#author("2023-08-14T12:14:18+00:00","default:hiroshi","hiroshi") http://www.mems17.org/ The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2017), January 22-26, 2017 Abstracts Deadline: September 13, 2016 Author Notification: October 31, 2016 Author Acceptance Due: November 4, 2016 Manuscript Due: November 22, 2016 #side(Top Page/SideBar)