Hint/Handy Vacuum Chamber for MEMS Characterization の履歴差分(No.1)

• 履歴一覧
• 現在との差分 を表示
• ソース を表示
• 履歴 を表示
• Hint/Handy Vacuum Chamber for MEMS Characterization へ行く。
  • 1 (2008-05-09 (金) 23:16:14)

• 追加された行はこの色です。
• 削除された行はこの色です。

#side(Hint)

*Vacuum Chamber for MEMS Characterization [#cd05b2f5]
#ref(MVC60A.jpg,left,around,wrap,40%)
We have developed a handy vacuum chamber to measure the electromechanical characteristics of MEMS (such as amplitude-voltage, frequency response).  A MEMS chip is set inside the chamber and vacuum evacuated.  The chamber is small enouch (13 cm diameter) to be placed underneath the laser Doppler vibrometer.  It has a glass window through which the MEMS device could be visually observed.

#clear
*Specification [#w658ec0f]
|outer diameter| 130 mm|
|inner diameter| 100 mm|
|chamber depth| 60 mm|
|tubes | 1/4 SUS Swedge Lock|

#clear
*Manufacturer information [#j799caa0]
有限会社ＵＮＩＣＯ~
〒302-0034~
茨城県取手市戸頭1-11-15~
TEL：0297-78-5354~
FAX：0297-78-9383