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Vacuum Chamber for MEMS Characterization

MVC60A.jpg

We have developed a handy vacuum chamber to measure the electromechanical characteristics of MEMS (such as amplitude-voltage, frequency response). A MEMS chip is set inside the chamber and vacuum evacuated. The chamber is small enouch (13 cm diameter) to be placed underneath the laser Doppler vibrometer. It has a glass window through which the MEMS device could be visually observed.

Specification

outer diameter130 mm
inner diameter100 mm
chamber depth60 mm
tubes1/4 SUS Swedge Lock

Manufacturer information

有限会社UNICO
〒302-0034
茨城県取手市戸頭1-11-15
TEL:0297-78-5354
FAX:0297-78-9383


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Last-modified: Fri, 09 May 2008 23:16:14 JST (3482d)