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#side(Hint)
#author("2023-08-12T06:17:05+00:00","default:hiroshi","hiroshi")


*Vacuum Chamber for MEMS Characterization [#cd05b2f5]
#ref(MVC60A.jpg,left,around,wrap,40%)
We have developed a handy vacuum chamber to measure the electromechanical characteristics of MEMS (such as amplitude-voltage, frequency response).  A MEMS chip is set inside the chamber and vacuum evacuated.  The chamber is small enouch (13 cm diameter) to be placed underneath the laser Doppler vibrometer.  It has a glass window through which the MEMS device could be visually observed.

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*Specification [#w658ec0f]
|outer diameter| 130 mm|
|inner diameter| 100 mm|
|chamber depth| 60 mm|
|tubes | 1/4 SUS Swedge Lock|

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*Manufacturer information [#j799caa0]
有限会社ＵＮＩＣＯ~
〒302-0034~
茨城県取手市戸頭1-11-15~
TEL：0297-78-5354~
FAX：0297-78-9383