#author("2024-04-06T13:47:37+00:00","default:hiroshi","hiroshi") *応物・集積化MEMS技術シンポジウム優秀論文賞。&br;Paper award of JSAP Integrated MEMS Symposium 2024.&br;2024-03-24 [#q1acbbed] #ref(News/2024-03-24/2024-03-24A.jpg,around,right,zoom,200x200)