#side(Publication)

Year 2010 (14 papers presented, including 2 invited)†

  1. Katia Grenier, David Dubuc, Paul-Emile Poleni, Momoko Kumemura, Hiroshi Toshiyoshi, Teruo Fujii, Hiroyuki Fujita, "Resonant based microwave biosensor for biological cells discrimination," Paper Digest 2010 IEEE Radio and Wireless Symposium (RWW 2010), pp. 523-526.
  2. T. Konishi, S. Maruyama, T. Matsushima, M. Mita, K. Machida, N. Ishihara, K. Masu, H. Fujita, H. Toshiyoshi, "A SPICE-based Multi-physics Seamless Simulation Platform for CMOS-MEMS," in Proc. 2010 Int. Conf. on Solid State Devices and Materials (SSDM2010), The Univ. of Tokyo, Tokyo, Japan, Sept. 22-24, 2010, G-6-5 (Late News Paper, oral presentation).
  3. H. Yamada, Y. Onozuka, A. Iida, K. Itaya, H. Funaki, K. Takahashi, and H. Toshiyoshi, "A wafer-level system integration technology for flexible pseudo-SOC incorporates MEMS-CMOS heterogeneous devices," IEEE Components, Packaging and Manufacturing Technology (CPMT) Symposium, Aug. 24-26, 2010, Univ. of Tokyo, Tokyo, Japan. (Best Paper Award)
  4. G. Tortissier, C.-Y. Lo, H. Fujita, and H. Toshiyoshi, "Flexible display system based on MEMS Fabry-Perot interferometer," in Proc. IEEE Int. Conf. on Optical MEMS and Nanophotonics, Sapporo Convention Center, Sapporo, Japan, Aug. 9-12, 2010, pp. 75-76.
  5. Taelim Lee, Akio Higo, Hiroyuki Fujita, Yoshiaki Nakano, and Hiroshi Toshiyoshi, "A study on color-tunable MEMS device based on plasmon photonics," in Proc. IEEE Int. Conf. on Optical MEMS and Nanophotonics, Sapporo Convention Center, Sapporo, Japan, Aug. 9-12, 2010, pp.107-108.
  6. S. Maruyama, A. Higo, M. Nakada, K. Takahashi, T. Takahashi, M. Mita, H. Fujita, Y. Nakano, and H. Toshiyoshi, "A mixed-signal analysis for tilted MEMS torsion mirror devices," IEEE Int. Conf. on Optical MEMS and Nanophotonics, Sapporo Convention Center, Sapporo, Japan, Aug. 9-12, 2010, pp. 109-110.
  7. M. Mita, T. Mizuno, M. Ataka, H. Toshiyoshi, "A 2-axis MEMS Scanner for the Landing Laser Radar of the Space Explorer," in Proc. IEEE Int. Conf. on Optical MEMS and Nanophotonics, Sapporo Convention Center, Sapporo, Japan, Aug. 9-12, 2010, pp. 111-112.
  8. D. Yamane, W. Sun, S. Kawasaki, H. Fujita, and H. Toshiyoshi, "A Ku-Band RF-Mems Phase Shifter With SOI Double-Side Bulk-Micromachining Design," in Proc. 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, July 6-9, 2010, Perth, Australia, pp. 68-69.
  9. C. Lo and H. Toshiyoshi, "Low-Cost Visual Curvature Sensor by Interferometer," in Proc. 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, July 6-9, 2010, Perth, Australia, p. 233.
  10. A. Higo, K. Takahashi, M. Nakada, H. Fujita, H. Toshiyoshi, and Y. Nakano, "Parylene Covered Selective Area HF Vapor Release For Silicon Photonic Wire Waveguides," in Proc. 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, July 6-9, 2010, Perth, Australia, p. 168.
  11. Yuheon Yi, Satoshi Maruyama, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "An All-Digital CMOS-MEMS Resonator with PLL Based On Digital Displacement Detection," in Proc. 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, July 6-9, 2010, Perth, Australia, p. 282.
  12. H. Toshiyoshi, "Multi-User-Multi-Chip Integrated MEMS for Micro Optics," in Proc. 15th OptoElectronics and Communications Conference (OECC2010), July 5-9 2010, Sapporo Convention Center, Japan. (invited)
  13. H. Toshiyoshi, "MEMS Actuators for Optical and RF Communication Devices," in Proc. IMAPS/ACerS 6th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2010), OVTA, Chiba, Japan, April 18-21, 2010, p. 22. (invited)
  14. D. Yamane, W. Sun, H. Fujita, H. Toshiyoshi, S. Kawasaki, "Development of a Dual-SPDT RF-MEMS Switch for Ku-band" in Proc. IEEE 2010 Radio and Wireless Symposium (RWS2010), New Orleans, LA, USA, Jan. 10-14, 2010, paper ID WE1A-5.
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Year 2009 (19 papers presented including 2 invited)†

  1. A. Higo, H. Toshiyoshi, H. Fujita, and Y. Nakano, "MEMS Integrated with Silicon Photonic Wire Waveguides," in Proc. 16th Int. Display Workshop (IDW'09), Dec. 9-11, 2009, World Convention Center Summit, Phoenix Seagaia Resort, Miyazaki, Japan, session MEMS3-3. (invited)
  2. S. Maruyama, M. Mita, K. Takahashi, T. Takahashi, H. Fujita, and H. Toshiyoshi, "A Mixed-Signal Equivalent Circuit Model for MEMS Digital Mirror," in Proc. 16th Int. Display Workshop (IDW'09), Dec. 9-11, 2009, World Convention Center Summit, Phoenix Seagaia Resort, Miyazaki, Japan, session MEMS5-4.
  3. B. Charlot, K. Yamashita, W. Sun, H. Fujita, and H. Toshiyoshi, "Field emission displacement gauge for microelectromechanical resonators," in Proc. 2009 Symp. on Design, Test Integration & Packaging of MEMS/MOEMS, April 1-3, 2009, Rome, Italy, p.7.
  4. K. Grenier, D. Dubuc, P.-E. Poleni, M. Kumemura, H. Toshiyoshi, H. Fujii, and H. Toshiyoshi, "New broadband and contact-less RF/microfluidic sensor dedicated to bioengineering," in Proc. IEEE MTT-S Int. Microwave Symp. (MTT), June 7-12, 2009, Boston, USA, pp. 1329-1332.
  5. K. Grenier, D. Dubuc, M. Kumemura, H. Toshiyoshi, and H. Fujita, "Contact-less radio-frequencies biosensor for biological parameters analysis," in Proc. 2nd Int. Conf. on Biomedical Electronics and Devices (BIODEVICES 2009), Porto, Portugal, Jan. 14-17, 2009, pp. 398-401.
  6. D. Dubuc, K. Grenier, H. Fujita, and H. Toshiyoshi, "Micro-fabricated tunable artificial dielectric for reconfigurable microwave circuits," in Proc. 39th European Microwave Conference (EuMC), Rome, Italy, Sept. 20 - Oct. 1, 2009, pp. 520-523.
  7. D. Yamane, K. Yamashita, H. Seita, H. Fujita, H. Toshiyoshi, S. Kawasaki, "A Dual-SPDT RF-MEMS Switch on a Small-Sized LTCC Phase Shifter for Ku-band operation," in Proc. 2009 Asia-Pacific Microwave Conference (APMC 2009), Suntec Singapore International Convention & Exhibition Centre, Singapore, Dec. 7-10, 2009, TU3P-29 (#1719).
  8. Daisuke Yamane, Kiyotaka Yamashita, Harunobu Seita, Hiroshi Toshiyoshi, and Shigeo Kawasaki, "A Prototype of Ku-Band Small-Sized LTCC Phase Shifter with RF-MEMS Switches," in Proc. 2009 Thailand-Japan MicroWave (TJMW2009), King Mongkut’s University of Technology North Bangkok Bangkok, Thailand, August 20-21, 2009, FR7-5.
  9. B. Charlot, K. Yamashita, W. Sun, H. Fujita and H. Toshiyoshi, "Si:H Bistable nanowire For Memory applications," in Proc. 20th Workshop on Micromachining, Micromechanics and Microsystems (MME09), Toulouse, France, September 20-22, 2009, session D04 (ID 175).
  10. K. Takahashi, I. W. Jung, A. Higo, Y. Mita, H. Fujita, H. Toshiyoshi, and O. Solgaard, "A CMOS Compatible Low Temperature Process for Photonic Crystal MEMS Scanner," in Proc. IEEE Optical MEMS and Nanophotonics 2009, Clearwater Beach, Florida, USA, 17-20 August 2009, WB4.
  11. T. Takahashi, S. Maruyama, M. Mita, H. Fujita, and H. Toshiyoshi, "A Mixed-signal Analysis Tool for MOEMS based on Circuit Simulator," in Proc. IEEE Optical MEMS and Nanophotonics 2009, Clearwater Beach, Florida, USA, 17-20 August 2009, ThB1.
  12. A. Higo, K. Takahashi, H. Fujita, Y. Nakano, and H. Toshiyoshi, "A Novel Parylene/Al/Parylene Sandwitch Procetion Mask for HF Vapor Release for Micro Electro Mechanical Systems," in Proc. 15th Int. Conf. on Solid-State Sensors, Actuators & Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25, 2009, pp. 196-199.
  13. S. Maruyama, K. Takahashi, H. Fujita and H. Toshiyoshi, "A MEMS Digital Mirror Array Integrated with High-Voltage Level-Shifter," in Proc. 15th Int. Conf. on Solid-State Sensors, Actuators & Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25, 2009, pp. 2314-2317.
  14. H. Toshiyoshi, "Optical MEMS for Information Technology," in Proc. 15th Int. Conf. on Solid-State Sensors, Actuators & Microsystems (Transducers 2009), Denver, Colorado, USA, June 21-25, 2009, pp. 2198-2201. (invited)
  15. Yuheon Yi, Hiroyuki Fujita and Hiroshi Toshiyoshi, "The dynamic model of electrostatic torsion mirror with pullin consideration for multiphysics behavior anticipation," in Proc. EuroSimE, Delft, The Netherlands, April 27-29, 2009.
  16. Yuheon Yi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Dynamic Model of a Parallel Plate Actuator with Pull-in Consideration for CMOS-MEMS Simultaneous Behavior Anticipation," in Proc. The 15th Workshop on Synthesis And System Integration of Mixed Information Technologies (SASIMI 2009), Pacific Hotel Okinawa, Okinawa, Japan, March 9-10, 2009, pp. 370 - 373
  17. K. Takahashi, M. Mita, M. Nakada, D. Yamane, A. Higo, H. Fujita, and H. Toshiyoshi, “Development of Multi-user Multi-chip SOI CMOS-MEMS processes,” in Proc. 22nd IEEE Int. Conf. on Micro Electro Mechanical Systems, Jan. 25-29, 2009, Sorrento, Italy.
  18. M. Nakada, K. Takahashi, T. Takahashi, A. Higo, H. Fujita and H. Toshiyoshi, “Development of Skewed DRIE Process and its Application to Electrostatic Tilt Mirror,” in Proc. 22nd IEEE Int. Conf. on Micro Electro Mechanical Systems, Jan. 25-29, 2009, Sorrento, Italy.
  19. D. Yamane, H. Seita, W. Sun, S. Kawasaki, H. Fujita and H. Toshiyoshi, “A 12-GHz DPDT RF-MEMS Switch with Layer-wise Waveguide/Actuator Design Technique,” in Proc. 22nd IEEE Int. Conf. on Micro Electro Mechanical Systems, Jan. 25-29, 2009, Sorrento, Italy.
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Year 2008 (19 papers including 1 invited)†

