[[Research]] #side(Research/SideBar) #ref(highlight2006.pdf,[[Research]]) -[[Research/MEMS Microshutters for Infrared Astronomical Observatory]] -[[Research/MEMS-NEMS Photonic Crystal Devies]] -[[Research/RF Bandpass Filters by Micro Vacuum Electronics]] -[[Research/Monolithic Integration of Microactuators with Driver Circuits]] -[[Research/TOLASAM]] -[[Research/MEMS Flexible Display]] -[[Research/Fiber Optic Endoscope with an Optically Modulated Micro Mirror]] -[[Research/MEMS Optical Scanners for Projection Display]] -[[Research/RF-Waveguide Switches]]