Hint/Handy Vacuum Chamber for MEMS Characterization の履歴(No.1)

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  • 1 (2008-05-09 (金) 23:16:14)

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Vacuum Chamber for MEMS Characterization†

We have developed a handy vacuum chamber to measure the electromechanical characteristics of MEMS (such as amplitude-voltage, frequency response). A MEMS chip is set inside the chamber and vacuum evacuated. The chamber is small enouch (13 cm diameter) to be placed underneath the laser Doppler vibrometer. It has a glass window through which the MEMS device could be visually observed.

Specification†

Manufacturer information†

有限会社ＵＮＩＣＯ
〒302-0034
茨城県取手市戸頭1-11-15
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