  1. J. S. Park, T. Saraya, K. Miyaji, K. Shimizu, A. Higo, K. Takahashi, Y. H. Yi, H. Toshiyoshi, and T. Hiramoto, "Characteristic modulation of silicon MOSFETs and single electron transistors with a movable gate electrode," in Proc. IEEE 2008 Silicon Nanoelectronics Workshop (SNW 2008).
  2. C.-Y. Lo, O.-H. Huttunen, J. Hiitola-Keinanen, J. Petaja, J. Hast, A. Maaninen, H. Kopola, H. Fujita, and H. Toshiyoshi, "Active Matrix Flexible Display Array Fabricated by MEMS Printing Techniques," in Proc. 15th Int. Display Workshops (IDW '08), Toki Messe Niigata Convention Center, Niigata, Japan, Dec.3-5, 2008, pp. 1353-1356.
  3. Jukka Hast, Olli-Heikki Huttunen, Johanna Hiitola-Keinänen, Jarno Petäjä, Arto Maaninen, Harri Kopola, Chengyao Lo, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Towards large area roll-to-roll manufactured MEMS display," Organic Semiconductor Conference (OSC 08 Europe), Sept. 29 - Oct. 1, 2008, Frankfurt Messe, Fankfurt, Germany.
  4. D. Yamane, T. Yamamoto, K. Urayama, K. Yamashita, H. Toshiyoshi, and S. Kawasaki, "A Phase Shifter by LTCC Substrate with an RF-MEMS Switch," in Proc. 38th European Microwave Conference (EuMC 2008), Amsterdam, Netherlands, Oct. 27-31, 2008.
  5. Kazuhiro Takahashi, Makoto Mita, Hiroyuki Fujita, Kazuhiro Suzuki, Hideyuki Funaki, Kazuhiko Itaya and Hiroshi Toshiyoshi, "A Study on Process-compatibility in CMOS-first MEMS-last Integration," IEEE Custom Integrated Circuits Conference (CICC 2008), Sept. 21-24, 2008, DoubleTree Hotel, San Jose, CA, USA, paper# 6-3.
  6. David Dubuc, Daisuke Yamane, Zhang Rui, Yuheon Yi, Katia Grenier, Hiroyuki Fujita, Hiroshi Toshiyoshi, "Modelling and design guidelines of metamaterial-based artificial dielectric for the miniaturization of microwave passive circuits," Technical session 12, Poster session, Metamaterial2008, Pamplona, Spain, 21-26 September 2008.
  7. C.-Y. Lo, J. Kiitola-Keinanen, O.-H. Huttunen, J. Petaja, J. Hast, A. Maaninen, H. Kopola, H. Fujita, and H. Toshiyoshi, "Novel roll-to-roll lift-off patterned active-matrix display on flexible polymer substrate," 34th Int. Conf. on Micro and Nano Engineering (MNE 2008), Sept. 15-18, 2008, Athens, Greece (PTE - P 11).
  8. Ch.-Y. Lo, H. Fujita, H. Toshiyoshi, "Hydrophilicity control for micro droplet positioning on SiO2 by photolithography process and post chemical treatment," 34th Int. Conf. on Micro and Nano Engineering (MNE 2008), Sept. 15-18, 2008, Athens, Greece (MAN-P05).
  9. Yasutaka Ohira, Aleksandr Checkovskiy, Toshio Yamanoi, Takashi Endo, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A High-Power Handling MEMS Optical Scanner for Display Applications," IEEE/LEOS Int. Conf. on Optical MEMS & Nanophotonics, Freiburg, Germany, Aug. 11-14, 2008 (Tu4.2). *1
  10. C.-Y. Lo, J. Hast, O.-H. Huttunen, J. Petäjä, J. Hiitola-Keinänen, A. Maaninen, H. K. Kopola, VTT, H. Fujita and H. Toshiyoshi, "Low Operation Voltage Non Self-Emissive MEMS Color Filter Pixels," IEEE/LEOS Int. Conf. on Optical MEMS & Nanophotonics, Freiburg, Germany, Aug. 11-14, 2008, (P10).*2
  11. M. Nakada, K. Takahashi, A. Higo, H. Fujita and H. Toshiyoshi, "Design and Fabrication of Parylene-Hinged Slow-Scan Optical Scanner for OCT Endoscope Application," IEEE/LEOS Int. Conf. on Optical MEMS & Nanophotonics, Freiburg, Germany, Aug. 11-14, 2008, (Tu1.5). *3
  12. K. Yamashita, B. Charlot, W. Sun, K. Kakushima, H. Fujita, and H. Toshiyoshi, "Modulation and detection of field-emission current by using MEMS resonator for application to RF-MEMS band-pass filters," in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2008), June 22-25, 2008, TAYIH Landis Hotel, Tainan, Taiwan R.O.C., p. 1D1-2.
  13. Y. Yi, H. Fujita, and H. Toshiyoshi, "Low voltage actuated MEMS switch/relay for power gating application," in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2008), June 22-25, 2008, TAYIH Landis Hotel, Tainan, Taiwan R.O.C., p. 1A1-5.
  14. M. Nakada, H. N. Kwon, C. Chong, A. Morosawa, K. Isamoto, H. Fujita, and H. Toshiyoshi, "Optical coherence tomography based on power-over-fiber MEMS scanner," in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2008), June 22-25, 2008, TAYIH Landis Hotel, Tainan, Taiwan R.O.C., p. 2A2-3.
  15. A. Higo, H. Fujita, H. Toshiyoshi, and Y. Nakano, "Design and fabrication of optical waveguide modulator integrated with silicon wire waveguide," in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2008), June 22-25, 2008, TAYIH Landis Hotel, Tainan, Taiwan R.O.C., p. 2A2-4.
  16. K. Takahashi, M. Mita, H. Fujita, and H. Toshiyoshi, "An SOI-MEMS compatible designing technique of reversed double-deck actuators with interlayer electrical connection," in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2008), June 22-25, 2008, TAYIH Landis Hotel, Tainan, Taiwan R.O.C., p. 1A2-6.
  17. Hiroshi Toshiyoshi, "MEMS for Optical Information Technology," in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2008), June 22-25, 2008, TAYIH Landis Hotel, Tainan, Taiwan R.O.C. (invited)
  18. Jukka Hast, Cheng-Yao Lo, Olli-Heikki Huttunen, Johanna Hiitola-Keinanen, Jarno Petaja, Hiroshi Toshiyoshi, Arto Maaninen, Harri Kopola, and Hiroyuki Fujita, "Towards roll-to-roll manufactured flexible, large scale, and low cost MEMS display," in Proc. the 9th Optics Days 2008, May 8-9, 2008, Technopolis, Kuopio, Finland.
  19. Cheng-Yao Lo, Olli-Heikki Huttunen, Jarno Petaja, Johanna Hiitola-Keinanen, Jukka Hast, Arto Maaninen, Harri Kopola, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Substrate Design Concerns for Printed Flexible Displays," in Proc. the 1st Int. Conf. on R2R Printed Electronics 2008, April 30 - May 2, 2008, Konkuk University, Seoul, Korea.
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Year 2007 (24 papers including 2 invited)†

