研究に役立つちょっとしたヒント集です。};&multilang(en_US){MEMS is a combination of various disciplines and MEMS biginners might have difficulty to see where to start with.  And yes, so we were.  You may take some hints from our lab experience.};

-&multilang(ja_JP){[[シリコンの結晶異方性を理解するための箱>[[Hint/Silicon Cube on Your Palm]]]]};&multilang(en_US){[[Silicon Cube on Your Palm>[[Hint/Silicon Cube on Your Palm]]]]};
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[静電アクチュエータ用高電圧アンプ(1)ディスクリート組立型>[[Hint/Voltage Amplifier for Operating Electrostatic Microactuators (1) Discrete Parts]]]]};&multilang(en_US){[[Voltage Amplifier for Operating Electrostatic Microactuators (1) Discrete Parts>[[Hint/Voltage Amplifier for Operating Electrostatic Microactuators (1) Discrete Parts]]]]};
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[静電アクチュエータ用高電圧アンプ(2)オペアンプ製>[[Hint/Voltage Amplifier for Operating Electrostatic Microactuators (2) PA-85 or equivalent]]]]};&multilang(en_US){[[Voltage Amplifier for Operating Electrostatic Microactuators (2) PA-85 or equivalent>[[Hint/Voltage Amplifier for Operating Electrostatic Microactuators (2) PA-85 or equivalent]]]]};
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[高電圧レベルシフタ Penny Driver (1)>[[Hint/High Voltage Driver (1) Penny Driver]]]]};&multilang(en_US){[[High Voltage Driver (1) Penny Driver>[[Hint/High Voltage Driver (1) Penny Driver]]]]};
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[高電圧レベルシフタ Penny Driver (2)>[[Hint/High Voltage Driver (2) Improved Penny Driver]]]]};&multilang(en_US){[[High Voltage Driver (2) Improved Penny Driver>[[Hint/High Voltage Driver (2) Improved Penny Driver]]]]};
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[高電圧発生器・コッククロフト-ウォルトン型チャージポンプ>[[Hint/Cockcroft-Walton Charge Pump]]]]};&multilang(en_US){[[Cockcroft-Walton Charge Pump>[[Hint/Cockcroft-Walton Charge Pump]]]]};
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[MEMS特性評価用小型真空チャンバ>[[Hint/Handy Vacuum Chamber for MEMS Characterization]]]]};&multilang(en_US){[[Handy Vacuum Chamber for MEMS Characterization>[[Hint/Handy Vacuum Chamber for MEMS Characterization]]]]}; (2006-07-04)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};
//
-&multilang(ja_JP){[[チョロQ使用真空封止>[[Hint/Home-made Vacuum Seal]]]]};&multilang(en_US){[[Home-made Vacuum Seal>[[Hint/Home-made Vacuum Seal]]]]};
//
-&multilang(ja_JP){[[自家製PCクーラー>[[Hint/Handmade PC Cooler]]]]};&multilang(en_US){Home-made PC Cooler>[[Hint/Handmade PC Cooler]]]]};
//
-&multilang(ja_JP){[[メムザウルス>[[Research/MEMSAURS]]]]};&multilang(en_US){[[MEMSAURS>[[Research/MEMSAURS]]]]}; (2008-05-29)
// &multilang(ja_JP){&color(White,Red){&size(10){<Eng>};};};


//*[[Research Projects by Contracts (MEMBERS-ONLY)]] [#e9abfad3]

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