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We propose a new non-contact actuation principle for MEMS actuators using light beams. A silicon PN-junction photodiode is combined in parallel with a polysilicon capacitive actuator, where driving voltage is controlled by the photocurrent under light illumination. For a proof-of-concept demonstration, we used a photo-coupler with surface micromachined electrostatic cantilever, and observed the mechanical motion to be controlled by incoming optical signals.
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This principle has potential for controlling arrays of micro/nano mechanisms such as optical computing, optically-tunable opto-electromechanical components, and optically addressed data storages.
The idea of optically addressable MEMS mirror has been used in our power-over-fiber type optical endoscope. See the link below for more information:
2024-04-19 (金) 18:54:17
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