  1. K. Takahashi, M. Mita, H. Fujita and H. Toshiyoshi, "Topological layer switch technique for monolithically integrated electrostatic XYZ-stage," in Proc. Future Generation Communication and Networking (FGCN 2007), vol. 2, 2007, pp. 651-654.
  2. M. Nakada, C. Chong, K. Isamoto, A. Morosawa, H. Fujita and H. Toshiyoshi, "Design and Fabrication of Silicon Bulk Micromachined Optical Scanner for Medical Endoscope," in Proc. 14th Int. Display Workshop, Sapporo Convention Center, Sapporo, Japan, Dec. 5-7, 2007.
  3. C. Lo, O.-H. Huttunen, J. Petaja, J. Hast, A. Maaninen, H. Kopola, H. Fujita, H. Toshiyoshi, "Novel Printing Processes for MEMS Fabry-Perot Display Pixel," in Proc. 14th Int. Display Workshop, Sapporo Convention Center, Sapporo, Japan, Dec. 5-7, 2007.
  4. A. Chekhovskiy and H. Toshiyoshi, "3-Dimensional Displaying in Liquid," in Proc. 14th Int. Display Workshop, Sapporo Convention Center, Sapporo, Japan, Dec. 5-7, 2007.
  5. C. Lo, O.-H. Huttunen, J. Petaja, J. Hast, A. Maaninen, H. Kopola, H. Fujita, H. Toshiyoshi, "Capability of Realization of Roll-to-Roll Printed MEMS Fabry-Perot Display Pixels," Proc. 2nd Student Conference of Printing Future Days, Technical University of Chemnitz, Germany, Nov. 5-8, 2007, pp. 19-24.
  6. A. Chekhovskiy and H. Toshiyoshi, "3-Dimentional Liquid Display," in Proc. SPIE 6783 (Asia-Pacific Optical Communications, November 1-5, 2007, Wuhan, China, poster 6783-120).
  7. A. Chekhovskiy and H. Toshiyoshi, "3-dimensional displaying in liquid," in Proc. 12th Microoptics Conference (MOC '07), Sunport Takamatsu, Takamatsu, Kagawa, Japan, Oct. 28-31, 2007.
  8. C. Lo, H. Fujita, and H. Toshiyoshi, "MEMS Fabry-Perot Pixels," in Proc. 20th Annnual Meeting of the IEEE/LEOS, Buena Vista Resort & Spa, Lake Buena Vista, Florida, US, Oct. 21-25, 2007. (invited)
  9. H. Toshiyoshi, "MEMS Devices and Technologies for Photonic Network," in Proc. 12th Optoelectronics and Communication Conf. / 16th Int. Conf. on Integrated Optics and Optical Fiber Communication (OECC/IOOC 2007), July 9-13, 2007, Yokohama, Kanagawa, Japan, 13E2-1. (invited)
  10. K. Takahashi, K. Suzuki, H. Funaki, K. Itaya, H. Fujita, and H. Toshiyoshi, “A study on optical diffraction characteristics of skewed MEMS pitch tunable gratings,” in Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Nanophotonics, Aug. 12-16, 2007, Hualien, Taiwan, pp. 175-176.
  11. A. Higo, H. Fujita, Y. Nakano, and H. Toshiyoshi, “Design and fabrication of photonic MEMS waveguide modulators,” in Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Nanophotonics, Aug. 12-16, 2007, Hualien, Taiwan, pp. 173-174.
  12. H. N. Kwon, M. Nakada, Y. Hirabayashi, A. Higo, M. Ataka, H. Fujita, and H. Toshiyoshi, “Bi-directionally driven metal cantilevers developed for optical actuation,” in Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Nanophotonics, Aug. 12-16, 2007, Hualien, Taiwan, pp. 49-50.
  13. Hiroshi Toshiyoshi, Keiji Isamoto, Atsushi Morosawa, Changho Chong, and Hiroyuki Fujita, “Reliability issues of optical MEMS related to device packaging,” European Microelectronics and Packaging Conf. & Exhibition (EMPC 2007), Oulu, Finland, June 17-20, 2007.
  14. Makoto Mita, Kazuhiro Takahashi, Manabu Ataka, Hiroyuki Fujita and Hiroshi Toshiyoshi, “Highly mobile 2D micro impact actuator for space applications,” The 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10 - 14, 2007 (2EC13.P).
  15. Makoto Mita, Manabu Ataka, Tadashi Ishida, Hiroyuki Fujita, and Hiroshi Toshiyoshi, “Frequency transition phenomenon of self-oscillated micro cantilever by changing driving voltage,” The 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10 - 14, 2007 (2EL9.P).
  16. Kazuhiro Takahashi, Makoto Mita, Hiroyuki Fujita, Hiroshi Toshiyoshi, Kazuhiro Suzuki, Hideyuki Funaki, and Kazuhiko Itaya, “Integrating high voltage driver circuits with bulk micromachined actuators,” in Proc. 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10 - 14, 2007, pp. 1329-1332 (2EP9.P).
  17. Toshio Yamanoi, Takashi Endo, and Hiroshi Toshiyoshi, “A hybrid-assembled MEMS Fabry-Perot wavelength tunable filter,” The 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10 - 14, 2007 (3EK10.P).
  18. Tadashi Ishida, Kuniyuki Kakushima, Makoto Mita, Hiroshi Toshiyoshi, and Hiroyuki Fujita, “In-situ TEM observation of crystal facet dependent self-rearranging gold atoms under tensile stress controlled by MEMS nanoprobe positionner,” The 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 10 - 14, 2007 (4C2.2).
  19. H. Kwon, A. Higo, and H. Toshiyoshi, "Chromium-Gold-Chromium Layered Bidirectional Cantilevers by Electro-static and Electro-thermal Actuation," in Proc. 6th Korean MEMS Conf., Jeju, April 6-8, 2007.
  20. Kazuhiro Takahashi, Makoto Mita, Hiroyuki Fujita, Hiroshi Toshiyoshi, "Topological Layer Switch Technique for Monolithically Integrated Electrostatic XYZ-stage," in Proc. 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2007), Jan. 21-25, 2007, Kobe Portopia Hall and Kobe Portopia Hotel, Japan, pp. 651-654 (Poster M33).
  21. Kazuhiro Takahashi, Hiroyuki Fujita, Hiroshi Toshiyoshi, Kazuhiro Suzuki, Hideyuki Funaki, and Kazuhiko Itaya, "Tunable Light Grating integrated with High-voltage Driver IC for Image Projection Display," in Proc. 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2007), Jan. 21-25, 2007, Kobe Portopia Hall and Kobe Portopia Hotel, Japan, pp. 147-150 (TP28).
  22. Edin Sarajlic, Dominique Collard, Hiroshi Toshiyoshi, Hiroyuki Fujita, "12-Bit Microelectromechanical Digital-to-Analog Converter of Displacement: Design, Fabrication and Characterization," in Proc. 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2007), Jan. 21-25, 2007, Kobe Portopia Hall and Kobe Portopia Hotel, Japan (oral).
  23. Masanao Tani, Masahiro Akamatsu, Yoshiaki Yasuda, and Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Two-Axis Piezoelectric Tilting Micromirror with a Newly Developed PZT-meandering Actuator," in Proc. 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2007), Jan. 21-25, 2007, Kobe Portopia Hall and Kobe Portopia Hotel, Japan (Poster M35).
  24. Honam Kwon, Akio Higo, and Hiroshi Toshiyoshi, "Fabrication of Micro-tips by Lift Off Process with Contact Shadow Masking," in Proc. 2nd IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (NEMS 2007), Jan .16-19, 2007, Bangkok, Thailand (Poster 149).
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Year 2006 (18 papers including 2 invited)†

