Hiroshi Obi, Toshio Yamanoi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A Vertical-Comb Torsion Mirror with Distributed Gap for Supressing In-Plane Instability," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2004), Takamatsu, Japan, Aug. 22-26, 2004, pp. 60-61.
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