Top > Research > MEMS Variable Optical Attenuator with Vertical Comb Drive Mechanism

Electrostatic Vertical Comb Drive Actuators

koshin_mirror.jpg

A torsion mirror with electrstatic vertical comb drive actuators has been developed by using deep RIE on an SOI wafer.

Optical Scan Demonstration

HO_LaserScan.jpg

The mirror shown above is scaning incident light beam with a large optical scan angle of 40 degrees at the resonant frequency of 6 kHz with relatively small voltage 9 Vac.

Varialbe Optical Attenuator --- a fiber optic component ---

koshin_VOA.JPG

The mirror is used for an variable optical attenuator (VOA) for fiber optic communications.

References

This work has been done in collaboration with Koshin Kogaku Co., Ltd.
Hirosh Obi, Toshio Yamanoi, and Hiroshi Toshiyoshi (C) 2004
Conference report on this work (in Japanese)


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Last-modified: Thu, 08 May 2008 22:47:18 JST (3427d)