  1. Takahide Mizuno, Makoto Mita, Takuya Takahara, Yusuke Mamada, Norihide Takeyama, Takuya Takahashi, and Hiroshi Toshiyoshi, "Two dimensional scanning LIDAR for planetary explorer," in Proc. MNT for Aerospace Applications, CANEUS 2006.
  2. M. Nakada, H. Fujita, H. Toshiyoshi, C. Chong, K. Isamoto, "Wavelength Division Multiplexing for MEMS-based Fiber Optic Endoscope," Proc. 5th Int. Conf. on Optics-Photonics Design & Fabrication (ODF '06), Dec. 6-8, 2006, Nara-Ken New Public Hall, Nara, Japan. (invited)
  3. Y. Yasuda, M. Tani, M. Akamatsu, and H. Toshiyoshi, "A PZT-actuated 2D optical scanner for MEMS image projection display," Proc. 13th Int. Display Workshop (IDW '06), Otsu, Japan, Dec. 6 - 8, 2006 (MEMS4-3).
  4. R. Shigematsu, D. Tosu, A. Higo, H. Toshiyoshi, and H. Fujita, "Black board type MEMS interactive display," Proc. 13th Int. Display Workshop (IDW '06), Otsu, Japan, Dec. 6 - 8, 2006 (MEMS5-2).
  5. Muneki Nakada, Changho Chong, Keiji Isamoto, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Micro Optomechanical Devices for Medical Endoscope Applications," SPIE Optics East ---Photonics for Applications in Industry, Life Sciences, and Communication---, Oct. 1-4, 2006, Hynes Convention Center, Boston, MA, USA, Optomechatronics Technologies Conference Proc. SPIE Vol. 6376. (invited)
  6. K. Yamashita, W. Sun, B. Charlot, K. Kakushima, H. Fujita, and H. Toshiyoshi, "Time dependence of field-emission current for silicon RF-MEMS applications," Proc. 32nd Int. Conf. on Micro- and Nano-Engieering 2006 (MNE 2006), Barcelona, Spain, Sept. 17-20, 2006 (oral 3A-3).
  7. A. Higo, H. Fujita, and H. Toshiyoshi, "Design and fabrication of optical MEMS modulator with silicon wire waveguide," Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2006), Big Sky Resort, Big Sky, Montana, Aug. 21-24, 2006, poster presentation.
  8. K. Takahashi, H. N. Kwon, M. Mita, K. Saruta, J. H. Lee, H. Fujita, and H. Toshiyoshi, "A 3D optical crossconnect using microlens scanner with topologically layer switch architecture," Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2006), Big Sky Resort, Big Sky, Montana, Aug. 21-24, 2006.
  9. M. Nakada, C. Chong, K. Isamoto, H. Fujita, and H. Toshiyoshi, "Design and fabrication of optical MEMS scanners for optically modulated fiber endoscopes," Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2006), Big Sky Resort, Big Sky, Montana, Aug. 21-24, 2006.
  10. M. Tani, M. Akamatsu, Y. Yasuda, H. Fujita, and H. Toshiyoshi, "A combination of fast resonant mode and slow static deflection of SOI-PZT actuators for MEMS image projection display," Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2006), Big Sky Resort, Big Sky, Montana, Aug. 21-24, 2006.
  11. Y. Taii, A. Higo, H. Fujita, and H. Toshiyoshi, "Color Pixels by Plastic MEMS Technology for Flexible Electronic Display," Proc. Asia Pacific Conference on Transducers and Micro-Nano Technology, June 25-28, 2006, Marina-Mandarin Hotel, Singapore.
  12. T. Takahashi, M. Mita, K. Motohara, N. Kobayashi, N. Kashikawa, H. Fujita, and H. Toshiyoshi, "Electrostatically Addressable Gatefold Micro-shutter Arrays for Astronomical Infrared Spectrograph," Proc. Asia Pacific Conference on Transducers and Micro-Nano Technology, June 25-28, 2006, Marina-Mandarin Hotel, Singapore.
  13. K. Takahashi, M. Mita, H.N. Kwon, H. Fujita, and H. Toshiyoshi, "A Comb-driven XY-stage with topological layer switch architecture for high-density arrayed systems," The 8th Korean MEMS Conference, April 6-8, 2006, Korea.
  14. H. N. Kwon, K. Takanashi, J. H. Lee, H. Fujita, and H. Toshiyoshi, "A 9x9 Optical Cross-Connect utilizing Silicon Lens-Scanners with Spider-Leg Actuators," The 8th Korean MEMS Conference, April 6-8, Korea.
  15. C. Chong, K. Isamoto, M. Nakada, H. Fujita, and H. Toshiyoshi, "A Photovoltaically Modulated MEMS Optical Scanner for Fiber Endoscope," Int. Conf. on Microtechnologies in Medicine and Biology (MMB 2006), May 9-12, 2006, Bankoku-Shinryokan, Okinawa, Japan.
  16. Changho Chong, Keiji Isamoto, Jonathan Evans, and Hiroshi Toshiyoshi, "Optically-modulated MEMS scanning endoscope for optical coherent tomography," OSA Biomedical Optics Topical Meeting, March 22, 2006, Fort Lauderdale, FL, USA.
  17. H. N. Kwon, J. H Lee, K. Takahashi, H. Toshiyoshi, "Optical characterization of 9 x 9 optical cross connect utilizing silicon lens scanners with spider-leg actuators," Proc. SPIE Photonics West, MOEMS-MEMS 2006, SPIE vol. #6114, San Jose, CA, USA, Jan. 25-26, 2006, pp. 131-138.
  18. R. Shigematsu, A. Higo, H. Toshiyoshi, and H. Fujita, "Manually re-writable panel for large area MEMS," in Proc. 19th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2006), Jan .22-26, 2006, Lutfi Kirdar Convention and Exhibition Centre, Istanbul, Turkey, pp. 44-47.
↑

Year 2005 (28 papers including 3 invited)†

  1. S. Iwamoto, M. Tokushima, A. Gomyo, H. Yamada, A. Higo, H. Toshiyoshi, H. Fujita, and Y. Arakawa, "Optical switching in photonic crystal waveguide controlled by micro electro mechanical system," Technical Digest, Pacific Rim Conf. on Lasers and Electro-Optics (CLEO 2005), 2005.
  2. Y. Taii, A. Higo, H. Fujita, and H. Toshiyoshi, "Flexible Transparent Display by Plastic MEMS," The 12th. Int. Display Workshop / Asia Display 2005 (IDW/AD 05), Dec. 6 - 9, 2005, Sunport Takamatsu, Takamatsu, Japan.
  3. K. Takahashi, M. Mita, H. Fujita, and H. Toshiyoshi, "A High Fill-factor Comb-driven XY-stage with Topological Layer Switch Architecture," The 12th. Int. Display Workshop / Asia Display 2005 (IDW/AD 05), Dec. 6 - 9, 2005, Sunport Takamatsu, Takamatsu, Japan.
  4. R. Shigematsu, A. Higo, H. Toshiyoshi, and H. Fujita, "Blackboard-type Display Compatible with Large Area MEMS," The 12th. Int. Display Workshop / Asia Display 2005 (IDW/AD 05), Dec. 6 - 9, 2005, Sunport Takamatsu, Takamatsu, Japan.
  5. H. Toshiyoshi and H. Fujita, "MEMS Technologies for Micro Optics - From Fiber Optic Communication to Display -," The 12th. Int. Display Workshop / Asia Display 2005 (IDW/AD 05), Dec. 6 - 9, 2005, Sunport Takamatsu, Takamatsu, Japan. (invited)
  6. Hiroshi Toshiyoshi, "MEMS for micro optics from fiber optic communication to display," SPIE International Symposium on Optomechatronic Technologies (ISOT 2005), Sapporo Convention Center, Dec. 5-7, 2005. (invited)
  7. Hiroshi Toshiyoshi, "MEMS for Optical Information Technology," Nanoengineering Symposium 2005, Korea Institute of Machinery and Materials (KIMM), Daejeon, Korea, Oct. 26-28, 2005. (invited)
  8. M. Tani, M. Akamatsu, Y. Yasuda, H. Fujita and H. Toshiyoshi, "A Laser Display using a PZT-Actuated 2D Optical Scanner," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland, pp. 9-10. (oral A2)
  9. Y. Taii, A. Higo, H. Fujita and H. Toshiyoshi, "Electrostatically Controlled Transparent Display Pixels by PEN-Film MEMS," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland. (oral A4)
  10. M. Yoda, K. Isamoto, C. Chong, H. Ito, A. Murata, and H. Toshiyoshi, "Design and Fabrication of A MEMS 1-D Optical Scanner using Self-Assembled Vertical Combs and Scan-Angle Magnifying Mechanism," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland. (oral B2)
  11. K. Takahashi, H. N. Kwon, K. Saruta, M. Mita, J.-H. Lee, H. Fujita and H. Toshiyoshi, "A 2D Optical Lens Scanner with Small Footprint Actuators," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland. (poster P1.9)
  12. A. Higo, S. Iwamoto, M. Ishida, Y. Arakawa, H. Fujita, A. Gomyo, M. Tokushima, H. Yamada, and H. Toshiyoshi, "Design and Fabrication of MEMS Optical Modulators Integrated with PhC Waveguides," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland. (oral G4)
  13. T. Takahashi, M. Mita, H. Fujita and H. Toshiyoshi, "Electrostatic Micro-Shutter Array for Infrared Spectrograph," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland. (oral H2)
  14. H. N. Kwon, T.-H. Kim, H. Toshiyoshi, J.-H. Lee, "A 2x2 Optical Add-Drop Module with Attenuation Controllability using Two 45 deg Movable Micromirrors," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland. (poster P2.9)
  15. Kentaro Motohara, Takuya Takahashi, Hiroshi Toshiyoshi, Makoto Mita, Naoto Kobayashi, Nobunari Kashikawa, "Development of Microshutter Arrays for Ground-Based Instruments," Instrumentation for Extremely Large Telescopes, 2005/7/25-29, Bavaria, Germany.
  16. Kiyotaka Yamashita, Winston Sun, Kuniyuki Kakushima, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "An RF-MEMS Device with a Lateral Field-Emission Detector," The 18th Int. Vacuum Nanoelectronics Conference (IVNC 2005), 10-14 July 2005, St. Catherine's College, Oxford, UK.
  17. Winston Sun, Kiyotaka Yamashita, Kuniyuki Kakushima, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A LATERAL FIELD-EMISSION RF MEMS DEVICE," The Croucher Foundation Advanced Study Institute (ASI) "Frontier Research on Nano-mechanics," May 17 - 20, 2005, Hong Kong Univ, Hong Kong.
  18. K. Kakushima, G. Hashiguchi, M. Ataka, H. Toshiyoshi, and H. Fujita, "Real Time Observation of Micromachined Field Emission Tip using Transmission Electron Microscope," Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  19. Yuko Yamauchi, Akio Higo, Kuniyuki Kakushima, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A LIGHT-IN LIGHT-OUT MICRO MIRROR DEVICE," Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  20. Makoto Mita, Kuniyuki Kakushima, Manabu Ataka, Hiroshi Toshiyoshi, and Hiroyuki Fujita, "Foxtail Actuators," Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  21. K. Takahashi, H. N. Kwon, M. Mita, H. Fujita, H. Toshiyoshi, K. Suzuki, H. Funaki, "Monolithic Integration of High Voltage Driver Circuits and MEMS Actuators by ASIC-like postprocess," Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  22. Kiyotaka Yamashita, Winston Sun, Kuniyuki Kakushima, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A LATERAL FIELD-EMISSION RF MEMS DEVICE," Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  23. Ho Nam Kwon, Jong-Hyun Lee, Kazuhiro ?Jonnie? Takahashi, and Hiroshi Toshiyoshi, "Micro XY-stages with Spider-leg Actuators for 2-Dimensional Optical Scanning," Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  24. M. Yoda, K. Isamoto, Changho Chong, H. Ito, S. Kamisuki, M. Atobe, and H. Toshiyoshi, "A MEMS 1-D Optical Scanner for Laser Projection Display using Self-assembled Vertical Combs and Scan-angle Magnifying Mechanism," Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  25. Yoshiaki Yasuda, Masahiro Akamatsu, Masanao Tani, and Hiroshi Toshiyoshi, "Piezoelectric 2D-Optical Micro Scanners With PZT Thick Films," Proc. 17th Int. Symp. on Integrated Ferroelectrics (ISIF 2005), April 17 - 20, 2005, Shanghai, China.
  26. Vincent Agache, Bernard Legrand, Kunihiko Nakamura, Hideki Kawakatsu, Lionel Buchaillot, Hiroshi Toshiyoshi, Dominique Collard, and Hiroyuki Fujita "Characterization of Vertical Vibration of Electrostatically Actuated Resonators using Atomic Force Microscope in Noncontact Mode," 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5 - 9, 2005, Seoul, Korea.
  27. Makoto Mita, Hiroshi Toshiyoshi, Manabu Ataka,　Hiroyuki Fujita, "A Micro Dice -An Electrostatic Micro Random number generator,'' IEEE MEMS 2005, January 30 - February 3, 2005, Miami Beach, Florida, USA.
  28. Makoto Mita, Hiroshi Toshiyoshi, Hiroyuki Fujita, "An Electrostatic Inertia-Driven Micro Rover,'' IEEE MEMS 2005, January 30 - February 3, 2005, Miami Beach, Florida, USA
↑

