Research/Optical Crossconnect by Electromagnetic Torsion Mirrors

Electromagnetic Operation†

We improved our electrostatic type switch to develop an electromagnetically operated fiber optic switch. A magnetic FeNi film was deposited on the mirror to make it controllable in a magnetic field. V-grooves were formed by the self-alignment technique to the mirror. Total size was reduced for faster switching speed and lower insertion loss.

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Electromagnetically Latchable State Control†

The mirror could be latched at the ON or OFF states without a constant supply of energy thanks to the residual magnetism in the coil core used for the electromagnetic operation of the mirror.

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References†

Daisuke Miyauchi, Hiroshi Toshiyoshi, Hiroyuki Fujita, "Self-Alignment Fabrication Technique Surface-Micromachined Optical Switches to Bulk-Micromachined V-Grooves," Trans. IEE Japan, vol. 119-E, No. 2 (1999) pp.108-112.
Hiroshi Toshiyoshi, Daisuke Miyauchi, Hiroyuki Fujita, "Electromagnetic Torsion Mirrors for Self-Aligned Fiber Optic Cross-connectors by Silicon Micromachining," IEEE Journal of Selected Topics in Quantum Electronics (JSTQE), special issue on Micro-Opto-Electro Mechanical Systems (MOEMS), vol.5, No.1 (1999), pp.10-17.