#author("2023-08-13T08:39:56+00:00","default:hiroshi","hiroshi") #ref(highlight2006.pdf,[[Research]]) -[[Research/MEMS Microshutters for Infrared Astronomical Observatory]] -[[Research/MEMS-NEMS Photonic Crystal Devices]] -[[Research/RF Bandpass Filters by Micro Vacuum Electronics]] -[[Research/Monolithic Integration of Microactuators with High Voltage Driver Circuits]] -[[Research/TOLASUM]] -[[Research/MEMS Flexible Display]] -[[Research/Fiber Optic Endoscope with an Optically Modulated Micro Mirror]] -[[Research/MEMS Optical Scanners for Projection Display]]