Year 2004 (11 articles, 2 invited)†

  1. Dai Kobayashi, Akio Higo, Hiroshi Toshiyoshi, Hiroyuki Fujita, Hideki Kawakatsu, "A Fabrication Method of Nanocantilevers Using Silicon Direct bonding," The 12th International Colloquium on Scanning Probe Microscopy, p.56 2004-12-01
  2. Hiroshi Toshiyoshi, "MEMS for Fiber Optic Application," International Workshop on Micromechatronics and Micro and Nano Fabrication, October 5th and 6th, 2004 University of Karlsruhe, Germany.
  3. Hiroshi Toshiyoshi, "Pros and Cons of Surface Stiction in MEMS Devices and Processes," Nano Interface Mechanics Workshop (NMW2004), 8-9 September 2004, Institute of Industrial Science, University of Tokyo, Tokyo, Japan. (invited)
  4. Kazuhiro Takahashi, Kunihiko Saruta, Makoto Mita, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "An Optical Scanner with Electrostatic Comb Drive XY-Stage," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2004), Takamatsu, Japan, Aug. 22-26, 2004, pp. 56-57.
  5. Hiroshi Obi, Toshio Yamanoi, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A Vertical-Comb Torsion Mirror with Distributed Gap for Suppressing In-Plane Instability," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2004), Takamatsu, Japan, Aug. 22-26, 2004, pp. 60-61.
  6. Yuko Yamauchi, Akio Higo, Kuniyuki Kakushima, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Optically Assisted Electrostatic Actuation Mechanism," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2004), Takamatsu, Japan, Aug. 22-26, 2004, pp. 164-165.
  7. Keiji Isamoto, Tatsuya Makino, Kazuya Kato, Atsushi Morosawa, Changho Chong, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A Two-Mask Process for Self-Assembled Vertical Comb Drive Mirrors," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2004), Takamatsu, Japan, Aug. 22-26, 2004, pp.172-173.
  8. Masanao Tani, Masahiro Akamatsu, Yoshiaki Yasuda, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "A 2D-Optical Scanner Actuated by PZT Film Deposited by Arc Discharged Reactive Ion-Plating (ADRIP) Method," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2004), Takamatsu, Japan, Aug. 22-26, 2004, pp. 188-189.
  9. Akio Higo, Satoshi Iwamoto, Satomi Ishida, Hiroyuki Fujita, Yasuhiko Arakawa, Hiroshi Toshiyoshi, Hirohito Yamada, Akiko Gomyo and Masatoshi Tokushima, "Micromechanical Structures for Photonic Crystal Waveguide Switches," Asia-Pacific Conf. on Transducers and micro-Nano Technology (APCOT 2004), July 4-7, 2004, Sapporo, Japan.
  10. Hiroshi Toshiyoshi, "Stability Issues in MEMS Devices and Packages," International Workshop on SoC/SiP Integration of MEMS and Passive Components with RF-ICs, March 2, 2004, Keyaki Hall, Chiba University. (invited)
  11. Chang-ho Chong, Keiji Isamoto, Atsushi Morosawa, Kazuya Kato, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "MEMS variable optical attenuator with simple and smart design for stable and reliable operation," Proc. SPIE vol. 5279, pp. 40-48, 2004.
↑

Year 2003 (12 articles, 6 invited)†

  1. Hiroshi Toshiyoshi, "Micro Electro Mechanical Devices for Fiber Optic Telecommunication," International Symposium on Micro-Mechanical Engineering Heat Transfer, Fluid Dynamics, Reliability and Mechatronics (ISMME 2003), AIST, Tsukuba, Japan, Dec. 1 - 3, 2003. (invited)
  2. Hiroshi Toshiyoshi, "MEMS for Fiber Optic Applications," The 16th Int. Conf. on Optical Fiber Sensors (OFS-16), Oct. 13-17, 2003, Nara-ken New Public Hall, Nara, Japan. (invited)
  3. C. Chong, K. Isamoto, H. Fujita, and H. Toshiyoshi, "Variable Optical Attenuator with Simple SOI-MEMS Mirror (tentative title)," Asia-Pacific Optical and Wireless Communications (APOC 2003), Nov. 2 - 6, 2003, Wuhan Science and Technology Conference & Exhibition Center, Wuhan, China. (invited)
  4. C. Chong, K. Isamoto, H. Fujita, and H. Toshiyoshi, "Variable Optical Attenuator with Simple SOI-MEMS Mirror," Proc. the 29th European Conference on Optical Communication / the 14th Int. Conf. on Integrated Optics and Optical Fiber Communication (ECOC / IOOC 2003), Sep. 21-25, 2003, Rimini, Italy, Mo-3.5.2.
  5. Keiji Isamoto, Kazuya Kato, Atsushi Morosawa, Changho Chong, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Micromechanical VOA Design for High Shock-Tolerance and Low Temperature-Dependence," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (MOEMS 03), Outrigger Waikoloa Beach, Hawaii, USA, Aug. 18 - 21, 2003.
  6. W. Piyawattanametha, P. R. Patterson, D. Hah, H. Toshiyoshi, and M. C.Wu, "A 2D Scanner by Surface and Bulk Micromachined Angular Vertical Comb Actuators," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (MOEMS '03), Outrigger Waikoloa Beach, Hawaii, USA, Aug. 18 - 21, 2003.
  7. Hiroshi Toshiyoshi, "MEMS for Fiber Optic Applications," Proc. 5th Japanese-Finnish Joint Symposium Optics in Engineering (OIE '03), Aug. 7-9, 2003, Saariselka, Lapland, Finland. (invited)
  8. H. Toshiyoshi, K. Isamoto, A. Morosawa, M. Tei, and H. Fujita, "A 5-Volt Operated MEMS Variable Optical Attenuator," Proc. the 12th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 03), Boston Marriott Copley Place, Boston, MA, USA, June 8-12, 2003, 4D1.2, pp. 1768-1771.
  9. Makoto Mita, Hiroaki Kawara, Hiroshi Toshiyoshi, Manabu Ataka, and Hiroyuki Fujita, "An Electrostatic 2-Dimensional Micro-Gripper for Nano Structure," Proc. the 12th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 03), Boston Marriott Copley Place, Boston, MA, USA, June 8-12, 2003, 4D1.2, pp. 1768-1771.
  10. W. Piyawattanametha, P. Patterson, D. Hah, H. Toshiyoshi, M. C. Wu, "A Surface and Bulk Micromachined Angular Vertical Combdrive for Scanning Micromirrors," 2003 Optical Fiber Communication Conference and Exposition (OFC 2003), March 23 - 28, 2003, Georgia World Congress Center, Atlanta, Georgia, USA, TuN1.
  11. M. C. M. Lee, D. Hah, E. K. Lau, H. Toshiyoshi and M.Wu, "Nano-electro-mechanical Photonic Crystal Switch," Proc. The 6th International Symposium on Contemporary Photonics Technology (CPT2003), KOKUYO HALL, Shinagawa, Tokyo, Japan, January 15-17, 2003. (invited)
  12. Dooyoung Hah, Chang-Auck Choi, Chi-Hoon Jun, Youn Tae Kim, Pamera R. Patterson, Hiroshi Toshiyoshi, Ming C. Wu, "MOEM scanners for optical networks," Proc. the 9th KIEE MEMS Symposium. (invited)
↑

