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#author("2019-02-16T12:08:08+00:00","default:hiroshi","hiroshi") #side(News) #author("2023-09-03T05:16:16+00:00","default:hiroshi","hiroshi") *チェン先生の論文がＪＭＥＭＳに掲載されました。&br;Dr. Cheng's paper is published in JMEMS.&br;2017-11-04 [#l1539ea0] #ref(2017-11-04.png,right,around,zoom,250x250) 中国科学技術院・上海技術物理研究所から研究室に２年間滞在した程正喜（Zhengxi CHENG）先生の論文がＪＭＥＭＳに掲載されました。設計ルール０．３５μｍの標準的なＣＭＯＳプロセスラインを用いて静電駆動型のディジタルマイクロミラーを製作する手法とその評価結果を報告しています。 #clear #ref(2017-12-28A.jpg,right,around,zoom,250x250) Dr. Zhengxi CHENG, an ex-visitor to the lab from Shanghai Institute of Technical Physics, Chinese Academy of Sciences, publishes his work in IEEE/ASME J.MEMS. In this paper, he reports a method to develop electrostatic micro mirror device by using the standard 0.35-µm CMOS process line and the results of electromechanical characterization. #clear #ref(2017-12-28B.jpg,right,around,zoom,250x250) http://ieeexplore.ieee.org/document/8094355/ //#ref(08094355.pdf) &size(9){''Article information:''};~ &size(9){This paper appears in: IEEE/ASME Journal of Microelectromechanical Systems};~ &size(9){''Volume'': <not found> Issue: <not found>};~ &size(9){''Print ISSN'': 1057-7157};~ &size(9){''Online ISSN'': 1941-0158};~ &size(9){''Digital Object Identifier'': 10.1109/JMEMS.2017.2764094};~ //&size(9){''IEEE Author Posting Policy:''}; //&size(9){IEEE seeks to maximize the rights of its authors and their employers to post the author-submitted, peer-reviewed, and accepted manuscript of an article on the author's personal web site or on a server operated by the author's employer. Additionally, IEEE allows its authors to follow mandates of agencies that fund the author's research by posting author-submitted, peer-reviewed, and accepted manuscript of their articles in the agencies' publicly accessible repositories. No third party (other than authors and employers) may post IEEE-copyrighted material without obtaining the necessary licenses or permissions from the IEEE Intellectual Property Rights Office or other authorized representatives of the IEEE.};
