Micro Motherboard and Micro Connectors†
Sensors, actuators, and integrated circuits made of different materials and by different processes can be assembled with this micro connector technique. The edge of a functional module is shaped into connector patterns, and is inserted into the slots of the micro motherboard. Chips can be plugged in and out several times like conventional connectors.
Implementation†
"Micro motherboard" with "micro connectors" of up to 6 slots, connector width 50 and 100 micron, length 200 microns, pitch 200 microns, contact resistance less than 0.2 Ohm/contact, stray capacitance 50pF, connect reinforced by electroplating of gold or copper.
Rerefences†
- Hiroshi Toshiyoshi, Yoshio Mita, Minoru Ogawa, Hiroyuki Fujita, "SILICON MICRO MOTHERBOARDS FOR THREE-DIMENSIONAL ASSEMBLING OF MICRO SYSTEMS," T.IEE Japan, 116-E(6), (1998), pp.444-448.
- Hiroshi Toshiyoshi, Yoshio Mita, Minoru Ogawa, Hiroyuki Fujita, "Micro Electrical Connectors by Silicon Anisotropic Etching," Seisan-Kenkyu (Monthly Journal of Institute of Industrial Science, University of Tokyo) vol. 49, No.12 (1997) pp.14-16.
- Hiroshi Toshiyoshi, Yoshio Mita, Minoru Ogawa, Hiroyuki Fujita, "Chip-Level Three-Dimensional Assembling of Microsystems," 1999 SPIE conference on Micromachining and Microfabrication, 30 March - 1 April, 1999, Paris, France., Presented by H. Fujita
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