Year 2002 (17 articles, 1 invited)†

  1. Hiroshi Toshiyoshi, Kunihiko Saruta, Hiroyuki Fujita, Ming C. Wu, "Alternative Optical MEMS," Proc. the 3rd Int. Conf on Optics-photonics Design & Fabrication (ODF 2002) Oct. 30 - Nov. 1, 2002, National Museum of Emerging Science and Innovation, Tokyo, Japan, pp. 27-28. (invited)
  2. Makoto Mita, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Electrostatic Piggyback Microactuators for Head Element Positioning" ASME/IEEE Asia Pacific Magnetic Recording Conference (APMRC) 2002, Aug. 28-29, 2002, Pan Pacific Hotel, Singapore.
  3. Kunihiko Saruta, Hiroyuki Fujita, and Hiroshi Toshiyoshi, "Bulk Micromachined 2D Lens Scanners for Transparent Optical Fiber Switches," Conf. Digest of 2002 IEEE/LEOS Int. Conf. on Optical MEMS (Optical MEMS 2002), 20-23 August, 2002, Hotel de la Paix, Lugano, Switzerland, pp. 13-14.
  4. Sophia Huang, Jui-Che (Ted) Tsai, Dooyoung Hah, Hiroshi Toshiyoshi, and Ming C. Wu, "Open-Loop Operation of MEMS WDM Routers with Analog Micromirror Array," Conf. Digest of 2002 IEEE/LEOS Int. Conf. on Optical MEMS (Optical MEMS 2002), 20-23 August, 2002, Hotel de la Paix, Lugano, Switzerland, pp. 179-180.
  5. Makoto Mita, Hiroshi Toshiyoshi and Hiroyuki Fujita, "Hard-Disk Head Positi ning Mechanism using SOI Wafer," Proc. 19th SENSOR SYMPOSIUM, May 29-31, 2002 , Kyoto, Japan, pp. 455-458, A1-5.
  6. G. Hashiguchi, Y. Wada, J. Endo, H. Toshiyoshi, and H. Fujita, "A Micrimachined Nanoprobe device and Its Application to Visual Observation of Nano Phenomena in a Transmission Electron Microscope, " Proc. 19th SENSOR SYMPOSIUM, May 29-31, 2002 , Kyoto, Japan, pp.35-38, A1-5.
  7. S. Kawai, D. Kobayashi, D. Saya, A. Kato, H. Toshiyoshi, H. Fujita and H. Kawakatsu , "Millions of nanocantilevers and Towards Atomic Force Microscopy up to 100 MHz," Proc. 19th SENSOR SYMPOSIUM, May 29-31, 2002 , Kyoto, Japan, pp.29-33, A1-4.
  8. D. Hah, S. Huang, H. Nguyen, H. Chang, J.-C. Tsai, M. C. Wu, H. Toshiyoshi, "Low Voltage MEMS Analog Micromirror Arrays with Hidden Vertical Comb-Drive Actuators," 2002 Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head 2002), June 2-6, 2002, Crown Plaza Resort, Hilton Head Island, SC.
  9. P.-Y. Chiou, M. C. Wu, H. Moon, C.-J. Kim, and H. Toshiyoshi, "Optical Actuation of Microfluidics Based on Opto-Electrowetting," 2002 Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head 2002), June 2-6, 2002, Crowne Plaza Resort, Hilton Head Island, SC.
  10. D. Hah, M.C. Wu, H. Toshiyoshi, "Design of electrostatic actuators for MOEMS applications," Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS (DTIP MOEMS 2002), May 6-8, 2002, Cannes-Mandelieu, Cote d'Azur, France, Session-9: Component Design, May 8, Wednesday.
  11. P. Patterson, D. Hah (University of California at Los Angeles), H. Toshiyoshi (University of Tokyo), and M. Wu (University of California at Los Angeles), "MOEMS Electrostatic Scanning Micromirrors Design and Fabrication," The 201st Meeting of the Electrochemical Society, May 12-17, 2002, Philadelphia, PA, abst# 671 at Session-O1 (May, 15, 2002).
  12. Hsin Chang, Dooyoung Hah, Sophia Huang, Hung Nguyen, Hiroshi Toshiyoshi, Ming, C. Wu, "A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuators," OFC 2002, March 17-22, Anaheim, CA (Tuesday, March 19, 02:45 PM - 03:00 PM)
  13. Ming-Chang Mark Lee, Dooyoung Hah, Erwin K. Lau, Hiroshi Toshiyoshi, Ming Wu, "Nano-Electro-Mechanical Photonic Crystal Switch," OFC 2002, in Anaheim, CA, Mar. 17-22, 2002, at Session-TuO.
  14. Dooyoung Hah, Sophia Huang, Hung Nguyen, Hsin Chang, Hiroshi Toshiyoshi, and Ming C. Wu, " A Low Voltage, Large Scan Angle MEMS Micromirror Array with Hidden Vertical Comb-Drive Actuators for WDM Routers," OFC 2002, in Anaheim, CA, Mar. 17-22, 2002.
  15. M. C. Wu, D. Hah, P. Patterson, H. Toshiyoshi, "Microelectromechanical Scanning Devices for Optical-Networking Applications," IEEE International Solid-State Circuit Conference (ISSCC 2002), Feb. 3-7, 2002, San Francisco, USA (presentation No. 21.6).
  16. M. Mita, H. Toshiyoshi, K. Kakushima, G. Hashiguchi, D. Kobayashi, J. Endo, Y. Wada, and H. Fujita, "Characterization of Bulk Micromachined Tunneling Tip Integrated with Positioning Actuator," The 15th IEEE Int. Micro Electro Mech. Syst. Conf. (MEMS 2002), Jan. 20-24, 2002, Las Vegas, Nevada, USA, TP22.
  17. P. R. Patterson, D. Hah, H. Nguyen, H. Toshiyoshi, R.-M. Chao, and M.C. Wu, "A Scanning Micromirror with Angular Comb Drive Actuation," Proc. 15th IEEE Int. Micro Electro Mech. Syst. Conf. (MEMS 2002), Jan. 20-24, 2002, Las Vegas, Nevada, USA, WP10.
↑

Year 2001 (6 articles, 1 invited)†

  1. H. Fujita, H. Toshiyoshi, Y. Wada, "Micromachined tools for nano technology," RIKEN Review, (no.36), (First Japan-Switzerland Bilateral Symposium on Science and Technology in Micro/Nano Scale, Wako, Japan, 26-28 Oct. 2000.) Inst. Phys. Chem. Res. (RIKEN), June 2001. p.12-15.
  2. Hiroshi Toshiyoshi, "Design Strategy for MEMS 2D Scanning Mirrors," Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS2001), Sept. 25-28, 2001, Bankoku Shinryokan and Busena Terrace Resort, Okinawa, Japan, IT-4. (invited)
  3. Pamela R. Patterson, Dooyoung Hah, Hsin Chang, Hiroshi Toshiyoshi, Ming C. Wu, "An Angular Vertical Comb Drive Actuator for Scanning Micromirrors," Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2001), Sept. 25-28, 2001, Bankoku Shinryokan and Busena Terrace Resort, Okinawa, Japan, C-2.
  4. W. Piywattanametha, P. R. Patterson. G. D. J. Su, H. Toshiyoshi, M. C. Wu, "A MEMS Non-interferometric Differential Confocal Scanning Optical Microscope," Digest of the 11th Int. Conf. on Solid-State Sensors and Actuators (Transducers 2001 & Eurosensors XV), June 10-14, 2001, Munich, Germany, 2B2.05.
  5. D. Saya, K. Fukushima, H. Toshiyoshi, G. Hashiguchi, H. Fujita, and H. Kawakatsu, "Fabrication of Array of Single-Crystal Si Multi-Probe Cantilevers with Several Microns Size for Parallel Operation of Atomic Force Microscope," 14th Int. Conf. on Micro Electro Mechanical Systems (MEMS 2001), Jan. 21 - 25, 2001, Interlaken, Switzerland, MP22.
  6. H. Nguyen, J. Su, H. Toshiyoshi, M. C. Wu, "Device Transplant of Optical MEMS for out of Plane Beam Steering," 14th Int. Conf. on Micro Electro Mechanical Systems (MEMS 2001), Jan. 21 - 25, 2001, Interlaken, Switzerland, TP23.
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Year 2000 (sabbatical at UCLA, 10 articles, 1 invited)†

