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We have developed a handy vacuum chamber to measure the electromechanical characteristics of MEMS (such as amplitude-voltage, frequency response). A MEMS chip is set inside the chamber and vacuum evacuated. The chamber is small enouch (13 cm diameter) to be placed underneath the laser Doppler vibrometer. It has a glass window through which the MEMS device could be visually observed.
| outer diameter | 130 mm |
| inner diameter | 100 mm |
| chamber depth | 60 mm |
| tubes | 1/4 SUS Swedge Lock |
有限会社ＵＮＩＣＯ
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2024-04-25 (木) 06:59:01
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