#author("2019-02-16T12:08:08+00:00","default:hiroshi","hiroshi")
#side(News)
#author("2023-09-03T05:16:16+00:00","default:hiroshi","hiroshi")


*チェン先生の論文がJMEMSに掲載されました。&br;Dr. Cheng's paper is published in JMEMS.&br;2017-11-04 [#l1539ea0]

#ref(2017-11-04.png,right,around,zoom,250x250)


中国科学技術院・上海技術物理研究所から研究室に2年間滞在した程正喜(Zhengxi CHENG)先生の論文がJMEMSに掲載されました。設計ルール0.35μmの標準的なCMOSプロセスラインを用いて静電駆動型のディジタルマイクロミラーを製作する手法とその評価結果を報告しています。


#clear

#ref(2017-12-28A.jpg,right,around,zoom,250x250)

Dr. Zhengxi CHENG, an ex-visitor to the lab from Shanghai Institute of Technical Physics, Chinese Academy of Sciences, publishes his work in IEEE/ASME J.MEMS. In this paper, he reports a method to develop electrostatic micro mirror device by using the standard 0.35-µm CMOS process line and the results of electromechanical characterization.

#clear

#ref(2017-12-28B.jpg,right,around,zoom,250x250)

http://ieeexplore.ieee.org/document/8094355/

//#ref(08094355.pdf)

&size(9){''Article information:''};~
&size(9){This paper appears in: IEEE/ASME Journal of Microelectromechanical Systems};~
&size(9){''Volume'': <not found> Issue: <not found>};~
&size(9){''Print ISSN'': 1057-7157};~
&size(9){''Online ISSN'': 1941-0158};~
&size(9){''Digital Object Identifier'': 10.1109/JMEMS.2017.2764094};~

//&size(9){''IEEE Author Posting Policy:''};
//&size(9){IEEE seeks to maximize the rights of its authors and their employers to post the author-submitted, peer-reviewed, and accepted manuscript of an article on the author's personal web site or on a server operated by the author's employer. Additionally, IEEE allows its authors to follow mandates of agencies that fund the author's research by posting author-submitted, peer-reviewed, and accepted manuscript of their articles in the agencies' publicly accessible repositories. No third party (other than authors and employers) may post IEEE-copyrighted material without obtaining the necessary licenses or permissions from the IEEE Intellectual Property Rights Office or other authorized representatives of the IEEE.};

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