  1. D. Saya, K. Fukushima, H. Toshiyoshi, G. Hashiguchi, H. Fujita, and H. Kawakatsu, "Fabrication of single crystal Si multi-probe cantilever array," Proc. of The 8th International Colloquium on Scanning Probe Microscopy & Asian SPM 3, 2000.12, p.44.
  2. Ming C. Wu and Hiroshi Toshiyoshi, "Recent Advances in Micro-Opto-Electro-Mechanical Systems (MOEMS)," CLEO/Europe-IQEC 2000, 12 - 14 September, Nice Acropolis, Nice, France, CWD6. (invited)
  3. Hiroshi Toshiyoshi, Guo-Dung John Su, Jason LaCosse, Ming C. Wu, "Surface Micromachined 2D Lens Scanner Array," Proc. IEEE/LEOS Optical MEMS, Kauai, Hawaii, Aug. 21-24, 2000, Late News Session, PD-1.
  4. Pamela R. Patterson, Guo-Dung J. Su, Hiroshi Toshiyoshi, Ming C. Wu, "A MEMS 2-D Scanner with Bonded Single-Crystalline Honeycomb Micromirror," Solid-State Sensor & Actuator Workshop (Hilton Head 2000), June 4-8, 2000, Hilton Head Island, SC (Supplemental Digest of Late News Poster Session), p. 17-18.
  5. Hiroshi Toshiyoshi, Wibool Piyawattanametha, Cheng Ta Chan, and Ming C. Wu, "Linearization and Analysis of Electrostatically Actuated MEMS 2D Optical Scanner," Solid-State Sensor & Actuator Workshop (Hilton Head 2000), June 4-8, 2000, Hilton Head Island, SC (Supplemental Digest of Late News Poster Session), p. 7-8.
  6. Guo-Dung J. Su, Hung Nguyen, Pamela Paterson, Hiroshi Toshiyoshi, Ming C. Wu, "Surface-Micromachined 2D Optical Scanners with high-Performance Single-Crystalline Silicon Micromirrors," Conference on Lasers and Electro-Optics / Quantum Electronic and Laser Science Conference (CLEO/QELS 2000), May 7-10, 2000, San Francisco, CA (Post deadline paper) CPD21-1.
  7. Wibool Piyawattanametha, Hiroshi Toshiyoshi, Jason LaCosse, Ming C. Wu, "Surface-Micromachined Confocal Scanning Optical Microscope," Conference on Lasers and Electro-Optics / Quantum Electronic and Laser Science Conference (CLEO/QELS 2000), May 7-10, 2000, San Francisco, CA, CThL3.
  8. H. Nguyen, P. Patterson, H. Toshiyoshi, and M.C. Wu, "A Substrate-Independent Wafer Transfer Technique for Surface-Micromachined Devices," The 13th IEEE International Micro Electro Mechanical Systems Conference (MEMS 2000), Jan. 23- 27, 2000, Miyazaki, Japan.
  9. K. Fukushima, D. Saya, H. Toshiyoshi, H. Fujita, G. Hashiguchi, and H. Kawakatsu, "Measurement of Characteristics of Nanometric Oscillator for Atomic Force Microscopy," The 13th IEEE International Micro Electro Mechanical Systems Conference (MEMS 2000), Jan. 23- 27, 2000, Miyazaki, Japan.
  10. K. Fukushima, D. Saya, H. Toshiyoshi, H. Fujita, G. Hashiguchi, and H. Kawakatsu, "Measurement of characteristics of nanometric mechanical oscillators," Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on, 23-27 Jan. 2000 Page(s): 211 - 216
↑

Year 1999 (sabbatical at UCLA, 19 articles, 2 invited)†

  1. K. Fukushima et al., The 7th International Colloquium on Scanning Probe Microscopy (ICSPM-7), Atagawa, December, 1999.
  2. D. Saya et al., The 7th International Colloquium on Scanning Probe Microscopy (ICSPM-7), Atagawa, December, 1999.
  3. Hiroshi Toshiyoshi, "An Overview of Micro-Electro-Mechanical Systems (MEMS)," presented at Executive Forum, 1999 American Society of Precision Engineering Annual Meeting, Oct. 31 - Nov. 3, 1999, Monterey, CA. (invited)
  4. Hiroshi Toshiyoshi, "Microactuators for optical applications," 1999 OSA Annual meetings/ILS-XV, Sept. 26 - 30, 1999, Santa Clara Convention Center, Santa Clara, CA (TuGG-1). (invited)
  5. Hiroshi Toshiyoshi, Guo-Dung John Su, Jason LaCosse, Ming C. Wu, "Micromechanical Lens Scanners for Fiber Optic Switches," Proc. 3rd Int'l Conf. on Micro Opto Electro Mechanical Systems (MOEMS 99), Aug. 30 - Sep. 1, 1999, Mainz, Germany, pp. 165-170.
  6. H. Fujita, G. Hashiguchi, M. Mita, H. Toshiyoshi, D. Kobayashi, M. Goto, Y. Wada, J. Endo, "A micromachined tunneling current device for the direct observation of the tunneling gap," Proc. 7th IEEE Int. Conf. on Emerging Technologies and Factory Automation. (ETFA '99), Barcelona, Spain, Oct. 18-21, 1999, pp.367-72, vol.1.
  7. A. Tixier, J. P. Gouy, Y. Mita, H. Toshiyoshi, and H. Fujita, "Microactuated slider based tunable filters for optical fiber transmission," Proc. 3rd Int'l Conf. on Micro Opto Electro Mechanical Systems (MOEMS 99), Aug. 30 - Sep. 1, 1999, Mainz, Germany.
  8. Hideki Kawakatsu, Hiroshi Toshiyoshi, Daisuke Saya, Hiroyuki Fujita, " Strength measurement and calculations on silicon-based nanometric oscillators for scanning force microcopy operating in the gigahertz range," The 2nd International Conference on Non-Contact AFM, Sep. 1-4, 1999, Pontresina, Switzerland.
  9. Hideki Kawakatsu, Hiroshi Toshiyoshi, Daisuke Saya, Hiroyuki Fujita, "A Silicon Based Nanometric Oscillator with Natural Frequency in the GHz Range for Scanning Force Microscopy," The 10th International Conference on Scanning Tunneling Microscopy / Spectroscopy and Related Techniques (STM 99), July 18-23, 1999, Seoul, Korea, WeP1-37 (poster session).
  10. Hiroshi Toshiyoshi, Masahide Goto, Makoto Mita, Gen Hashiguchi, Hiroyuki Fujita, Dai Kobayashi, Junji Endo, Yasuo Wada, "Micromechanical Tunneling Probes & Actuators on a Silicon Chip," 1999 Int. Microprocesses and Nanotechnology Conf., July 6-8, 1999, Yokohama, Japan, 8B-7-2.
  11. M. Mita, H. Toshiyoshi, T. Oba, Y. Mita, and H. Fujita, "Multi-height HARMS by Planar Photolithography on Initial Surface," Workshop and Exhibition on High Aspect Ratio Microstructure Technology (HARMST'99), 3-15, June 1999, Kazusa Academia Center, Chiba, JAPAN.
  12. Kyoseok Chun, Gen Hashiguchi, Hiroshi Toshiyoshi, Hiroyuki Fujita, The University of Tokyo, Yuji Kikuchi, National Food Research Institute, Jun Ishikawa, Yuji Murakami, Eiichi Tamiya, Japan Advanced Institute of Science and Technology, Japan "DNA Injection into Plant Cell Conglomerates by Micromachined Hollow Microcapillary Arrays," The 10th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS 99), Sendai, Japan, June 7-10, 1999.
  13. Gen Hashiguchi, Makoto Mita, Hiroshi Toshiyoshi, Dai Kobayashi, Yasuo Wada, Junji Endo, Masahide Goto, Hiroyuki Fujita, "Fabrication of Facing Nano-wire Probes for In-Situ Observation of Tunneling Phenomena with Ultra-High Resolution TEM," The 10th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS 99), Sendai, Japan, June 7-10, 1999.
  14. Makoto Mita, Philippe Helin, Daisuke Miyauchi, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Optical and Surface Characterization of Polysilicon Replica Mirrors for an Optical Fiber Switch," The 10th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS 99), Sendai, Japan, June 7-10, 1999.
  15. Hiroshi Toshiyoshi, Dai Kobayashi, Gen Hashiguchi, Makoto Mita, Hiroyuki Fujita, Yasuo Wada, Junji Endo, "Micro Electro Mechanical Digital-to-Analog Converter (MEMDAC)," The 10th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS 99), Sendai, Japan, June 7-10, 1999.
  16. H. Toshiyoshi, D. Miyauchi, and H. Fujita, "A Magnetically Driven Microoptical Switch," The Journal of the Electrochemical Society, Proc. ECS the Fifth International Symposium on Magnetic Materials, Processes and Devices (Electrochem. Soc., Boston, 1998).
  17. J. P. Gouy, A. Tixier, G. Hashiguchi, H. Toshiyoshi, and H. Fujita, "Design of a pigtailed tunable filter for optical fiber transmissions at 1.3-1.55 microns," 1999 SPIE conference on Micromachining and Microfabrication, 30 March - 1 April, 1999, Paris, France.
  18. Hiroshi Toshiyoshi, Yoshio Mita, Minoru Ogawa, and Hiroyuki Fujita, "Chip-Level Three-Dimensional Assembling of Microsystems," 1999 SPIE conference on Micromachining and Microfabrication, 30 March - 1 April, 1999, Paris, France.
  19. K. Chun, G. Hashiguchi, H. Toshiyoshi, H. Fujita, Y. Kikuchi, J. Ishikawa, Y. Murakami, and E. Tamiya, "An Array of Hollow Microcapillaries for the Controlled Injection of Genetic Materials into Animal/Plant Cells, " 12th Annual International Conference on Micro Electro Mechanical Systems (MEMS 99), January 17-21, 1999, Orlando, Florida, USA.
↑

