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Photoresist Lens Scanner

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2Dscansmall.GIF

Lateral motion of micro lens with respect to the incident light can be used to scan the transmiting light. When an optical fiber fact is placed at the focal length of the microlens, the beam is first collimated by the lens and scanned by the lateral motion of the lens. This mechanism is very useful to adjust the optical axis offset between fiber and collimator as well as to scan the light beam for free-space optical interconnect. We used a thermally-reflow photoresist to make a spherical lens and drive it with integrated polysilicon surface micromachined actuators.

References

  1. Hiroshi Toshiyoshi, Guo-Dung John Su, Jason LaCosse, Ming C. Wu, "Micromechanical Lens Scanners for Fiber Optic Switches," Proc. 3rd Int'l Conf. on Micro Opto Electro Mechanical Systems (MOEMS 99), Aug. 30 - Sep. 1, 1999, Mainz, Germany, pp. 165-170.
  2. Hiroshi Toshiyoshi, Guo-Dung John Su, Jason LaCosse, Ming C. Wu, "Surface Micromachined 2D Lens Scanner Array," Proc. IEEE/LEOS Optical MEMS, Kauai, Hawaii, Aug. 21-24, 2000, Late News Session, PD-1.

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Last-modified: Thu, 08 May 2008 23:41:51 JST (3483d)