Research/Micro Mechanical Digital-Analog Converter (MEMDAC) の変更点

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*MEMDAC (Micro Electro Mechanical Digital to Analog Converter) of Micro Displacement [#d1315288]
#ref(moving_shuttle.GIF,left,wrap,around,30%)
#ref(MEMDAC_SEM.jpg,left,wrap,around,23%)

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*Analogy to Electrical DAC [#wdea38aa]
#ref(conversion.jpg,left,wrap,around,17%)

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*MEMDAC Structure [#dc33e9df]
#ref(DACanalogy.jpg,left,wrap,around,19%)
#ref(MEMDACstructure.jpg,left,wrap,around,16%)

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*MEMDAC Displacement Output [#vd80c131]
#ref(MEMDAC_output.jpg,left,wrap,around,22%)

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*Reference [#w8b193b2]
+Hiroshi Toshiyoshi, Dai Kobayashi, Makoto Mita, Gen Hashiguchi, Hiroyuki Fujita, Junji Endo, Yasuo Wada, "Microelectromechanical Digital-to-Analog Converter of Displacement for Step Motion Actuators," IEEE/ASME J. Microelectromech. Sys. vol. 9, June 2000, p.218-225.