Year 1998 (8 artciles, 1 invited)†

  1. Daisuke Saya, Hiroshi Toshiyoshi, Hiroyuki Fujita, Hideki Kawakatsu, "Fabrication Technique of Silicon based Nanometric Oscillators," The 6th International Colloquium on Scanning Tunneling Microscopy organized by Thin Film and Surface Physics Division of Japan Society of Applied Physics, Atagawa, 1998.12.10-12, p.83.
  2. Hideki Kawakatsu, Hiroshi Toshiyoshi, Hiroyuki Fujita, and Daisuke Saya, "Silicon Based Nanometric Oscillators - Where Mechanics Meets Electronics Without Fail -," The 6th International Colloquium on Scanning Tunneling Microscopy organized by Thin Film and Surface Physics Division of Japan Society of Applied Physics, Atagawa, 1998.12.10-12, p.39.
  3. Hideki Kawakatsu, Hiroshi Toshiyoshi, Hiroyuki Fujita, and Daisuke Saya, "Silicon Based Nanometric Oscillators -Where Mechanics Meets Electronics Without Fail-," Fourth Joint Workshop on Production Technology, Dec. 1-2, 1998, Tokyo, p.59 (A joint workshop by the members of the Research Group on Production Technology, IIS, University of Tokyo, and the members of the Research Institute of Mechanical Technology, Pusan National University).
  4. Markus Mueller, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Acoustic wavelet analysis using micro electro-mechanical sensors," SPIE 1998 Symposium on Micromachining and Microfabrication, 20-22 September, 1998, Santa Clara, California, USA.
  5. H. Toshiyoshi, D. Miyauchi, H. Fujita, "A Magnetically Driven Microoptical Switch," 5th International Symposium on Magnetic Materials, Processes and Devices as part of the 194th Meeting of the Electrochemical Society, Boston, Nov.1-6, 1998.
  6. Hiroyuki Fujita, Hiroshi Toshiyoshi, "Micromacined Optical Switches for Free-Space Beam Steering," Proc. 1998 IEEE/LEOS Summer Topical Meetings, 20-24 July, 1998, Monterey, CA. (invited)
  7. Makoto Mita, Daisuke Miyauchi, Hiroshi Toshiyoshi, Hiroyuki Fujita, "An-Out-of-Plane Polysilicon Actuator with a Smooth Vertical Mirror for Optical Fiber Switch Application," Proc. 1998 IEEE/LEOS Summer Topical Meetings, 20-24 July, 1998, Monterey, CA.
  8. Hiroshi Toshiyoshi, Daisuke Miyauchi, Hiroyuki Fujita, "Micromechanical Fiber Optic Switches based on Electromagnetic Torsion Mirrors," Proc. 1998 IEEE/LEOS Summer Topical Meetings, 20-24 July, 1998, Monterey, CA.
↑

Year 1997 (9 articles, 1 invited)†

  1. C. Gorecki, E. Bonnotte, H. Toshiyoshi, F. Benoit, H. Kawakatsu, H. Fujita, "Original approach to an optically active silicon-based interferometric structure for sensing applications, " Proceedings of the SPIE - The International Society for Optical Engineering, vol.3098, (Optical Inspection and Micromeasurements II, Munich, Germany, 16-19 June 1997.) SPIE-Int. Soc. Opt. Eng, 1997. p.392-9.
  2. E. Bonnotte, C. Gorecki, H. Toshiyoshi, and H. Kawakatsu, "Silicon-based interferometric sensor with phase modulation driven by surface acoustic waves," Proceedings of the SPIE - The International Society for Optical Engineering, vol.3242, (Smart Electronics and MEMS, Adelaide, SA, Australia, 11-13 Dec. 1997.) SPIE-Int. Soc. Opt. Eng., 1997. p.329-36.
  3. Daisuke Miyauchi, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Optical Cross-connect Switch by Silicon Micromachining," IEEE/LEOS International Conference on Optical MEMS and Their Applications (MOEMS 97), Nov.18-21, 1997, Nara, Japan, pp.253-258.
  4. Masakazu Kobayashi, Hiroshi Toshiyoshi, Hiroyuki Fujita, "A Micromechanical Tunable Interferometer for Free-Space Optical Interconnection," IEEE/LEOS International Conference on Optical MEMS and Their Applications (MOEMS 97), Nov.18-21, 1997, Nara, Japan, pp.171-175.
  5. Hiroshi Toshiyoshi, "Electrostatic micromirrors for a free-space optical switch," Optical Society of America Annual Meeting, 1997.10.12-17, Long Beach, California, USA, p.167. (invited)
  6. Hiroshi Toshiyoshi, Masakazu Kobayashi, Hiroyuki Fujita, Jean Podlecki, Takao Someya, Yasuhiko Arakawa, "Micromechanical Wavelength Filters for Optical Interconnection," France-Japan Workshop "From Nano to Macroscale science and technology through Microsystems (N2M 97)," May 21-23, 1997, Tokyo, Japan.
  7. H. Toshiyoshi, "Micro Mechanical Polysilicon Torsion Mirrors for an Electrostatic Optical Switch in a Free-Space," SPIE's 1996 Symposium on Smart Materials, Structures and MEMS, Bangalore, India, (1996.12), p.556-561.
  8. Ronald Mueller, Hannes Bleuler, Hiroshi Toshiyoshi, Cedric Aymon, Philipp Blum, Christof Sidler, Gunter Heine, "A Flat miniature active magnetic motor bearing combination for HDD applications," 25th International Symposium on Incremental Motion Control Systems and Devices, San Jose, USA, July 1997.
  9. Christophe Gorecki, Eric Bonnotte, Hiroshi Toshiyoshi, Fred Benoit, Hideki Kawakatsu, Hiroyuki Fujita, "Novel Approach of Optically Active Silicon Based Intereferometric Structure for Sensing Applications," Technical Program of European Symposium on Lasers and Optics in Manufacturing (Conference on Lasers in Material Processing/Optics and Vision in Manufacturing), 16-20 June 1997, Fairground, Munich FR Germany.
↑

Year 1996 (2 articles)†

  1. H. Toshiyoshi and H. Fujita, "Microactuators for Optical Switches," Proc. 3rd France-Japan Cong. & 1st Europe-Asia Cong. on Mechatronics (MECHATRONICS '96), vol.2, Besancon, France, (1996.10), pp.614-619
  2. H. Toshiyoshi and H. Fujita, "Optical Crossconnection by Silicon Micromachined Torsion Mirrors," Digest IEEE/LEOS 1996 Summer Topical Meetings, Keystone, Colorado, USA, (1996.8), pp.63-64.
↑

Year 1995 (5 articles)†

  1. Yamato FUKUTA, Hiroshi TOSHIYOSHI, Shigeo NAMAMURA, Terunobu AKIYAMA, Hiroyuki FUJITA, "AN FEM MODELING OF PLASTICALLY REFORMED POLYSILICON BEAMS WITH JOULE HEAT" IEEE Forum on Micromachine and Micromechatrohnics, October 30-31, 1995, Nagoya Municipal Industrial Research Institute, Nagoya, Japan.
  2. Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, and Toshitsugu Ueda, "Microactuators Based on Newly Developed Pseudostatic Displacement Mechanism," 1995 Int. Mechanical Eng. Congress & Exposition (ASME '95), Nov. 12-17, 1995, San Francisco Hilton, San Francisco, California, pp.989-994.
  3. Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Toshitsugu Ueda, "Piezoelectric & Electrostatic Actuators to Generate Pseudo-Static Displacement from Resonant Oscillation," 4th Japan Int. SAMPE Symposium & Exhibition (JISSE-4), Sep. 25-28, 1995, Tokyo, Japan, pp.1070-1075.
  4. Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, and Toshitsugu Ueda, "A Piezoelectric Pseudo-Static Actuator for Large Displacement under AC Voltage Operation," The 8th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '95), Stockholm, Sweden, Jun. 25-29, 1995, 92-B5.
  5. Hiroshi Toshiyoshi, Hiroyuki Fujita, "An Electrostatically Operated Torsion Mirror for Optical Switching Device," The 8th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '95), Stockholm, Sweden, Jun. 25-29, 1995, 68-B1.
↑

Year 1994 (1 article)†

  1. Hiroshi Toshiyoshi, Hiroyuki Fujita, Toshitsugu Ueda, "A Self-excited Chopper made by Quartz Micromachining and its Application to an Optical Sensor," Proc. 7th IEEE Workshop on Micro Electro Mechanical Systems (MEMS '94), Jan. 25-28, 1994, Oiso, Japan, pp.325-330.
↑

Year 1993 (2 articles)†

  1. Hiroshi Toshiyoshi, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda, "A Piezoelectrically Operated Optical Chopper by Quartz Micromachining," The 7th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '93), Yokohama Japan, Jun. 7-10, 1993, pp.128-131.
  2. Hiroshi Toshiyoshi, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda, "Piezoelectrically Operated Actuators by Quartz Micromachining for Optical Application," Proc. IEEE Micro Electro Mechanical System Workshop (MEMS '93), Ft. Lauderdale, USA, Feb.7-10, 1993, pp.133-138.
*1 No printed proceedings distributed.
*2 No printed proceedings distributed.
*3 No printed proceedings distributed.
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