![[PukiWiki]](image/XYstage.jpg "[PukiWiki]")
*MEMS Metamaterial Microwave Waveguide [#xf168c33] #ref(davidproject.png,left,wrap,around,40%) Metamaterial concept was actually established for more than four decades but it has been only experimentally and practically investigated for RF, microwave and millimeterwave circuits in the past 5 years. In parallel to this, MEMS concept has been intensively applied to the microwave area and implemented on silicon to take benefit from its micromachining ability toward RF-MEMS. Beyond these research works on RF-metamaterial and RF-MEMS, there are huge potentialities of mixing these two concepts: to integrate metamaterial on silicon and also add reconfigurable ability thanks to MEMS concept. In a fundamental point of view, this project will increase the knowledge of material engineering for microwave applications, not using chemical or physicochemical ways, but by exploiting sub-wavelength periodically microstructuration of the silicon. From an applied engineering point of view, this project will contribute to enhance the microwave performances and the functionalities of systems, which integrate metamaterial-based circuits on silicon and exploit its potentialities in terms of micromachining and electromechanically tunability. //#clear //#ref(researchteam.png,left,wrap,around,40%) *Contact [#x7f49014] Dr. David Dubuc with LIMMS/CNRS-IIS UMI-2820 is currently a principal investigator on this project with lab staff and students, and his project is in operation within the framework of the LIMMS program.
