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#author("2023-09-06T02:06:54+00:00","default:hiroshi","hiroshi")
*Architecture of OXC with Electrostatic Torsion Mirrors [#q0ad0b15]
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*Bulk and Surface Micromachined Torsion Mirrors [#pfdb3c29]
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*Reference [#n3e59838]
+Hiroshi Toshiyoshi, Hiroyuki Fujita, "Electrostatic Micro Torsion Mirrors for an Optical Switch Matrix," IEEE J.Microelectromechanical Systems Vol. 5, No. 4 (1996.12), pp. 231-237.

#ref(00546402.pdf)

+Hiroshi Toshiyoshi, Hiroyuki Fujita, "Electrostatic Micro Torsion Mirrors for an Optical Switch Matrix," IEEE J.Microelectromechanical Systems Vol. 5, No. 4 (1996.12), pp. 231-237. https://ieeexplore.ieee.org/document/546402